5 Port Air Operated Valve Series SYA3000/5000/7000 1

Nil T F Rc NPTF, NPT G Caution 3 position closed center 3 position exhaust center Refer to pages 5-11-2 to 5-11-6 for Safety Instruction and Solenoid Valve Precautions. 5-3-1 2 Series VZA2000 Dimensions: Body Ported 2 position single: VZA2121-M5 2 position double: VZA2221-M5 2-2.8 mounting hole 2-2.8 Mounting hole Pilot port (A side) M5 x 0.8 Pilot port (A side) Pilot port (B side) 2-2.8

Made to Order

Through-hole/Both ends tapped (Standard): MK2TB MK2T-XC89 Lube-retainer Coil scraper 2 x P Cylinder port M A C G thread length H L N C A KA I KK 2 x J 4 x J K D 0.07 0.15 4 x F counterbore C S T AB AA MM KB Q R 2 x E through 2 x FF counterbore (mm) MM KB KK FF AB AA I N M L K J H G F E D C A KA Bore size 32 40 50 63 0.07 0.15 14 50 9 depth 11 9 depth 7 M10 x 1.5 8 4 46 45 34 6 M6 x 1.0 21

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

A

K E O F F TA K EO F F T Y P E 1 "T" Type 4 "X" Type T H R E A D T Y P E Nil Rc(PT) N NPT P O R T S I Z E M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44

C85

Electroless nickle plating 1 1 1 1 1 1 1 1 1 2 1 1 2 2 1 1 1 2 2 1 1 2 2 q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CJ2

2 !3 !

Table of Contents

2-5.5 through 2-M5 x 0.8 through 11.5 25h9 0 -0.052 10g6 -0.005 -0.014 2 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 20 30 2-5.5 through 2-5.5 through 38 3 5 5 16 14 20 (114) 53 B port A port 2-M5 x 0.8 (Connection port) 5.5 31 25.5 (34.5: Connector type) Switch unit ( 3 m) 0.5 m 31 63 R 22.5 3 2. 5 11-3-14 49 CRB2 CRBU2 CRB1 MSU CRJ Courtesy of Steven Engineering

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

4 CRBU2 CRB1 85 MSU CRJ 2-M5 x 0.8 through 2-5.5 through CRA1 25h9 0 0.052 38 CRQ2 10g6 0.005 0.014 11.5 2 MSQ 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 MRQ 20 30 2-5.5 through D2-5.5 through 38 20 3 205 5 16 14 (98) 53 B port A port 2-M5 x 0.8 15 4.5 10g6 -0.005 -0.014 CRBU2W40-SE/DE 25h9 0 -0.052 63 A port B port 20 2-M5 x 0.8

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

2-5.5 through 2-M5 x 0.8 through 11.5 25h9 0 -0.052 10g6 -0.005 -0.014 2 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 20 30 2-5.5 through 2-5.5 through 38 3 5 5 16 14 20 (114) 53 B port A port 2-M5 x 0.8 (Connection port) 5.5 31 25.5 (34.5: Connector type) Switch unit ( 3 m) 0.5 m 31 63 R 22.5 3 2. 5 11-3-14 49 CRB2 CRBU2 CRB1 MSU CRJ Courtesy of Steven Engineering

CRB2/CRBU2/CRB1

dimension L b h (h9) L b (h9) Model 52 64 0 0.030 4 20 0 0.030 CDRBU2W404 85 2-5.5 through 2-M5 x 0.8 through 11.5 25h9 0 0.052 10g6 0.005 0.014 2 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 20 30 2-5.5 through 2-5.5 through 38 3 5 5 16 14 20 (114) 53 B port A port 2-M5 x 0.8 (connecting port) 5.5 (34.5 for connector type) 31 25.5 Switch unit (Approx. 3m) Approx

MXS

at extension end) N-M5 X 0.8 thread 6 deep (Helisert) 6 4-M5 X 0.8 thread 7 deep 1 3.5 (With stroke adjuster at retraction end) 18 (With stroke adjuster at extension end) 26 35 62 48 F 20 5H9 deep 4 +0.030 0 2-M6 X 1 thread 10 deep N -1 X F 2 21 5H9 4 deep +0.030 0 10 M 0.5 36.5 40 Z ZZ (NN-1) X H G 24 10.5 24 10.5 H A B 10.5 10.5 5.1 9.5 26 1 5H9 4 deep +0.030 0 6 NN-M6 X 1 thread 12 deep

1

How to Order X214 06 M5 S AS 2 2 1 1FM 2 2 1 01 06 S AS X214 1F Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Body size Body size Option Option Model Applicable tubing O.D. Model Port size Control method Applicable tubing O.D.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators NDh8 NDh8 Section Y detail GA GC Y YY GA GC Mounting nut Relief port 2 x M5 x 0.8 Section YY detail NN NN MM Rod end nut Piping port 2 x M5 x 0.8 MM C D D B 0 0.3 NA H A F B 0 0.3 F NA S + Stroke A Z + 2 x Stroke H + Stroke M12 x 1.0 M10 x 1.0 NN (mm) 16 10 15 15 18.3 15 20 17 8 8 5 5 11 11 28 28 20.5 20.5 D H Bore size B F MM NA GC GA C A

Air Cylinder

with fixed orifice 2 x NN Width across flats B1 Width across flats KB H1 I 2 Eh8 NA MM AL A H + Stroke ZZ + 2 x Stroke 1.5 1.5 Effective thread length 2 x FL F S + Stroke NA F Boss-cut Spring return ZZ + Stroke Spring extend ZZ + 2 x Stroke Female rod end Spring return Spring extend Thread depth A1 Female thread MM Thread depth A1 Female thread MM H + Stroke ZZ + 2 x Stroke S + Stroke H

LX

3.5 1 2 5 34 44 52 Section F detail (Scale: 2/1) 120 90 4-M6 x 1 Section C 30 D Refer to page 300 for mounting.

LJ1H

Mount Specification Stroke F P K F 1 2 LJ1H20 X60 2 Vertical Mount Specification Stroke Clean room specification With brake Lead screw lead Refer to Table below.

Rotary Actuator/Vane Type

F E Y2 F Y2 CRQ2X MSQX L L E MRQ 2 x Q4 2 x Q4 K K C B D G D G B C U H U H M T N M T 25.5 N (34.5: Connector type) 2 x R 1 2 x R Auto switch P P W1 W Auto switch Size: 20, 30 Size: 40 W W 2 67 8 15 8 When D-M9m is used 32.5 1.

0.4

120 42 (35) 80 VQ 4/5 (53.5) 36 VQC 1/2 VQC 1/2 VQC 4/5 3.5 4 x M5 mounting hole 2 x M5 mounting hole VQZ SI unit Use a drip proof plug assembly (AXT100-B04A) on the unused conduit port (G1/2).

MXS Series Air Slide Table

+0.030 0 N 4-M4 X 0.7 thread 6 deep 16 -1 x F 2 2-M5 X 0.8 thread 8 deep 4H9 3.5 deep +0.030 0 8 M 0.5 28.5 32 Z ZZ (NN-1) x H G H 18.5 8.5 8.5 18.5 A B 4.2 8.5 9 9 20 1 5 4H9 3.5 deep +0.030 0 NN-M5 X 0.8 thread 10 deep 4H9 3.5 deep +0.030 0 A B HA GA Cross section AA Cross section BB (mm) Model F 35 35 35 50 35 55 65 GA 15 15 15 42 51 61 111 KA NA 2 2 2 2 2 4 4 Z 70 70 70 82 102 148 202