5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SQ2000 20 ms or less Cylinder Speed Chart Pressure: 0.5 MPa/Load factor: 50% Flow Characteristics Note) Series CJ2 6 10 16 20 25 32 40 Series CM2 Bore size (mm) Base mounted Average speed (mm/s) Metal seal Rubber seal C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 800 700 600 500 400 300 200 100 0 Perpendicular, Upward actuation Horizontal actuation SQ1000 0.63 0.11 0.14 0.80 0.20 0.19 800 700

Thomas oil-less linear diaphragm compressor / vacuum pump, 230/50/1 Flow Rate: 12.5 LPM , 12.5 LPM, Max Pressure: 4.35 PSIG / 121 in H20 / 300 mbar , 4.35 PSIG / 121 in H20 / 300 mbar, Max Vacuum: 10.3 in HgV / -350 mbar , 10.3 in HgV / -350 mbar, Voltage (50 Hz): 230, Frequency (Hz): 50, Phase: 1-phase, Item Dimensions: Length: 4.21 in / 107 mm Width

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Made to Order (Refer to page 549 for details.) 548 Series AS-FG Speed Controller with One-touch Fitting Stainless Steel Series In-line Type How to Order AS 200 1 F G 06 Lock nut option Nil J Hexagon lock nut Round lock nut Body size 100 200 205 300 400 AS M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Made to Order (Refer to the below for details.)

Low torque Metal seal type Rotary joint

.: If adjacent ports are connected to positive vacuum pressure of -0.1 MPa and 0.1 MPa in MQR12, then differential pressure is 0.2 MPa, and leakage is 300 (cm3/min). 1000 (300) 0 0 0 . 1 0 . 2 0 . 3 0 . 4 0 . 5 0 . 6 0 . 7 0 . 8 0 . 9 1 Differential pressure [MPa] Change in rotational torque with rotation speed Temperature rise with rotation speed 0.4 30 MQR4 MQR2 MQR1 Temperature rise [C

Scale Cylinder & Counter Series CE

DATA OUT 1 2 3 SET 1 2 SET MONOSASHI-KUN AC100V OUT1 COM OUT2 COM COM OUT3 Series Guide Series CE1 Bore size (mm) Available stroke range Standard stroke (mm) Series CEP1 Standard stroke (mm) Bore size (mm) 12 equiv. 250 400 500 300 175 200 150 125 100 75 50 100 25 75 50 25 12 25 to 150 20 equiv. 20 25 to 300 32 25 to 400 40 25 to 600 50 25 to 600 63 25 to 600 CEU1 CEU5 Output transistor system

Mechanical Valves Series NVM, NVFM, NVZNI

Cycle Rate 300 cPM Weight (Valve Body Only) oz. (o) 5.1 (144.6) 10.3 (292) Materials Patented Spool and Sleeve Design High Flow vs.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

283 13.5 13 14 15 16 360.5 350 331 14.5 373 362.5 347 13 323 312.5 299 12 348 337.5 315 16.5 50

AC Servo Motor Driver (MECHATROLINK-III type)

Note: The 24 VDC external power supply capacity must be 50 mA minimum. The DRIVERs input circuit uses bidirectional photocoupler. Select either the sink circuit or the source circuit according to the specifications required for each machine. Note: The connection example in 2.3 shows sink circuits.

ZB-OM00301

A-C ON OFF 10msec ON 10 A B OFF 50 A B 10 1 50 3 3 24 - No.ZB-OM00301 ZB / / Assy /HNBR Assy //HNBR 25 - No.ZB-OM00301 2 ()() 5kPa () ZFAZFBZFC ON ZB1-VQ110U N.C (0.3 0.4 0.5 0.6) ZB1-VQ110L (0.30.4) ZB1-VQ120U N.C ZB1-VQ110N.C.

Bore sizes: 25, 32 40, 50, 63 mm; Stroke lengths: 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 mm; Maximum stroke length: 1300 mm (25, 32, 40, 50 & 63 bore); Minimum operating pressure: 0.18 MPa (26 psi); Speed: 50 ~ 300 mm/sec.

Bore sizes: 25, 32 40, 50, 63 mm; Stroke lengths: 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 mm; Maximum stroke length: 1300 mm (25, 32, 40, 50 & 63 bore); Minimum operating pressure: 0.18 MPa (26 psi); Speed: 50 ~ 300 mm/sec.

Thomas oil-less linear diaphragm compressor / vacuum pump, 230/50/1 Flow Rate: 12.5 LPM , 12.5 LPM, Max Pressure: 4.35 PSIG / 121 in H20 / 300 mbar , 4.35 PSIG / 121 in H20 / 300 mbar, Max Vacuum: 10.3 in HgV / -350 mbar , 10.3 in HgV / -350 mbar, Voltage (50 Hz): 230, Frequency (Hz): 50, Phase: 1-phase, Item Dimensions: Length: 4.21 in / 107 mm Width

VFA3000

Lubrication Not required Mounting orientation Impact/Vibration resistance (m/s2) Note) Free 300/50 Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal is ON and OFF .

ZSE30/ISE30

Maximum load impedance: Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 Minimum load impedance: 50 Reduce/Increase supply pressure to within the regulating pressure range. Applied pressure error Brown DC(+) Supply pressure is below the minimum regulating pressure.

IIIIIII

Cycle Rate 300 cPM Weight (Valve Body Only) oz. (o) 5.1 (144.6) 10.3 (292) Materials Patented Spool and Sleeve Design High Flow vs.

Series HAW Water Cooled Aftercooler 1

HAW2 HAW7 HAW22 HAW37 HAW55 HAW75 HAW110 Model Screw type compressor Reciprocating type compressor Screw type compressor 2.2 55 110 7.5 75 22 37 Applicable compressor (kW) 2.2 37 75 7.5 55 15 22 300 8600 18000 1000 12000 3300 5700 (1) Air flow rate l/min(ANR) Reciprocating type compressor 300 5600 11000 1000 8000 2100 4300 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

08-cs1-e

CS1N180A-PS CS1N200A-PS CS1N250A-PS CS1N300A-PS Seal kit includes a grease pack (125 to 160: 40 g, 180 and 200: 50 g, 250 and 300: 60 g). Order with the following part number when only the grease pack is needed.

Miniature Regulator

400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) ARP Pressure Characteristics (Representative Values) IR-A IR Conditions: Inlet pressure 0.7 MPa Outlet pressure 0.2 MPa Flow rate Q = 20 L/min (ANR) 0.30 IRV Outlet pressure (MPa) 0.25 Set point VEX 0.20 SRH SRP 0.15 SRF 0.10 0.2 0.3 0.4 0.5 0.6 0.7 0.8

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

N.C. 3 2 1 300 13 16 5.5 2 x 2.8 UL1007 AWG22 4.5 16.5 For LVM12R 57 2 x 2.7 Mounting hole Push type Manual override N.O. N.C. 3 2 1 N.O.

ARJ1020F

Inch size ARJ310F-N01 5/32" 1/4" 03 07 14-4-11 9 Series ARJ310 Flow Characteristics Inlet pressure: 0.7 MPa ARJ310-01 ARJ310F-01-04 ARJ310F-01-06 0.7 0.7 0.7 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0.0 0.0 0.0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow