COQ2BP

18 Ml0xl.5 16.2 43.5 Ml0xl .5 18 9 11 5 Ml0Xl.5 63 112.7 M12xl .75 22 M12xt.75 19.5 11 53.5 13 7 MI6X2.0 59 20 21 80 133 .5 Rod Side Flange: COQ2FP 0-0 OM-DO 4-oFO 40 Thread d Ih A SpeCIal cap bolt 4-N . rBote size A L 0 R N FD FT FV FX F2 Ll H C !

Precision Regulator

Description Material Qty. 11 Diaphragm assembly NBR, other P362010-1 1 1 1 1 1 P362020-13 P362020-2 P362020-13 P362020-2 12 Diaphragm assembly NBR, other P362010-2 1 1 1 1 1 P362020-5 P362020-5 P362030-34 P362030-34 13 Diaphragm NBR, other 1 1 P36202019 P36202019 14 Valve Stainless steel, NBR P36201058 1 15 Valve Stainless steel, H-NBR 1 1 P36202068#1 P36202068#1 16 Valve Brass

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

Process Data Diagnosis items Bit offset Item Note Internal product malfunction Outside of zero-clear range Outside of rated pressure range Upper temperature limit exceeded inside the product 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 2 Diagnosis 0: Normal 1: Abnormal 3 to 15 Measured pressure value Unsigned 13 bit Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Measured

High Vacuum L Type Valve

Period and Scope of Warranty 13 7. Parts Replacement Procedure 14 1 XL-OMS0001-B Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Clean Gas Filter

0.7 MPa 65 0.001 0.5 MPa 0.0001 100 SFB302-02: TSJ 1/4 (Tube Swage Joint) 0.1 1 10 Flow rate L/min (ANR) 2 x 4.5 (Mounting hole) Bracket 2 x 1/4 TSJ 21.5 50 40 IN 19 1 13 22.5 69 SFB305-02, SFB315-02: URJ 1/4 (Union Ring Joint) 2 x 4.5 (Mounting hole) Bracket 2 x 1/4 URJ 21.5 50 40 IN 19 1 22.5 13 A Model A 79 84 SFB305-02 SFB315-02 308 Clean Gas Filter: Disposable Type/Multiple Disc Type

LG1H

Manufacturer M4 x 0.7 M3 x 0.5 Thread size 32.5 21.5 Effective thread length (mm) 8 6 Quantity 2 4 P.C.D. 46 45 Motor mounting area When mounting a coupling on the motor, mount it within the dimensional range shown on the left. A A B Section BB P.C.D.

Speed Controller with One-touch Fittings Series AS In-line Type 1

34.1 39.1 8.2 64.4 15.2 18 5/16" AS3001F-09 AS4001F-10 36 43.6 51.1 18.5 10 21 82 11.3 26.5 53 35.3 40.3 9.5 70.8 17.9 21 3/8" AS3001F-11 AS4001F-12 40 44.6 52.1 20.9 12 22 97 43.5 51 10.3 76.9 17.9 21 3/8" AS4001F-11 26.5 106 44.9 52.4 11.6 83.1 21.7 22 1/2" AS4001F-13 15-9-12

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Elbow Universal 2 3 Metric size Inch size 3.2 23 01 1/8" 04 06 08 10 12 03 05 07 09 11 13 4 5/32" 6 3/16" Control 8 1/4" Meter-out Meter-in 0 1 10 5/16" 12 3/8" Use 1/8" tube. 1/2" M5 Port size With One-touch fitting M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 01 02 03 04 U10/32 N01 N02 N03 N04 Needle Valve/Flow Characteristics AS1201FG, AS1211FG AS2201FG-

3 Port Air Operated Valve Series SYJA300 1

South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R P 27 30 (2) 7 12.7 VR A 9.2 VH 2 15 (Bracket) 10 VHS 11 Base mounted: SYJA34-M5 14 5 10 Manual override (Non-locking) 2-3.2 (External pilot port) (For mounting) 17 3 (For solenoid valve) 2.5 M3 x 0.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Breathing hole) 13

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Type of actuation C (dm3/(sbar)) b Cv C (dm3/(sbar)) b 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Cv P, EA, EB A, B 35 37 Single Double 2 position 0.44 0.61 0.16 0.64 0.45 0.18 0.46 0.13 0.47 0.43 0.48 0.13 Closed center Exhaust center Pressure center SA SYA320-M5 M5 x 0.8 0.42 0.47 0.13 0.47 (0.44) 0.41 (0.37) 0.13 (0.12) 3 position 39 VA 0.50 (0.41) 0.48 (0.35) 0.15 (0.11) 0.47 0.43 0.13 44 46

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

10 to 50 54 14 depth 10.5 63 64 56 15 20 77 10.5 M10 x 1.5 103 7 17 8 60 9 1/4 15 93 47.5 19 56 75, 100 64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 7

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

For Deionized Water and Chemicals Digital Flow Switch Series PF2D How to Order Remote Type Sensor Unit C PF2D5 13 20 1 Option (Refer to page 55.) Flow rate range None e-con connector x 1 pc. Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

Air Cylinder CP Series Cylinder Positioner Assembly

) 0.67 ( 1 7 ) 0 2 8 t7l M l a x 1 5 1.22 ( 3 i ) 3.86 (98) 3.39 (86) 0.45 11 5) 0.59 (15) 1105) 2.32 (59) 5 . 1 2 1130) 2.24 (56) 6.73 (171) 2.O5 (52) 11.2) 2.60 (66) 7.05 (179) 5.12 l130) 2.99 (76) 6.30 tr60) 2.80 l71l 4.07 (205) 2.56 (65) 0.49 12 s) 3.15 (80) 8.43 (214) 1.57 (40) 4.69 (1r9) a.o2 (1021 3.O7 (78) 0 9 4 (25) 2.05 (52t 0.55 (14) 0.83 l21l M10r1.75 0 4 3 ( 1 1 ) M22r1.5 i.46

Series H, DL, L, LL Self-align Fittings

M L1 L2 1 4 8 6 DEF06-02 48 20 11 16 16 50.5 46.5 17 15 13 11 19 17 14 12 14 12 6max. 4max. 3 8 DEF08-03 66 3 8 3 8 DEF10-03 10 12 53.5 89 DEF12-03 54.5 34 51 17 17 17 17 15 17 19 19 104 17 19 17 19 7max. 7max. 105 Series H, DL, L, LL Self-align Fittings Plug: DP Applicable tube O.D. Weight (g) Part No.

Pressure switch for energy-saving control ejector with N.O. type valve

function 24 F1 OUT1 25 F2 OUT2 27 F3 Response time 29 F4 Auto-preset 30 F6 Fine adjustment of display value 32 F11 Display resolution 33 F80 Power saving mode 34 F81 Security code 35 F90 Setting of all functions 36 F96 Check of suction command signal 38 F98 Check of output 39 F99 Reset to the default setting 41 Other Settings 42 How to stop energy-saving control function 45 Maintenance 46

Digital pressure switch for energy-saving control ejector

OUT1 24 F2 OUT2 26 F3 Response time 28 F4 Auto-preset 29 F6 Fine adjustment of display value 31 F11 Display resolution 32 F80 Power saving mode 33 F81 Security code 34 F90 Setting of all functions 35 F96 Check of suction command signal 37 F98 Check of output 38 F99 Reset to the default setting 40 Other Settings 41 How to stop energy-saving control function 44 Maintenance 45 Troubleshooting 46

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Item CH2 measured value: 16-bit signed integer Bit offset 47 46 45 44 43 42 41 40 39 38 37 36 35 34 33 32 Item CH32 measured value: 16-bit signed integer Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item CH4 measured value: 16-bit signed integer Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Error diagnosis CH4 diagnosis CH3 diagnosis CH2 diagnosis CH1 diagnosis Reservation

NARM Series

0.05 to 0.7) Ambient and fluid temperature 23~140F (5 to 60C) (No freezing) Fluid Air Cracking pressure (Valve) psig (MPa) 3 (0.02) Construction Relief style Port size/Weight Model Porting Port size Weight lb (g) Small Size Pressure Gauge 15mm Reverse flow function available on the standard model IN OUT Total weight (n: stations) Regulator (Except manifold) (80 X n) + 23 Common IN 1 8 1 8 .13

PF2D

1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

Series SYJA300 3 Port Air Operated Valve

holes) 22 SlA 16.4 10 VlA Manual override (Non-locking) M3 X 0.5 (Pilot port) 3-M3 X 0.5 (P, A, R port) 1 (Bleed port) 1.5 SlA VlA R P 30 2 27 7 A 12.7 9.2 VM/VR 2 15 Bracket 10 VH 11 Base mounted: SYJA3l4-M5 14 5 10 Manual override (Non-locking) 2-3.2 (External pilot style) (Mounting holes) 17 3 (For solenoid valve) M3 X 0.5 2.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Bleed port) 13