Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 13 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: C6 (ø6 One-touch Fitting), Mounting: AA (Direct Mounting, Name Plate w/Station Number)

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: FA (PROFINET - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 13 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: N3 (ø5/32" One-touch Fitting), Mounting: BA (Direct Mounting, Name Plate, w/o Station Number)

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 13 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: C6 (ø6 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate, w/o Station Number)

Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: 0 (w/o SI Unit), SI Unit Common, End Plate: w/o SI Unit, I/O Unit Stations: None, Valve Stations: 13 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), A,B Port Size: N7 (ø1/4" One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: 0 (w/o SI Unit), SI Unit Common, End Plate: w/o SI Unit, I/O Unit Stations: None, Valve Stations: 13 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), A,B Port Size: N3 (ø5/32" One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: 0 (w/o SI Unit), SI Unit Common, End Plate: w/o SI Unit, I/O Unit Stations: None, Valve Stations: 13 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), A,B Port Size: C6 (ø6 One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: 0 (w/o SI Unit), SI Unit Common, End Plate: w/o SI Unit, I/O Unit Stations: None, Valve Stations: 13 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), A,B Port Size: C4 (ø4 One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: V (CC-Link), SI Unit Common, End Plate: 2 (Positive Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 13 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), A,B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN

Electric Actuator with Integrated Guide

-1) x pitch 47.5 Section AA n1 100 200 300 400 500 600 n2 1 1 1 1 2 2 Stroke Model LTF6EPF100--X10 LTF6EPF200--X10 LTF6EPF300--X10 LTF6EPF400--X10 LTF6EPF500--X10 LTF6EPF600--X10 1.

LEC-OM02704CN

)0 RX(n1)1 RY(n1)9 RX(n1)9 RY(n1)A RES RX(n1)A ALM 15 RX(n1)B Ready CRD RY(n1)B RX(n1)C RY(n1)F RX(n1)F (RWwn) (RWrn) RWwn 1 RWrn 1 RWwn1 2 RWrn1 2 RWwn2 RWrn2 RWwn3 RWrn3 . n 3 11 3CC-Link (2) 2 RXn/RYn64RWrn/RWwn8 (RYn) (RXn) () () CN6 () () CN6 RYn0 ON SON RXn0 RD 14 RYn1 ST1 RXn1 INP RYn2 ST2 RXn2 CPO RYn3 DOG 2 RXn3 ZP 16 RYn4 LSP 3 RXn4 TLC RYn5 LSN 4 RXn5 RYn6

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

) (Station 1) (Station 1) (Station n2) Light/surge voltage suppressor Individual SUP spacer Individual EXH spacer 63.5 60 52.5 12 (For DIN rail mounting) (7.5) n1 = Valve stations n2 = Input block stations L2 = L1 10.5 L3 = 16 x n1 + 60 L4 = L3 + 81 + 21 x n2 L5 = (L1 L4)/2 L6 = 16 x n1 + 48 L7 = 21 x n2 + 81.5 L1: DIN rail overall length Valve stations (n1) 2 3 4 5 6 7 8 9 10 11 12 13

Series SV

) (Station 1) n1 = Valve stations n2 = Input block stations Light/Surge voltage suppressor L2 = L1 10.5 L3 = 16 x n1 + 60 L4 = L3 + 81 + 21 x n2 L5 = (L1 L4)/2 L6 = 16 x n1 + 48 L7 = 21 x n2 + 81.5 63.5 60 52.5 12 (for DIN rail mounting) (7.5) L1: DIN rail overall length (mm) Valve stations (n1) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Input block stations (n2) 0 1 2 3 4 5 6 7 8

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

mounting reference n1 Stroke Model plane should be used as standards when mounting onto equipment.

Air Cylinder Series CM2

MB Cushion needle (Width across flats 1.5) With rod boot With air cushion MB1 l 8 8 45 WA WA B3 Width across flats CA2 e CS1 JH CS2 N1 N1 JW f h ZZ + Stroke Built-in One-touch fittings G G One-touch fitting port size P Q (mm) H1 H G FL I F CX CI B1 CD AL D A MM L K KA NA NN N Bore size E 20 0 0.033 0 0.033 0 0.033 0 0.039 20 41 8 10.5 28 13 5 12 20 8 15.5 8 18 M8 x 1.25 13 12 5 6 24 M20

C85

Note 8 10 12 16 20 25 Every set includes: n1 rod packing n1 packing retaining washer n1 retaining ring 20 C85-20PS Foot (1 pc.) C85L16A C85L25A C85L10A Foot (2 pcs. with mounting nut 1 pc.)

C85

Note 8 10 12 16 20 25 Every set includes: n1 rod packing n1 packing retaining washer n1 retaining ring 20 C85-20PS Foot (1 pc.) C85L16A C85L25A C85L10A Foot (2 pcs. with mounting nut 1 pc.)

High Vacuum Angle Valve

Example) In cases where the material of the valve seal is changed: XLA100-30-1-N1-X152 Exterior Seal/Valve Seal Model Description (Construction no.)

SV

) (Station 1) Individual SUP spacer Interface regulator SV2000-00SV2000-M1Interface regulator Light/Surge voltage suppressor Individual EXH spacer MAX.21 63.5 60 52.5 12 (For DIN rail mounting) n1 = Valve stations n2 = Input block stations (7.5) B B B B 145.6 127.6 L2 = L110.5 L3 = 16 x n1 + 60 L4 = L3 + 81 + 21 x n2 L5 = (L1L4)/2 L6 = 16 x n1 + 48 L7 = 21 x n2 + 81.5 A A A A B A B A B A

7.5

Direction Horizontal, Upward, Downward (Using elbow fittings for upward or downward) C6, C8, N7, N9 (Inch size elbow fitting is not available.) 1(P), 3/5(E) port Port size C2, C4, N1, N3, M3 SJ2000 4(A), 2(B) port C2, C4, C6, N1, N3, N7, M5 SJ3000 Weight W (g) Note 2) W = 51n + m + 133 n: Number of SUP/EXH blocks m: Weight of DIN rail Note 1) When many valves are operated simultaneously,

Aluminum High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.