VFS

3 8 Stations Bottom ported: VV5FS3-10Station 1Port size D side Applicable cabtire cable O.D. 8 to 10 (Pilot EXH port: PE) 2-Rc 1 8 (External pilot port) 2-Rc 1 8 6-Rc 1 2 n: Stations Formula for manifold weight M = 0.309n + 0.532 (kg) Stations Formula L1 = 33 x n + 63 L2 = 33 x n + 75 2 129 141 3 162 174 4 195 207 5 228 240 6 261 273 7 294 306 8 327 339 9 360 372 10 393 405 L L1 L2 3-8-61

Table of Contents

VQ1000 (VV5Q17)-Plug Lead Unit, Cassette Type (F, P, T, S kit) . 3 3 4 9 10 10 11 12 12 14 16 18 20 22 28 30 32 32 33 34 34 35 36 61 62 64 65 67 68 70 36 37 38 38 40 44 48 52 56 74 74 75 76 76 78 80 82 84 86 89 92 94 96 97 100 104 104 106 108 110 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-

VHK

VHK-12F-10F VHK-12F-12F 31.5 21.8 17.5 3 port valve 41 3.5 1 27 22 26 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 16.5 VH 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 24.3 16.8 7.2 18 8 6 8 41 50.5 52.4 26.2 24.3 16.5 3.5 18.7 16.8 11 9 1.2 16 17 VHK-B1A 44.5 14.5 1 27 22 16.5 26 26.2 18.7 9.7 VHS 22 10 8 10 46 58.5 61

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Base mounted (with sub-plate) 65 (51) 1/8 61 (47) 60 (46) 82 (68) Note) Value for DC. Add 1 g for AC. ( ): Without sub-plate. External Pilot SYJ500R Pilot valve pressure is supplied separately from the main valve pressure through the use of a separate supply port. It can be used in the vacuum (up to 100 kPa) or low pressure line with 0.15 MPa or less.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

M3: 0.8 Nm 61 Series SYJ7000 Type 20: Top Proted/SS5YJ7-20Stations -00 [ ]: AC Grommet (G) Approx. 300 (Lead wire length) 6 L2 L1 4-4.5 (For mounting) 6.5 (DIN 7.8) 20.3 (DIN 21.6) 15.5 3 8 3.3 122 [126.4] 17 16.5 107.4 [111.8] B A B A B A B A B A P R R 50 25 57.3 (DIN 58.6) 56.5 (DIN 57.8) P R R 17 17 79.5 [81.7] 78.7 [80.9] 1/8 (P, R port) 1/8 (A, B port) Manual override (Pitch) P = 19

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

21.9 32.9 15.2 35.6 40.6 41.9 46.9 23 19 R 3/8 20.9 46.1 59 63 23.8 34.6 18.5 47.3 61 65 25 35.8 20.9 50.9 100 107 23.8 36.6 18.5 25.4 42.4 47.4 50.6 55.6 28.6 24 R 1/2 52.5 102 109 25 38.2 20.9 Note 1) Reference dimension for threads after installation Note 2) 1 is the weight for type AS21FPQ (brass + electroless nickel plated), 2 is the weight for type AS21FPG (SUS304). 4

Soft Start-up Valve AV2000/3000/4000/5000

A start-up valve that gradually increases supply pressure during start up and rapidly exhausts system air when the supply air is shut off Large effective area (mm) Manual supply/exhaust function AV2000/ 20 (Body size: 1/4) AV3000/ 37 (Body size: 3/8) AV4000/ 61 (Body size: 1/2) AV5000/113 (Body size: 3/4) AV5000/122 (Body size: 1 ) Low power consumption Modular with F.R.L. combinations F.R.L

Hydraulic Cylinders

4-K through 8-L counter bore 4-K through C B + Stroke J J 8-L counter bore A + Stroke M M CHKDB20 & 25 CHKDB32 to 100 Width across flats f c a b g e h + Stroke Rod end male thread (mm) F L A B C D E G H J K M P Q R Bore size (mm) 20 M8 x 1.25 9.5 depth 5.4 51 43 8 12 10 10 6 30 5.5 43 1/8 16.5 6 25 M10 x 1.5 9.5 depth 5.4 53 45 8 14 12 12 6 36 5.5 49 1/8 17 8 32 M12 x 1.75 11 depth 6.5 61

e-Rodless Actuator

Note 2) To designate solid state switches with flexible specifications, add -61 after the lead wire length. Oil resistant flexible cab-tire cord is used for D-M9 as standard. There is no need to place the suffix -61 to the end of part number.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

Max. load current 25mA 12.5mA 50mA Lead wire length Switch connection side: 0.5m Load connection side: 0.5m To designate flexible wire specification for the D-F9 type, add "-61" after the lead wire length.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Note 2) For solid state switches with flexible lead wire specification, add "-61" at the end of the lead wire length.

Air Pilot Operated Series NVSA

Operator Buna N 10 Recssed Non-Lockihg OPeralor PB 0103 61 l Scrws' Pilot Covers (4) Hold Down Bolt (8.32 x 1 Y'!')

Multistage Ejector (N)ZL Series

ZL112 (without Valve) 1in = 25.4mm Scale: 40% 2-5.4 Mounting hole Label 50 117 Exhaust with silencer P Standard (N)ZL112 20 V 4.5 166 56 Exhaust port 1/2 35 P Port exhaust (N)ZL112P V 14 Vacuum pressure gauge Exhaust with silencer 2-5.4 Mounting hole P With vacuum pressure gauge (N)ZL112-G V Exhaust with silencer Vacuum adapter1/8 2-5.4 Mounting hole 7 P With vacuum adapter (N)ZL112-GN V 61

Sine Rodless Cylinder Series REBR Direct Mount Type

Model determination 61 Series REBR Model Selection 2 Design Parameters 1 Selection Method REBR25 REBR32 REBR15 500 400 300 200 300 200 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 40 50 20 30 40 50 30 20 20 Usable range 10 10 10 Usable

Miniature Fittings M3, R(PT) 1/8, M5 Series M

17 12 14 17 12 14 17 29.7 37.7 31.7 33.7 29.7 37.7 31.7 38.7 32.4 34.7 30.7 38.7 32.7 39.7 33.4 34.7 30.7 38.7 32.7 39.7 33.4 40.7 34.7 41.7 35.4 44.7 36.5 40.7 34.7 41.7 35.4 44.7 36.5 41.7 35.7 42.7 36.4 45.7 37.5 41.7 35.7 42.7 36.4 45.7 37.5 19.3 33.7 35.5 37.5 35.5 37.5 38.2 37.6 39.6 40.3 37.6 39.6 40.3 42.8 43.5 44.6 42.8 43.5 44.6 45.7 46.7 47.5 45.7 46.7 47.5 40 50 42 52 64 52 61

Square Tube Type Air Cylinder Series MB1

800 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501 to 600 264 264 601 to 700 289 289 701 to 800 32 40 50 63 80 100 36 23 12.5 12.5 12.5 12.5 12.5 12.5 75 75 75 75 75 75 136 144 152 152 164 164 41 23 51 25 51 25 56 29 61

Miniature Guide Rod Cylinder Series MGJ

Note 2) For solid state with flexible wire specification, add 61 after the lead wire length.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

For SYJ5000, refer to page 38, and for SYJ7000, refer to page 61. A, B port P port Features 2 Rubber seal 4/5 Port Solenoid Valve Series SYJ3000 For details about certified products conforming to international standards, visit us at www.poweraire.com.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

connector Grommet Single Double Closed center Exhaust center Pressure center Single Double Closed center Exhaust center Pressure center Single Double Closed center Exhaust center Pressure center 33 47 35 51 SYJ312 SYJ322 SYJ332 SYJ342 SYJ352 SYJ314 SYJ324 SYJ334 SYJ344 SYJ354 SYJ313 SYJ323 SYJ333 SYJ343 SYJ353 2 position 0.9 (0.05) 5 Port Body ported type M3 0.5 50 54 3 position 59(33) 73(47) 61

High Vacuum Angle Valve, XL Series

size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K P (L) 15 G(PF)1/2 B (XSA V) Spacer (mm) ( ) are VCR type Bs B Grommet Conduit Terminal E A F C D Model Swagelok type K 81 91.5 97 97 66 G 23 25.5 28 H 56 66 72 72 28 G 39 41 43 H 48 58.5 64 64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61