Special Applications: Copper, Fluorine & Silicon-free+Low Particle Generation, Body Size: 20, Reverse Flow: No, Thread: Rc, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: 0.02 - 0.2MPa Setting

Type: Rail, Type: DIN Rail for SV1000 / 2000, Number of Inputs/Outputs: -, Connector: -, Mounting Method: -, Port pipe connection port diameter: -, Rated Voltage: -, Specification: -, Thread standard: -, Dimension: Length: 360.5 mm, Applicable valve: -, Pressure reduction port: -, Option: -

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

60.1 54.7 17 100 84 12 20.9 AS4001F-10-3 77.7 AS3001F-09-3 82.1 11.3 35 69.3 61 21 5/16" 21 15.2 32.1 3.5 60.9 55.5 18 64.4 8.2 167 88 18.5 16 10 18.5 27 21 24.5 3.5 AS4001F-12-3 36 70.3 62 22 AS3001F-11-3 3/8" 17.2 33.3 62.1 56.7 21 70.8 9.5 171 95 12 20.9 Note 1) Reference dimensions AS4001F-11-3 3/8" 27 21 17.9 34.9 3.5 69.2 60.9 21 76.9 10.3 175 24.5 AS4001F-13-3 21.7 1/2" 11.6 70.6

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

69.3 61 21 18.5 64.4 8.2 5/16" 21 15.2 32.1 3.5 60.9 55.5 18 10 18.5 16 27 24.5 21 3.5 AS3001F-11-3 AS4001F-12-3 36 70.3 62 22 70.8 3/8" 17.2 33.3 62.1 56.7 21 9.5 12 20.9 AS4001F-11-3 3/8" 27 21 17.9 34.9 3.5 69.2 60.9 21 76.9 10.3 24.5 AS4001F-13-3 21.7 1/2" 83.1 36.3 11.6 70.6 62.3 22

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

69.3 61 21 18.5 64.4 8.2 5/16" 21 15.2 32.1 3.5 60.9 55.5 18 10 18.5 16 27 24.5 21 3.5 AS3001F-11-3 AS4001F-12-3 36 70.3 62 22 70.8 3/8" 17.2 33.3 62.1 56.7 21 9.5 12 20.9 AS4001F-11-3 76.9 3/8" 27 21 17.9 34.9 3.5 69.2 60.9 21 10.3 24.5 AS4001F-13-3 21.7 1/2" 83.1 36.3 11.6 70.6 62.3 22 15-9-74

OMU0023

60 ` 1 1 SOH 33 21 !

LX

Stroke + 126 3.3 24 1 5 3 5.8 8 3 21 59 F 5H9 +0.030 0 depth 5 T-slot dimensions (2/1) 29.5 5H9 +0.030 0 depth 5 6 T-slot 4-M5 x 0.8 (for body mounting) thread depth 8 (11.5) 38 E Refer to page 299 for mounting.

HRX-OM-Y098

HRX-OM-Y098 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using the Product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

15

1 1 1 1 1 1 1 1 Description Quantity Motor type NZ NY NX NM1 NM2 Motor side hub 1 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 1 1 1 1 Ring spacer 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 Hexagon socket head cap screw (for motor flange fixing)* 2 2 Ring spacer 1 1 * For screw sizes, refer to the hub mounting dimensions

HRX-OM-R028

HRX-OM-R028 Contents Contents Chapter 1 Read before using. 1-1 1.1 Communication mode and operation method .1-2 1.2 Communication port.1-3 1.3 Key operations.1-4 1.4 Parameters .1-6 Chapter 2 Contact input/output communication . 2-1 2.1 Precautions for communication .2-1 2.1.1 Precautions wiring communication. 2-1 2.1.2 Precautions after wiring and before communication . 2-1 2.2 Communication

rep-modular-e

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 Diaphragm Body 1 1 Chromate treatment Spring Diaphragm shell 2 1 Zinc chromate treatment Zinc chromate treatment Diaphragm shell Diaphragm 1 1 Chromate treatment Washer Valve spring 1 1 Spring holder Chamber 1 1 Chromate treatment Zinc chromate treatment Diaphragm shell holder Seal 1 1 Stem O-ring 1 1 JIS B2401 P7 Valve O-ring 1 1

Modular Pressure Control Equipment F.R.L. Replacement Procedure

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 Diaphragm Body 1 1 Chromate treatment Spring Diaphragm shell 2 1 Zinc chromate treatment Zinc chromate treatment Diaphragm shell Diaphragm 1 1 Chromate treatment Washer Valve spring 1 1 Spring holder Chamber 1 1 Chromate treatment Zinc chromate treatment Diaphragm shell holder Seal 1 1 Stem O-ring 1 1 JIS B2401 P7 Valve O-ring 1 1

5 Port Air Operated Valve

Common exhaust VV5FA 1 1 04 30 Thread type Nil 00F 00N 00T Series 1 3 5 Rc G NPT NPTF VFA1000 VFA3000 VFA5000 Stations 02 2 stations Manifold model 20 20 stations P, R Port size 1/8 1/4 3/8 1/2 VFA1000 VFA3000 VFA5000 Symbol Up to 10 stations for VV5FA5-20, and up to 15 stations for VV5FA5-21. 30 20 21 The A and B ports are made on the top.

HRX-OM-T004

HRX-OM-T004 Contents Contents Chapter 1 Read before using . 1-1 1.1 Communication mode and operation method . 1-2 1.2 Communication port . 1-3 1.3 Key operations . 1-4 1.4 Parameters . 1-6 Chapter 2 Contact input/output communication . 2-1 2.1 Precautions for communication . 2-1 2.1.1 Precautions wiring communication . 2-1 2.1.2 Precautions after wiring and before communication . 2-1 2.2

Vacuum Unit

is available in units of 1 piece.)

AC Servo Motor Driver (Pulse input type)

error 3 warning (Flash-ROM) AL.E8 Cooling fan speed AL.1A 1 1 0 Motor combination error reduction warning AL.20 1 1 0 Encoder error 2 AL.E9 Main circuit off warning (during runtime) AL.EA ABS servo on warning AL.21 1 1 0 Encoder error 3 AL.EC Overload warning 2 (during runtime) AL.ED Output watt excess AL.24 1 0 0 Main circuit error warning AL.25 1 1 0 Absolute position erase AL.30 0 0 1

Table of Contents

8") N3 (5/32") N7 (1/4") N7 (1/4") VQD P. 2-4-18 P. 2-4-20 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in

Possible to transfer a workpiece at low-speed.

to 36 Size 10 15 20 30 40 Size 10 15 20 30 40 Y 1 to 18 1 to 20 1 to 30 1 to 32 1 to 36 X 3.5 to 21 4 to 24 4 to 27 Size 20 30 40 Symbol: A57 Symbol: A55 Symbol: A56 Both the long shaft and short shaft are shortened.

SZ3000

SOL.B Station 11 SOL.B Station 11 SOL.B Station 11 22 22 22 SOL.A SOL.A SOL.A 21 21 21 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 4 4 4 SOL.A SOL.A SOL.A 3 3 3 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 1 Station 1 Station

Refrigerated Air Dryers

Applicable air dryer Port size Rc A B C D Weight [kg] I D F IDF-BP317 IDF22E 1 134 405 928 198 4.4 IDF-BP318 IDF37E 1 1/2 980 7.7 IDU-BP336 IDU22E 1 93 445 1465 46 4.5 IDU-BP337 IDU37E 1 1/2 64 550 1635 70 8.0 I D U Dimensions [mm] IDU-BP338 IDU55E 2 53 530 1783 110 12.3 IDU75E 1918 Part no.