CRQ2

L Size Screw M4 M4 M6 M8 M8 L 13 16 22.5 24.5 28.5 10 15 20 30 40 3 Series CRQ2 Construction Standard type Sizes 10, 15 Standard type Sizes 20, 30, 40 Parts list Parts list Description Material Note No. Description Material Note No.

Compact Type

A C D-F9 D-F9W D-M9 D-A93 D-A90 D-A96 D-F9V D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 D 7.5 5 2 5 7 7.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-N01-07 ASV310F-N01-09 ASV310F-N02-07 ASV310F-N02-09 ASV410F-N01-09 ASV410F-N01-11 ASV410F-N02-09 ASV410F-N02-11 ASV410F-N03-09 ASV410F-N03-11 ASV510F-N02-11 ASV510F-N02-13 ASV510F-N03-11 ASV510F-N03-13 ASV510F-N04-11 ASV510F-N04-13 73 73.8 73 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.9 90.2 91.9 90.2 91.9 17.2 19.3 17.2 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 26.5

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Metric size Inch size 100 200 205 300 400 M5 standard 3.2 1/8 standard 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 1/4 standard 4 6 8 10 12 3/8 standard 1/2 standard With One-touch fittings Use 1/8" tube.

Lubrication Equipment

AL2000 AL3000 AL4000 AL4000-06 AL5000 AL6000 81.5 122 142 177 177 254 268 162 197 197 274 288 Model Port size A B C D LL M P E F G H J K Bracket mounting dimensions N 324(374) 334(384) 334(384) 336(386) 336(386) 38 41 39 45 45 106 106 106 106 106 53 70 75 90 95 70 70 70 70 70 66 66 66 66 66 25 18 16 35 35 11 11 11 11 11 3.2 3.2 3.2 3.2 3.2 13 13 13 13 13 90 90 90 90 90 210 210 210 210 210

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

13 17 17 26 26 14 14 20 20 30 30 10.5 11 15 15 23 23 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 10 10 14 14 22 22 23 23 30 30 42 42 U CX L Z + Stroke RR ZZ + Stroke Double clevis/(D) Port Cushion valve Double clevis CDH10 (mm) Bore size (mm) Stroke range H10 CX +0.3 ZZ Z U RR L CD +0.1 CZ 32 40 50 63 80 100 164.5 169 197 197 251 251 154 158 182 182 228 228 13 13 17 17 26

MHZ2/MHZJ2

A C width across flats D Model A B C MHZ2-10D-X46 MHZ2-16D-X46 MHZ2-20D-X46 MHZ2-25D-X46 9 11 4.5 5.2 7.5 13 7 5.8 10 15 7 6 10.7 20 7 6.2 Refer to pages 4 through 7 for the standard type dimensions, which are the same except for those shown above. Reference value to establish criteria for needle adjustment.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

16(15.8) 52 8.5 M8 x 1.25 7 69 5 14 12 40 5.5 9 26 10 57 10 40 10 to 50, 75, 100 62 M8 x 1.25 50 13 16(15.8) 64 12 M8 x 1.25 8 86 7 14 12 50 6.6 11 26 14 71 10 Note) Figures in ( ) are the dimensions for applying a wrench.

Compact Type Dual-Rod Cylinder Series CXSJ

A C D-F9 D-F9W D-M9 D-A93 D-A90 D-A96 D-F9V D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 D 7.5 5 2 5 7 7.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38

Compact Cylinder with Air Cushion Series RQ

Refer to page 9 for details on rod end nut and accessories. 6 Series RQ Dimensions/32, 40, 50 Refer to pages 12 and 13 for proper auto switch mounting positions and height.

Sine Rodless Cylinder Series REBR Direct Mount Type

7 8 9 10 11 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 100 REBR32 REBR25 10 REBR15 1 0.1 100 200 300 400 600 500 Maximum speed U (mm/s) 62 Series REBR Model Selection 3 Design Parameters 2 Maximum Load Weight when Loaded Directly on

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

N.C. 3 2 1 300 13 16 5.5 2 x 2.8 UL1007 AWG22 4.5 16.5 For LVM12R 57 2 x 2.7 Mounting hole Push type Manual override N.O. N.C. 3 2 1 N.O.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

14 15 16 360.5 350 331 14.5 373 362.5 347 13 323 312.5 299 12 348 337.5 315 16.5 50

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

Dimensions Formulae L1 = 11n + 15.5 L2 = 11n + 55 n: Stations (max. 16 stations) L n 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 191.5 231 262.5 273 16 L1 L2 (L3 ) (L4 ) 26.5 66 87.5 98 37.5 77 100 110.5 48.5 88 112.5 123 59.5 99 125 135.5 70.5 110 137.5 148 81.5 121 150 160.5 92.5 132 162.5 173 103.5 143 162.5 173 114.5 154 175 185.5 125.5 165 187.5 198 136.5 176 200 210.5 147.5 187 212.5 223 158.5

ZQ-OM01401

ZQ-OM01401-B / / ZQA No.ZQ-OM01401-B 2 1. 5 2. 9 3. 11 3.1. 11 3.2. 12 3.3. 13 3.4. 14 3.5. 16 4. 17 5. 19 6. 20 7. 21 8. 28 9. 32 10. 35 11. 37 12. 40 13. 42 1 - No.ZQ-OM01401-B /ZQA *1) *2) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery

IDX-OM-W093

V . 12-5 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 . 14-1 14.1 . 14-1 IDF60/70/80/90 Series IDX-OM-W093 1 1.1 () 6.2 1.1.1 3 IDF60/70/80/90 Series 1-1 IDX-OM-W093 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDF60/70/80/90 Series 1-2 IDX-OM-W093 1.2.4 IDF60/70/80/90 Series 1-3 IDX-OM-W093 1.2.5 HFC 1-5 HFC 1 2 3 4GWP R134a R407C R410A R404A GWP 1430 1770 2090 3920 4033722 IDF60/70/80/90 Series

EX500-GPR1A.eng

Connect each connector of Input unit, input blocks, and end block ( portion indicated by arrow in the figure to the right ). 35 Stations 1 2 3 4 5 6 7 8 44.2 110.5 123 148 173 185.5 210.5 223 248 100 112.5 137.5 162.5 175 200 212.5 237.5 12 12 12.5 12.5 13 13 13.5 13.5 82 102 122 142 162 182 202 222 L2 ( Rail mounting pitch: 12.5 ) L1 L3 (L4) (7.5) 5 60 DIN Rail 32.2 46.9 28 29 Applicable

The gasket part number for the VS7-6 and the VP7-6 is "AXT500-13," and the gasket part number for the VS7-8 and the VP7-8 is "AXT510-13." The VQ7-6 gasket part number is "VQ7060-13-4-1" and the VQ7-8 gasket part number is "VQ7080-13-4-1."

LVQ

Type of fitting Tubing size Symbol Nil 1 Symbol 03 04 05 06 07 06 08 10 07 11 Symbol 10 12 11 13 12 13 19 19 25 Tubing O.D. 1/8" (3) 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" Tubing O.D. 10 12 3/8" 1/2" 12 1/2" 3/4", 19 3/4", 19 1". 25 Applicable fitting LQ2 LQ1 Body class Applicable fitting Body class Applicable fitting 4 LQ1,LQ2 2 Body class LQ2 Symbol 2 3 4 5 6 LQ2 Applicable fitting Body class

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

13 11 13 13 25 30 30 32 40 40 36 46 46 12 15 15 7 9 9 6.5 8.5 8.5 57 (65) 66 (74) 71 (79) 19.5 22.5 25 40 43 46 46 50 53 73.5 82 87 The figures in parentheses are the normally open type. 24 25 Series VX Safety Instructions The following safety instructions are intended to prevent a hazardous situation and/or equipment damage.