SMC Corporation of America
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Terminal cover Round head combination screw M3 Tightening torque 0.5 to 0.6 Nm A G 1/2 Tightening torque 0.5 to 0.6 Nm + Mark Mark 2 1 + A Round head combination screw M3 tightening torque 0.5 to 0.6 Nm Conduit terminal View A-A (Internal connection diagram) 16-8-20 21 Series ISA2 Specific Product Precautions 3 Be sure to read before handling. 2 Port Solenoid Valve Series VCA Regulator Series

Zuazobidea 14, Pol. Ind. Jundiz, E-01015 Vitoria Phone: 945-184 100, Fax: 945-184 124 Belgium SMC Pneumatics N.V./S.A. Nijverheidsstraat 20, B-2160 Wommelgem Phone: 03-355-1464, Fax: 03-355-1466 Greece S.

Terminal cover A Round head combination screw M3 Caution 1. Filters and strainers 1. Be careful regarding clogging of filters and strainers. 2. Replace filter elements after one year of use, or earlier if the pressure drop reaches 0.1MPa. 3. Clean strainers when the pressure drop reaches 0.1MPa. 2.

35.320 L 0.0353 L 0.2642 Weight g 0.0353 kg 2.2046 1.356 N . m 1.356 J 3.6 l\rJ mm3 cm3 (cc) m3 L L rn3 in3 Energy ft3 N. m f t 3 J gar(u.s.)

(The tightening torque of the M3 screw is approximately 0.5 Nm.) The detection position can be changed under the conditions described in step e. 2.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 https://www.smcworld.com 2022 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. D-G

INP 1 INP ON 0.50 -35- 6.3 0.1mm [Nm] mm LEF16 M4x0.7 1.5 6 LEF25 M5x0.8 3.0 8 LEF32 M6x1 5.2 9 LEFS40 M8x1.25 12.5 14 A A mm) mm LEF16 M3 3.5 20 LEF25 M4 4.5 24 LEF32 M5 5.5 30 LEFS40 M6 6.6 31 40mm 6.4 6 /1000km /500 -36- 1. 2. 3. 1. 2. a. b. c. d.

for maniicld mountinq CE marked 0.1s high speed response 3 CE marked DeviceNet compatible 4.5. 6. 8. 14 CE marked lA"o.amLt@g 3. 5. 7. 10 CE marked digital iiffifre 3 . 5 . 6 . 1

Max. load mass Review M1, M2, M3. M max is the allowable moment. 2 = M/M max 2. Static moment Review Me1, Me3. Me max is the allowable moment. 3 = Me/Me max 3.

(Fixed SI unit [(l/min, or l, m3 or m3 x 103)] will be set for switch type without the unit switching function.) Note 3) The high flow rate type is CE marked; however, the linearity with applied noise is 5% F.S. or less. Note 4) Switch output and accumulated pulse output selections are made using the button controls.

Station n L1 L2 L1 L2 Station 2 52 43 63 54 Station 20 340 331 369 360 3 68 59 80 71 4 84 75 97 88 5 100 91 114 105 6 116 107 131 122 7 132 123 148 139 8 148 139 165 156 9 164 155 182 173 10 180 171 199 190 11 196 187 216 207 12 212 203 233 224 13 228 219 250 241 14 244 235 267 258 15 260 251 284 275 16 276 267 301 292 17 292 283 318 309 18 308 299 335 326 19 324 315 352 343 Port size M5

CN1 CN2 Shuts off 3 12 13 9 10 7 8 20 17 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG P5 19 OP 4 11 LG V+ 1 P5 LG MR MRR MD MDR SD 20 12 7 6 SG P5 LG MR MRR MD MDR SHD P5 LG MR MRR MD MDR SHD 7 8 1 2 4 5 9 7 8 1 2 4 9 Detector 17 16 Plate 5 (Note 2) 11 15 14 2 12 (Note 6) Connect the shielding wire securely to the ground plate inside the connector.

SUP, VAC port (4, 5/32") OUTx 3 2 5 EXH, ATM port (4, 5/32") 38 2-M3 x 0.5 thread depth 3.5 Bracket mounting hole L bracket (optional) Flat bracket (optional) 6-3.5 19 74 2-3.5 19 27 19 64 28 Minimum bending radius 80 Body +50 0 3000 15 35 (30.9) 8.7 4 9.9 Cable connector (4-wire) Straight type (optional) 7 14 Body Cable connector (4-wire) Right angle type (optional) 8.3 4.3 10.2 Minimum

Model AU ALU ALHU F R Barb fitting M3, M5 M3 M5 Barb elbow Barb one-touch Reducer Removing tubing Withdraw the sleeve straight along the tubing. Use a tool such as long-nose pliers if it is difficult to pull out by hand. 1. Withdraw the tubing straight. 2.

Model AU ALU ALHU F R Barb fitting M3, M5 M3 M5 Barb elbow Barb one-touch Reducer Removing tubing Withdraw the sleeve straight along the tubing. Use a tool such as long-nose pliers if it is difficult to pull out by hand. 1. Withdraw the tubing straight. 2.

A XL Series Case Model Weight (kg) A (mm) Conductance (L/s) XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 B (mm) 40 103 0.25 5 50 113 0.45 14 65 158 1.1 45 Little heavy metal contamination 70 170 1.6 80 88 196 2.9 160 90 235 5.0 200 The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination

13 14 14 17 14 16 15 18 Reed switch Without indicator light RB 8 7 5.5 6.5 6.5 J 2-color indication 2-color indication Water resistant 3.5 3.5 5 5 5 Grommet (In-line) D-F5BAL DSolid state switch D-F5NTL D-G5NTL D-Y69A/Y7PV/Y69B D-Y7NWV/Y7PWV/Y7BWV With timer 4 4 4.5 4.5 4.5 -X Grommet (Perpendicular) 2-color indication 20With pre-wire connector is also available in solid state auto switches

Bolts Size Tightening torque (Nm) M3 0.6310% M4 1.510% M5 310% 8.Troubleshooting When a fault occurs during the operation, the corresponding alarm or warning is displayed.

OFF ON OFF ON 6 4 3 2 2 1 8 4 0.5 10 5 0.5 min s IDF60/70/80/90 Series 13-2 IDX-OM-W093 14 14.1 / IDF60/70/80/90 Series 14-1 Revision history 2020 6 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

D 00 Without subplate 1% 0.5% + -0.5% M5 M5 0.007 00 Without subplate B M5 M5 0.28 01 18 0.41 2.5% 1% + -1% Base Mounted Type 00 Without subplate 2 01 18 0.9 02 14 1.4 00 Without subplate 02 14 2.0 3% 1.5% + -1% 4 03 38 3.3 04 12 3.9 A M5 M5 0.28 1 01 18 0.9 02 14 1.4 2.5% 1% + -1% Wiring: The use of three-core screened cable is strongly recommended with the screen earthed at the end away