Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gom serles zPR

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gomp serles zPR

Digital Flow Switches

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Vacuum Unit

Port Size Ejector system Vacuum pump system Metric Inch Metric Inch PV 6 1/4" 6 1/4" V 6, 8 1/4", 5/16" 6, 8 1/4", 5/16" EXH (Port exhaust) 8 5/16" If the sound absorbing material is clogged, it will cause a reduction in the ejector performance.

Digital Flow Switches, Series PF2A, Series PF2W

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Model Selection 1

Single unit 1/8 to 3/4 2, 3, 4, 5, 7, 10 0 to 2 (1) 17-2-36 VV2CL2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 17-2-42 VCS20/30/40 Single unit N.C. 2, 3, 4, 5, 7, 10 1/8 to 3/4 0 to 1 (1) 17-2-46 VV2CS2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 2 port Direct operated 2, 3, 4, 5, 7, (10) (2) 17-2-52 VCW20/30/40 Single unit N.C.

EX510

Sumitomo 3M Limited Manufacturer's part no. 1-1473562-4 1-1473562-4 1473562-4 1-1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 2-1473562-4 2-1473562-4 2-1473562-4 D-A9 D-M9 D-Y D-Z73 D-Z76 D-Z80 Z/ISE1 Note 1) ZS-28-C ZS-28-C ZS-28-C ZS-28-C ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 646 B

ALF400 to 900, ALT-5/-9

( 0 3 . 6 1 ) 8 2 4 ( 5 8 . 6 1 ) 9 4 4 ( 8 6 . 7 1 9 T L A ) 4 3 2 ( 1 2 . 9 ) 8 0 1 ( 5 2 . 4 ) 0 3 ( 8 1 . 1 ) 7 ( 8 2 . ) 1 2 1 ( 6 7 . 4 ) 7 3 1 ( 9 3 . 5 ) 8 5 2 ( 6 1 . 0 1 ) 0 4 ( 7 5 . 1 ) 2 2 4 ( 1 6 . 6 1 ) 2 7 4 ( 8 5 . 8 1 S I 9 T L A ) 4 3 2 ( 1 2 . 9 ) 8 0 1 ( 5 2 . 4 ) 0 3 ( 8 1 . 1 ) 7 ( 8 2 . ) 1 2 1 ( 6 7 . 4 ) 7 3 1 ( 9 3 . 5 ) 8 5 2 ( 6 1 . 0 1 ) 0 4 ( 7 5 . 1 ) 2

IZx-OMP0064

1840 2 1 2 940 3 1000 2 2 1960 2020 1 1 5 6 6 7 6 6 1 3 2 3 1060 1 1 2 1180 1 3 2080 2140 2 4 2 5 1240 4 1360 1 1 3 1 1 2200 2260 2 1 1 7 2 7 1420 1 4 1480 1 4 2380 2440 8 7 AC adapter AC adapter for IZS40 Note) AC cord is only for use in Japan.

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

Speed controller with Model Port size 4 6 8 10 12 ASD One-touch fittings for AS121-M5 AS221-01 AS221-02 AS321-02 AS321-03 M5 x 0.8 AS 1 8 R metal body specifications 1 4 R AS-FE 1 4 Usesflameresistantresinasstandard. (ULstandardV-0) R 3 8 R KE AS421-04 1 2 R Note 1) :Brasspartsareelectrolessnickelplated,providedasstandard.

ZQ-OM01401

) (3) (4) 1 (1) 2) 01 1 S () 02 2 P () : 08 8 (3) (PD) 1) 1 B (: P ) 3 (: PD ) C 2) 1) 3)12S 0.5 8 0.7 6 (4) 1.0 4 2) 8 4 A 4) Assy 6 - No.ZQ-OM01401-B ZQ000 U A-K15L B-EA M G-3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (1) U (6) M 6) (2) M SI (kPa) 6) (:psi) P K1 N.C.

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Recommended flow rate Note) (l/min (ANR)) Mass (g) Internal capacity (cm3) 1.7 ZA Model IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX 1.7 4.3 IN/OUT straight piping Metric size ZR Easy installation

Air Catch Sensor Series ISA

Example) G36-P4-01-X30 Regulator 2 Port Solenoid Valve AR 20 E 02 1 VCA27A S 5 DL 02 4 Q Port size Thread type Voltage CE marked 02 02N 02F Rc 1/4 NPT 1/4 G 1/4 Rc NPT G Nil N F 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Throttle Option (The shape of pressure gauge) Note 2) Nil S B K Without throttle and manual lock With throttle With manual lock With manual lock

HRL

c u i t Contact output 4: OFF 8 3 Contact output 5: OFF 4 15 Users power supply usage example (Example 2) Contact output 1-5 common 5 1 Contact output 6: OFF 2 Power supply 24 VDC 24 COM 18 14 Contact output 6 common 3 4 24 COM +15 V 100 11 + Analog output 1: CH2 circulating fluid temperature 15 V 23 Analog output 1 common ANALOG COM 100 +15 V 10 + Analog output 2: CH2 electric conductivity

ZQ-OM01301

Note 5) When VA or VB is specified for (1), the check valve is already built in. 2 4 (Straight) 3 6 (Straight) 4 3.2 (Elbow) 5 4 (Elbow) 23 - Doc. No.

High Power Cylinder Series RHC

38 2500 47 0.5 3000 56.5 0.1 0.3 10, 12, 16 1/4, 3/8 50 500 15 63 1000 30 3/8, 16 1/2, 16 1/2, 16 3/4, 16 3/4, 16 0 1500 45 1,000 2,000 3,000 2000 60 Maximum speed Vmax (mm/s) 2500 75 80 3000 89.5 16 3/8, 1/2 500 24.5 =0.7 1000 48.5 3/8, 16 1/2, 16 3/4 3/4 3/4 3/8 1/2, 16 3/4 3/4 3/4 3/4 150 80 1500 72.5 2000 96.5 0.5 100 2500 120.5 0.1 0.3 3000 106 500 38 50 1000 75.5 1500 113 100 2000

IDX-OM-X004

. 3 1 3 3 Shutdown . 3 2 3 4 Check points before restart . 3 2 3 5 Precautions for long-term non-operation . 3 2 Chapter 4 Maintenance 4 1 Daily inspection . 4 1 4 2 Periodical Maintenance . 4 1 4 2 1 Exchange of absorbent . 4 1 4 2 2 Service parts . 4 2 4 2 3 Exchange of other parts . 4 4 4 2 4 Check points book . 4 6 Chapter 5 Troubleshooting 5 1 Cause and countermeasure of errors . 5

Title not found

dE, Lr MM R, v, dND NX NZ 0 4 7 + 0 0 0 3 1 0 6 M 1 8 x 1 5 2 3 6 1 0 6 1 1 0 1 5 0 v v v + 0 m 3 q (16j3i) 50mfr Y-O5A (38) (27) ( 1 2 + 0 0 7 0 ) (1 5) (27] (60) (28) 0 6 3 o 0 1 2 o @39 3ir ( 1 6 1 5 0 0 4 7 + 0 0 0 3 1 0 6 1 1 0 M 1 8 x 1 5 0.59 1 0 6 236 63mr Y-O5A (27\ (28) (1 5) (27\ ( 1 2 + 0 0 7 0 ) (38) (60) 0 6 3 a o 1 2 0 @39 M22x1 5 o75 1 1 0 0 7 1 + 0 0 0 3 2 1 7 1 4 6 1 4 2

Digital Flow Switch (Integrated display type)

(no freezing or condensation) Standards CE/UKCA marked, UL specification One-touch fitting C4 (4)/C6 (6) C6 (6)/N7 (1/4) C8 (8)/N7 (1/4) Piping Piping 15 Screw fitting (Rc/NPT/G) 01 (Rc1/8)/N1 (NPT1/8)/F1 (G1/8) 02 (Rc1/4)/N2 (NPT1/4)/ F2 (G1/4) Port direction Straight, Rear -90No.PF-OMW0007-E Model PF2M701 PF2M702 PF2M705 PF2M710 PF2M725 PF2M750 PF2M711 PF2M721 Material fluid contact parts