Air Cylinder Series MB

M27 X 2.0 13 M12 X 1.75 6 20 19 27 60 32 110 136 54 46 52 65 75 95 114 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 16 16 16 16 16 16 4 4 5 5 5 5 M6 X 1 M6 X 1 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 6 6 7 7 10 10 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 27 27 31.5 31.5 38 38 1/8 1/4 1/4 3/8 3/8

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 Dimensions 13 Silencer P/N Type VQZ100 VQZ200 VQZ300 NAN110-N01 NAN200-N02 NAN200-N02 NAN200-N02 NAN110-N01 16 Q Q Q Body Ported Q Q Series VQZ100200300 Q Q Q

PSxx-OMF0005CN

76 114 152 L3 38 76 114 152 190 DIN EXH DIN 1 2 3 4 5 6 L1 46 84 122 160 198 236 1 L2 38 76 114 152 L3 38 76 114 152 190 L4 62.5 120 162.5 200 237.5 275 L5 73 135.5 173 210.5 248 285.5 DIN ISA-5-* * 2 3 4 5 6 7 -27No.PS-OMF0005CN-E EXH SUP RcNPTG1/8 1 1 2 3 4 5 6 L1 106 144 182 220 258 296 L2 38 76 114 152 L3 38 76 114 152 190 DIN EXH DIN SUP RcNPTG1/8 1 2 3 4 5 6 L1 106 144

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L1 L2 R (NPT) Port size 3/8" 23 29 6 43 28 24 9 18 21 1/2" 24.5 32 LQ1R44-M 10 19 12 19 LQ1R54-M LQ1R53-M LQ1R52-M LQ1R51-M M H 1/2" 30.5 38 7 54 39 29 14 28 26 3/4" 30 39 12 25 19 25 19 LQ1R64-M LQ1R63-M LQ1R62-M LQ1R61-M 36 3/4" 25 1 8 69.5 49 39.5

VQ4000

W Dust proof Dust tight, Jet proof V V 1.11-5 Series VQ4000 Plug-in Conduit terminal 0 1 2 position single: VQ410 l 23.5 23.5 50 158 50 90 108 158 Indicator light 11 (A port) 11 (B port) (12.5) 5 3 (12.5) 9 4 2 38 48 10.5 1 11 A B 38 24.6 48 4 2 A 13.5 13.5 30 45 25.6 Mounting hole 14 5 1 3 12 30 45 25.6 Mounting hole 5-Rc1/4, 3/8 (R1, R2=Rc1/4) Manual override Bottom piping SMC (A, B port

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 VP4 Fitting blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 VQ L A Dimensions VQ4 Applicable fitting d Part No.

2/3 Port Valve

Insulation Electrical entry Options 1 (100V) 2 (200V) 3 (110V) 4 (220V) 7 (240V) 8 (48V) 5 (24V) 6 (12V) Class B Class H G S L, Z S L, Z 1 (2mm) 2 (3mm) 3 (4.5mm) 4 (6mm) C D, T G, C S T (1) VX22 VX23 VX21 01 ( ) 02 ( ) 02 ( ) 03 ( ) 02 ( ) 03 ( ) 1 8 1 4 1 4 1 4 38 AC 38 Ordering Example (Example) Series VX22, Orifice size 4.5mm, Rc(PT)1/4, 100V AC conduit (Part number) VX2232-02

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

0.2 0.2 0.25 Flow rate (L/min(ANR)) 12 38 7 Sonic conductance dm3/(sbar) Free flow 0.04 0.12 0.02 Critical pressure ratio 0.15 0.15 0.3 Note) Flow rate values are measured at 0.5 MPa and 20C.

Brake mechanism added

Applicable bore size A1 E1 D1 L1 MM R1 U1 ND NX NZ L Split pin size Flat washer size Shaft diameter: NDH10 Split pin Hole diameter: NDd9 L L MM Flat washer: Polished round D1 D1 MM Y-04D 40 22 24 10 55 M14 x 1.5 13 25 12 16 +0.3 +0.1 38 55.5 3 x 18 L Polished round 12 E1 NX NZ L A1 L1 U1 A1 L1 U1 Y-05D 50, 63 27 28 14 60 M18 x 1.5 15 27 12 16 +0.3 +0.1 38 55.5 3 x 18 L Polished round 12 E1

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

39 30 Width across flats 17 (2 locations) 38 79 (117) K 20 Width across flats 19 (2 locations) 4 13 4 38 18 18 18 48 2 x M12 x 1.75 (Piston rod thread) 4 x M12 x 1.75 through (Thread for mounting attachment) 28 When open G When open F 28 60 86 (mm) J 72 130 170 H 348 466 546 G 288 406 486 F 188 246 286 E 80 138 178 D 164 222 262 B C 116 174 214 112211221122MHL2-40D MHL2-40D1 MHL2-40D2 268

CNA

M22 x 1.5 Polished round 18 A1 U1 L1 4 x 25l +0.3 +0.1 30 Y-10C 100 37 40 83 21 38 20 61 83 M26 x 1.5 Polished round 20 RR1 Knuckle pin, cotter pin and flat washer are attached.

XM, XY

flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 494 XMH, XYH Series Glossary 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.

MQQ

TC TH TV TW TX TY MI W S CJ-T010B 6, 10 4.5 29 40 22 32 12 CEP1 CJ-T016B 16 5.5 35 48 28 38 16 Note) For details, refer to page 10-5-24.

MGC

Data View A-A Mounting dimensions Bore size (mm) Stroke range (mm) N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA A 20 25 32 40 50 75, 100, 125, 150, 200 25 38 80 60 44 25 106 22 M6 110 55 9 6.6 90 75 120 105 13 11 84 32 46 95 70 52 30 120 27 M8 125 65 9 9 100 84 136 120 13 15 89 75, 100 125, 150 200, 250 300 32 50 105 80 60 35 135 32 M8 140 75 9 9 108 92 150 134 13 15 94 38 60 125 95

CNA

Material: Cast iron ND H10 d9 Cotter pin Applicable bore size (mm) E1 L1 MM RR1 U1 ND NX NZ L Cotter pin size Flat washer size Flat washer MM A1 Part no. 3 x 18l Y-04C 40 +0.3 +0.1 16 22 M14 x 1.5 24 55 13 25 12 38 55.5 Polished round 12 NX NZ E1 L 3 x 18l +0.3 +0.1 16 50, 63 Y-05C 27 M18 x 1.5 28 60 15 27 12 38 55.5 Polished round 12 4 x 25l +0.3 +0.1 28 80 Y-08C 37 M22 x 1.5 36 71 19 28

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

Multi-Axis Step Motor Controller

COM1 38 29 29 SVON SVON COM2 20 COM2 20 COM2 39 COM2 39 COM2 40 COM2 40 I/O 1 Input Signal I/O 1 Output Signal Name Details Name Details +COM1 +COM2 Connects the power supply 24 V for input/output signal OUT0 to OUT8 Outputs the step data no. during operation IN0 to IN8 Step data specified Bit No.

Modular F.R.L. Units

-A C4LL-38-A * Bowl seal is included for the AL20-A to AL60-A.

Thermo-chiller/Rack Mount Type

Caster Adjuster-foot Kit Optional Accessories p. 38 Height Volume 422 mm reduction 35% reduction Applicable for installation in locations other than 19-inch racks This is a set of unfixed casters and adjuster feet stop.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators SUP port EXH port How to order individual SUP/EXH spacer assembly Series 10-SV1000 Series 10-SV2000/10-SV3000/10-SV4000 SV1000 C6 38 1A SV 2 000 38 1 A Port size Series C3 C4 C6 N1 N3 N7 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 1/8" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 10-SV2000 10-SV3000 10-