C76

ring Bumper A Bumper B Piston gasket Rod seal Piston seal Rod end nut Mounting nut Stainless steel Magnet Resin Urethane Urethane NBR NBR NBR Carbon steel Carbon steel 1 1 1 1 1 1 1 1 1 1 CA2 (Switch type only) 2A 2B CS1 2C e r t y u i C76 Hard chrome plated Chromate C85 Nickel plating Nickel plating C95 Nickel plating C7632 to 40 Air cushion CP95 13 8 6 7 1 11 3 4 14 5 20 9 12 2 10 15 21

CJP

B C E G H K MM NN 5 st 10 st F 15 st R 5 st 10 st S 15 st W Q 5 st 10 st Z Bore size (mm) 6 10 15 A 15 st M3 x 0.5 3.5 3 8.5 9 41.5 26.5 34.5 19.5 27.5 12.5 3 6 32.5 13.9 25.5 12 18.5 7 M10 x 1.0 9 M4 x 0.7 3.5 5 12 46 28 39 21 32.5 14.5 4 6 34 22 27 19 20.5 10 M15 x 1.5 13 12 M5 x 0.8 4.2 6 14 50 29 43.5 22.5 37.5 16.5 5 7 36 31 29.5 27 23.5 12 M22 x 1.5 20 19 6-2-16

CXT

Q + Stroke (NA) Cylinder form 12 16 d Bore size (mm) Standard stroke (mm) A B C E G GP H HA HG HN HP HT J JK L LD Slide Ball bushing 12 15, 25 8 4 16 25 7.5 50 34 6 14.5 34 33 18 M5 x 0.8 9.5 68 4.3 8.5 10 16 15, 25 9.5 5 18 29 6.5 65 40 6.5 16 39.5 39 21 M6 x 1 9.5 75 5.2 7.5 12 20 25, 50 11 6.5 25 36 8.5 80 46 9 18 44.1 45 24 M8 x 1.25 10 86 6.9 9.5 16 25 25, 50 11 6.5 25 40 8.5 90 54 9

CLQ

Joint 7 9 YB-03 32, 40 11.5 depth 7.5 34 25 12 K ( across flats) H (With locking) 9 11 YB-05 50, 63 42 32 12 14.5 depth 8.5 11 13 YB-08 80 52 38 16 18 depth 12 d2 d1 14 17 YB-10 100 62 50 19 21 depth 14 L UT C UA Bore size (mm) T1 RS Weight (g) T2 V W Part no. Part no.

CNS

[Vertical] [Load in the direction of rod extension] [Load in the direction of rod retraction] Cylinder sliding resistance (N) Cam unlocking torque (standard) (Nm) Width across flats (mm) Socket Bore size (mm) W 125 140 160 JIS B 4636 + 2 point angle socket 16 16 18 21 961 1216 1579 68.6 78.4 156.8 SOL.C JIS B 4636 + 2 point angle socket 18 SOL.C JIS B 4636 + 2 point angle socket 21 4.

Compact

When wiping off the grease to remove foreign matter etc., be sure to apply it again. 21. Do not apply external force to the dust seal band. Particularly during the transportation Maintenance 15. In the case of the belt drive actuator, vibration may occur during operation at speeds within the actuator specifications, this could be caused by the operating conditions.

48

M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66 54 75 15.9 29 M5 x 0.8 7.5 4.5 25 (20 x 2) 4.3 8 4 M5 x 0.8 9.5 22 22 12 38 22 75 60 84 12.7 31 M5 x 0.8 7.5 4.5 32 (25 x 2) 5.4 9.5 5 M5 x 0.8 12.5

Compact Guide Cylinder

M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66 54 75 15.9 29 M5 x 0.8 7.5 4.5 25 (20 x 2) 4.3 8 4 M5 x 0.8 9.5 22 22 12 38 22 75 60 84 12.7 31 M5 x 0.8 7.5 4.5 32 (25 x 2) 5.4 9.5 5 M5 x 0.8 12.5

Dedicated Controller

Step designation BIT 5 8 Stp-no. bit4 20 BIT 6 21 Stp-no. bit5 8 BIT 7 9 Stp-no. bit6 21 22 Stp-no. bit7 9 35V DC max. + SET-ON 10 Temporarily stops the program run by means of the ON input. 3 Temporary stop READY HOLD 23 BUSY <2> 11 Performs an emergency stop when ON input stops. 16 Emergency stop (nonlogical input) ALARM STOP 24 COM 12 ALARM RESET 4 Alarm release Releases the alarm being

AC

Size 21 31, 41 NPT Threads Port Size Accessories Applicable Body Size 20 30 40 Symbol 02 03 04 Description None Mounting Bracket Float Auto Drain (N.C.)

Series AC Epoxy Coated F.R.L.

Size 21 31, 41 NPT Threads Port Size Accessories Applicable Body Size 20 30 40 Symbol 02 03 04 Description None Mounting Bracket Float Auto Drain (N.C.)

Series AP500

Delivery pressure (MPa) Delivery pressure (psig) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 5 0.03 0 0.00 0 10 20 30 40 50 60 70 80 Flow Rate (slpm, N2) A Connections AP501A Input pressure : 2 psig (14 kPa) inch (mm) FV4 MV4 TW4 760 0 2.78 (70.6) 700 -8 2.12 (53.8) Delivery pressure (mmHg abs) Derivery pressure (kPa) 600 -21

Compact Manifold Regulator

Straight Elbow Note) OUT side Mounting position IN side Straight 6 8 10 8 6 10 4 6 4 6 Elbow Straight Elbow Note) OUT side Mounting position IN side Straight 1 2 3 4 5 6 7 8 9 M 1 station 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations Fitting type Symbol Fitting type Symbol 1/4 5/16 3/8 5/16 1/4 3/8 5/32 1/4 5/32 1/4 07 08 09 10 11 12 19 20 21

Compact manifold regulator ARM5 Series

L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.

IZN10_C

IZ*-OMS0001 : : IZN10 IZN10 IZN10 IZN10 0120-837-838 9:00~1700~ -1- 1. 1. 1. 1. 3 3 3 3 2. 2. 2. 2. 5 5 5 5 3. 3. 3. 3. 6 6 6 6 4. 4. 4. 4. 4 4 4 4-1. 1. 1. 1. 7 7 7 7 4 4 4 4-2. 2. 2. 2. 10 10 10 10 4 4 4 4-3. 3. 3. 3. 16 16 16 16 4 4 4 4-4. 4. 4. 4. 17 17 17 17 4 4 4 4-5. 5. 5. 5. 17 17 17 17 5. 5. 5. 5. 18 18 18 18 6. 6. 6. 6. 20 20 20 20 7. 7. 7. 7. 7 7 7 7-1. 1. 1. 1. 21 21 21 21 7

CEx-OMI0064

No. 1 2 3 4 5 1 17 2 18 3 19 4 20 5 21 6 22 7 23 8 24 9 25 10 26 11 27 12 28 13 29 14 30 15 31 16 OUT 15 5 ()131, OFF(0) PLC ON , 31No.2131, 7-3-5 (1)No.131 (,No. 2131 , ) (2)OUT 15 LCD _ (3)/,(A )(B )-9 +9 ,A B -9+9 (4),23 0 ,, 21 - 7-3-6 LCD COMPARE,ON +,ON ,OFF ,OFF () () () () (+) (+) () () (-) () () (-) LCD 1SHOT,100ms +, ON 100ms ON () () () () () (+) () (+) () (-) () (

CRBB-OM00004

Description Qty Note 21 No. Size 20, 30 Common to right-hand and left-hand (Reed auto switch D-M9) Unit part number: P811030-8M Cross recessed round head screw 1 M36L 3 2 Holding block 1 1 Switch holder 1 No.

MHS

C C 2 5 3 mm Nm 16 M2.50.45 2 0.3 20 M30.5 2.5 0.6 25 M30.5 2.5 0.6 32 M40.7 3 1.4 40 M40.7 3 1.4 50 M50.8 4 2.8 63 M50.8 4 2.8 80 M61 5 4.8 21 1.

LEC-T1_C

TB setteing 1 Language Japanese JapaneseSET LCD contrast SET TB 1 LCD MENU P17 5.32 122 - 2TB Ver2.** TB Ver.511 SETTINGLanguage21 TBsetting Language12 21 SET MENU TEST MONITOR DATA ALARM JOG SETTING SET MENU AX IS. Setting 1 Language Eng Disp Easy Item Speed 1 AX IS.

SFOD-OMT0005CN

Origin switch direction () Undefine No. 21 Undefine No. 21 () *1 -46- 11 11.1 () (*)(1) (2) ) (2) (1) 11.2 *[] 0 () /() -47- 11.3 1 (1) INP ON (/) (2)() INP OFF (3) [1] INP OFF INP ON -48- [2]() INP ON () () 11.4 (1) (2) (3) PLC 2 11.5 3 EMG EMG OFFOFF () RESET RESET ON () HOLD HOLD ON () EMGRESET ,OUT OFF -49- 12() 12.1 )100mm/s 50mm (No.1 ) 50mm 50mm/s 10mm