MY1

(NPN) 3 wire (PNP) F9NW F9NWV Y7NW G Y7NWV G Diagnostic indication G G G Diagnostic indication 2 color (indicator) G 5V 12V F9PW F9PWV 24V Grommet Yes Y7PW G Y7PWV G G G G G 2 color indicator F9BW 2 wire 2 wire F9BWV Y7BW G Y7BWV G G G G G Lead wire length symbols 0.5m .

TABLE OF CONTENTS

Listed and CSA Certified for Hazardous LocationsClass I, Div 1, Group C and D Class II, Div 1, Groups E, F, and G; Div 2 Groups A,B,C,D,E,F, AND G. Mtg.

Table of Contents

Rc 1/8 D-X G G 2-RB2015 (Option) 2 HT F A L 20HN (Max.)

Fluoropolymer Piping Equipment

Class Class No. 1 1 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1 2 1 2 C 3 4 F 1 2 3 4 5 6 7 E 9 10 1 2 3 4 5 6 F 9 1 2 3 4 5 7 8 9 1 2 3 4 5 6 1/8" A A B C D E F A B C D E F A B C D E F G A B C D E F G H A B C D E F 1 2 2 2 2 2 2 3 3 3 3 3 3 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1/8" 1/8" 1/8" Branch tee female Run tee male Run tee female 1/4" A A 1/4

Modular F.R.L. Units

Lock button 12 B AC10-A Series AC20-B to AC60-B Series Dimensions AC10-A S N A F M J R B C V Q2 Q1 Q1 IN OUT 2 x P1 (Port size) U P2 G Clearance for maintenance (Pressure gauge port size) Drain AC20-B S N A F M J R B C Q2 V Q1 Q1 K IN OUT 2 x P1 (Port size) U P2 G Clearance for maintenance (Pressure gauge port size) Drain AC25-B to AC60-B N A F S J M R V Q1 Q1 B C K OUT IN 2 x P1 (Port size

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"F: 1 , 0 F . Model M' ;8 C R ~ !F. G ;K '.

VFS

Cannot be used as a single unit. 3-8-9 10 Series VFS1000 How to Order VFS1 1 20 01 1 G Symbol Option 2 position single F: With foot bracket Thread type 1 Nil N Rc NPT NPTF G Port size 01 Rc 1 8 T 2 position double F Option 2 Mountable only for VFS1120.

ISO Cylinder

U EW d13 KW F Width across flats KV NA AM RR F H + Stroke S + Stroke Rail mounting (A) Band mounting (B) Without magnet ZZ + 2 x Stroke Z + 2 x Stroke Double end boss-cut Cl85KE l Bore size Stroke T (WH + Stroke) G Width across flats KV ND h8 Width across flats SW BE EE BE KK KA ND h8 NA 8 Rod section KW (HR) NA ZZ + 2 x Stroke S + Stroke F F H + Stroke AM Rail mounting (A) Band mounting

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

wire length) 64.3 [66.5] 54.5 [56.7] (2) 63.4 56 49.5 (2) 13.5 13.5 13.5 (2) 15 15 15 22.1 22.1 22.1 Refer to page 375 for dimensions with connector cable. 287 4/5 Port Solenoid Valve 10-SYJ3000 2 Position Double [ ]: AC Grommet (G), (H): 10-SYJ3223-M3 (-F) G H Directional Control Valves Air Grippers Modular F.

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W F R L T B None Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

port size C12: With 12 One-touch fitting Thread type Valve stations Nil Rc Symbol 04 Stations 4 stations G F 2 3 Stations 1 N NPT ... ...

AC

AWD ITV VBA VE VY G AL Model Port size B J A F G H I C D E 100 100 60 60 73 73 230 230 431(481) 437(487) 59 63 166 162 117 117 3-M5 X 0.8 X 6 3-M5 X 0.8 X 6 AL800-12 to 14-1 AL900-20-1 11/4 / 11/2 2 ( ) With float switch 1.17-10

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

58.3 70 47.8 34.3 46.6 44.1 3/8 50.8 50.8 49.6 20 JSX Series JSX20, 30 Dimensions: JSX20U, 30U Port Size 1/8, 1/4, 3/8 Body Material Aluminum G: Grommet GS: Grommet with PCB F K 300 D D 300 K F C C J J E IN IN E A 2 x Port size 1(IN), 2(OUT) port B1 B B1 B 2 x Port size 1(IN), 2(OUT) port A G G 2 x M thread depth N 2 x M thread depth N CS: Conduit D F K 500 NPT1/2 C J IN E B1 B A 2 x Port

Air Slide Table

J I Pilot port 2 x M5 x 0.8 7.5 +0.030 0 5H9 ( ) depth 2 37 7.3 (Maximum screw-in depth) 5.5 32.2 3.3 (Minimum screw-in depth) +0.030 0 5H9 ( ) depth 2 B 24 31 62 3 33 50 B N x M5 x 0.812 F 25 2 x M4 x 0.7 thread depth 6 N 2 1 x F Cross-sectional view B-B 21 M 0.5 ZZ Z J I 7.5 Pilot port 2 x M5 x 0.8 (Plug: Width across flats 7) H G GB HB +0.030 0 +0.030 0 5H9 ( ) depth 3 2 x 5H9 ( ) depth

5 Port Solenoid Valve Series SY3000/5000/7000/9000

suppressor) VQ 40.4 (4.9) 10.5 VQ4 (40.2) (36.7) 12.7 28.1 [35.1] + 20.5 23 SY5120-01(-F ) G H 1 2 VQ5 32.3 VQC (A, B port) 1/8 0.8 1.6 16.2 VQZ (20) 15 EA P EB 28.1 [35.1] SQ 32.5 For manifold gasket positioning 2 x 2.2 die-cast hole (P, EA, EB port) 1/8 27.2 20.5 23 VFS VFR L plug connector (L): SY5120-L(-F ) 1 2 C4, N3 C6, N7 C8, N9 M plug connector (M): SY5120-M(-F ) DIN terminal (D,

Vacuum Pad

: Pad Unit ZP3-10UM;[Weight: 0.6 g] ZP3-13UM;[Weight: 0.7 g] ZP3-16UM;[Weight: 0.8 g] Flat with groove Pad Unit 9 6 4 9 6 4 4 6 9 1.2 2 2 2 2 1 2 2 1.2 7 7 7 Vertical 2 2 2 14 13 11 10 17 16 With Adapter: Vacuum Inlet Vertical With Buffer: Vacuum Inlet ZP3-04B;[Weight: 0.3 g] ZP3-06B;[Weight: 0.3 g] ZP3-08B;[Weight: 0.4 g] Bellows 7 5 3 7 5 3 7 5 Lateral 3 With Adapter: Vacuum Inlet 1.5 2

High Purity Fluoropolymer

M L1 L2 H G F M Y E B 1/8 LQ1R12-F LQ1R11-F 3 4 2 11.5 18.5 16 10 4 8 18.5 1/8" Class 1 LQ1R43-F LQ1R42-F LQ1R41-F LQ1R36-F LQ1R35-F LQ1R34-F LQ1R33-F LQ1R32-F LQ1R31-F LQ1R24-F LQ1R23-F LQ1R22-F LQ1R21-F 4 6 4 6 18.5 19.5 1/8" 4 16.5 15 6 12 14 28 2-B 21.5 22 1/4" (E) Y (L1) 10 M 21.5 1/4" 6 8 24 F 1/4 5 23 20 9 18 17 36.5 10 G (E) H 25 3/8" 6 8 25.5 (L2) (L1) Class 2 to 5 Rc (NPT) Port

Modular F.R.L. Unit

) Panel mount (with set nut) N F Note 2) G P Note 1) Bracket assembly is not mounted at the time of shipment, but rather packaged together with the regulator.

7

(10, 3/8", 12) Conduit terminal d e 34 C (U2) (V2) E VX2 VXK 32 T 1.2 7.5 VXD VXD 25 VXZ 5.5 A B G1/2 VXS b a OUT IN VXB 2 x P Port size F 4.5 L K D f J I VXE 4.5 VXP Conduit d e C VXR E U 280 VXH 23 VXF 1.2 7.5 VX3 G1/2 T 5.5 A b a VXA IN OUT B 2 x P Port size f J F I L K D 4.5 4.5 Flat terminal C e d U E 11 1.2 7.5 T 5.5 A b a IN OUT B 2 x P Port size I F J 4.5 L K D 4.5 f (mm)

LX

T-slot A dimension T-slotBdimension Work piece mounting reference plane 6.5 27.5 T-slot B Cross Section C-C (mm) D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Refer to page 301 for mounting.