Valve Stations: 7 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Specifications: Standard Internal Pilot, A, B Port Size: N7 (1/4" One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 2 (Lateral), Valve Stations: 7 Stations, P,E Port Location: D Side, SUP/EXH Block: Internal Pilot, A,B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)

Valve Stations: 7 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Specifications: Standard Internal Pilot, A, B Port Size: N3 (5/32" One-touch Fitting)

Model: 51 (Bottom Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 2 (Lateral), Wiring Specification: All Double Wiring, Valve Stations: 7 Stations, P,E Port Location: D Side, A,B Port Size: M5, Thread: T (NPTF)

Model: 51 (Bottom Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 7 Stations, P,E Port Location: D Side, A,B Port Size: M5, Thread: T (NPTF)

Model: 51 (Bottom Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 7 Stations, P,E Port Location: D Side, A,B Port Size: C4 (ø4 One-touch Fitting, Fixed), Thread: T (NPTF)

Electric Actuator with Integrated Guide

-1) x pitch 47.5 Section AA n1 100 200 300 400 500 600 n2 1 1 1 1 2 2 Stroke Model LTF6EPF100--X10 LTF6EPF200--X10 LTF6EPF300--X10 LTF6EPF400--X10 LTF6EPF500--X10 LTF6EPF600--X10 1.

SS5Y3 7 STA MANIFOLD BASE. 0.597 lb. VVM.

Compact 5-Port Solenoid Valve

C10: 10 (SMC) C12: 12 (SMC) L1 = 16 x n1 + 147 + 47 x n2 L2 = 16 x n1 + 53.5 L4 = L3 10.5 L5 = (L3 L1) / 2 L6 = 47 x n2 + 81.5 * These figures show the JJ5SY5-10S6Q22-05D-C12. * Refer to page 99 for dimensions of external pilot (Made to Order) and silencer. n1: Valve stations n2: I/O unit stations L3: DIN Rail Overall Length Valve stations (n1) I/O unit stations (n2) 2 3 4 5 6 7 8 9 10

LEC-OM02704CN

)0 RX(n1)1 RY(n1)9 RX(n1)9 RY(n1)A RES RX(n1)A ALM 15 RX(n1)B Ready CRD RY(n1)B RX(n1)C RY(n1)F RX(n1)F (RWwn) (RWrn) RWwn 1 RWrn 1 RWwn1 2 RWrn1 2 RWwn2 RWrn2 RWwn3 RWrn3 . n 3 11 3CC-Link (2) 2 RXn/RYn64RWrn/RWwn8 (RYn) (RXn) () () CN6 () () CN6 RYn0 ON SON RXn0 RD 14 RYn1 ST1 RXn1 INP RYn2 ST2 RXn2 CPO RYn3 DOG 2 RXn3 ZP 16 RYn4 LSP 3 RXn4 TLC RYn5 LSN 4 RXn5 RYn6

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

) (Station 1) (Station 1) (Station n2) Light/surge voltage suppressor Individual SUP spacer Individual EXH spacer 63.5 60 52.5 12 (For DIN rail mounting) (7.5) n1 = Valve stations n2 = Input block stations L2 = L1 10.5 L3 = 16 x n1 + 60 L4 = L3 + 81 + 21 x n2 L5 = (L1 L4)/2 L6 = 16 x n1 + 48 L7 = 21 x n2 + 81.5 L1: DIN rail overall length Valve stations (n1) 2 3 4 5 6 7 8 9 10 11 12 13

Series SV

) (Station 1) n1 = Valve stations n2 = Input block stations Light/Surge voltage suppressor L2 = L1 10.5 L3 = 16 x n1 + 60 L4 = L3 + 81 + 21 x n2 L5 = (L1 L4)/2 L6 = 16 x n1 + 48 L7 = 21 x n2 + 81.5 63.5 60 52.5 12 (for DIN rail mounting) (7.5) L1: DIN rail overall length (mm) Valve stations (n1) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Input block stations (n2) 0 1 2 3 4 5 6 7 8

C85

Note 8 10 12 16 20 25 Every set includes: n1 rod packing n1 packing retaining washer n1 retaining ring 20 C85-20PS Foot (1 pc.) C85L16A C85L25A C85L10A Foot (2 pcs. with mounting nut 1 pc.)

High Vacuum Angle Valve

Example) In cases where the material of the valve seal is changed: XLA100-30-1-N1-X152 Exterior Seal/Valve Seal Model Description (Construction no.)

SV

) (Station 1) Individual SUP spacer Interface regulator SV2000-00SV2000-M1Interface regulator Light/Surge voltage suppressor Individual EXH spacer MAX.21 63.5 60 52.5 12 (For DIN rail mounting) n1 = Valve stations n2 = Input block stations (7.5) B B B B 145.6 127.6 L2 = L110.5 L3 = 16 x n1 + 60 L4 = L3 + 81 + 21 x n2 L5 = (L1L4)/2 L6 = 16 x n1 + 48 L7 = 21 x n2 + 81.5 A A A A B A B A B A

Aluminum High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

7.4

) 22.8 10.5 7.4 58.5 39.7 41.8 9.2 22 28.5 22.9 20.4 10.5 8 8 3 x C2, C4, N1, N3 <1(P), 5(EA), 3(EB) port> C2: 2 One-touch fitting C4: 4 One-touch fitting N1: 1/8" One-touch fitting N3: 5/32" One-touch fitting 8.7 With plug connector/light, built-in silencer S0716S-mM(O)-m 16.7 2-Position Double/4-Position Dual 3-Port Grommet: S07 6-mG-m 2 A B C 8 2 x 3.2 5.3 2 x C2, C4, N1, N3 <4(A), 2

0.4

+ 65.5 L4 = L3 + 81 + 47 x n2 L5 = (L1 L4)/2 L6 = 10.5 x n1 + 45 L7 = 47 x n2 + 89.8 L1: DIN Rail Full Length Valve stations (n1) I/O unit stations (n2) 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 0 1 2 3 4 5 6 7 8 9 198 198 210.5 223 235.5 248 260.5 260.5 273 285.5 298 310.5 323 335.5 335.5 348 360.5 373 385.5 398 398 410.5 423 435.5 235.5 248 260.5 273 285.5 298 298

Table of Contents

OUT2 P2(n2) P1(n1) Supply pressure verification Leak test CH P2(n1) > P1(n2) 10.0 to 101.0 kPa Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n2) P1(n1) P2(n1) > P1(n2) 0.1 to 1000.0 MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

SX

4, 6 n1: Number of SX3000s stations n2: Number of SX5000s stations (Station n) (Station 1) 2n2-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 8 Equivalent to applicable D-sub connector JIS-X-5101 MIL-C-24308 16 x n2 12.5 x n1 DIN rail DIN rail holding screw Manual override (Press and turn for the locking type.)