HRX-OM-X071

pump . 6-2 6.4 Option YWith feet / Without rack mounting brackets . 6-3 6.4.1 Option YWith feet / Without rack mounting brackets . 6-3 6.4.2 Anti-quake bracket (Optional Accessories) . 6-4 6.5 Option Z . 6-5 6.5.1 Option Z. 6-5 6.5.2 Option Z1. 6-5 Chapter 7 Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm Buzzer Stop . 7-3 7.3 Troubleshooting . 7-4 7.3.1

5 Port Solenoid Valve Series VQZ1000/2000/3000

6 one-touch fitting R2 P R1 3 1 5 n... 7... 6... 5... 4... 3... 2... 1...

Air Slide Table Series MXQ

'(&& '(** '(,* '()2 $ '(1 & * ) 1 $% MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 '('&2 '('*+ '('.. '(&& '(&1 '(*) MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 '(+ MTS '(. '() '(, Caution : % *'' 8( '(* Table (3) Correction Value of Moment Center Position Distance: An (mm) " 3 *#(# .' &'' *'' ,'' .'' +'' A1, A3 # * ) . 1 *' &)(. &1(. *& *+ *-(. ,.(. $ B 8# &.' 7 7 7 7 .1(. 1) &*. 7 7 7 )*(. .. 1) &'

VFS

override Direct manual override G 1/2 electrical entry G 1/2 electrical entry 5-Rc 3/8, 1/2, 3/4 5-Rc 3/8, 1/2, 3/4 ( ): Rc 3/4 ( ): Rc 3/4 3-8-89 90 Series VFS5000 2 position single/double, 3 position closed center/exhaust center/pressure center/double check Non Plug-in 2 position single: VFS5110-E, VFS5110-D 2-7 mounting hole 5-Rc 3/8, 1/2, 3/4 Rc 3/4: 3(R2), Rc 1/2: 5(R1) G 1 2 Applicable

Electric Actuator with Integrated Guide

2 3 4 5 6 7 A B Without switch and switch rail Photo micro sensor 1 pc., Photo micro sensor rail 1 pc.

Compact Manifold Regulator Series ARM5

5/16 3 11.5 19.5 20 23 1/4 1/4 10, 3/8 10, 3/8 7 11.5 22 22 26 1/4 1/4 19 20.5 515 Series ARM11A/B End Block Pressure Gauge ARM11E L Part no.

SYJ3000/5000/7000

Refer to page 1-7-4.)

0.55

VP300-224-1 (M3 x 36) VP500-224-1 (M4 x 46) VP700-224-1 (M5 x 66) Thread type Series For valve mounting 3 5 7 VPA344 VPA544 VPA744 Nil F N T Rc G NPT NPTF Caution Tightening Torque of Mounting Screw Port size Symbol 1 2 VPA344 1/8 1/4 VPA544 1/4 3/8 VPA744 3/8 1/2 M3: 0.8 Nm M4: 1.4 Nm M5: 2.9 Nm 31 Series VPA300/500/700 Air Operated Valve Base Mounted/Single Unit Series VPA300/Base Mounted

Modular F.R.L. Units

units: psi, F *7 *7 *7 *7 *7 *1 Drain guide is NPT1/4. *2 Drain guide is G1/4. *3 A bracket is not assembled and supplied loose at the time of shipment.

DOC1001322

1 HRS Series DOC1001322 Contents 7.1 Quality Control of Circulating Fluid and Facility Water . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1 Daily check . 7-3 7.2.2 Monthly check . 7-3 7.2.3 Inspection every 3 months. 7-5 7.2.4 Inspection during winter season . 7-6 7.3 Operation Stop for an Extended Period of Time . 7-7 7.3.1 Discharge of the circulating fluid . 7-7 7.4 Replacement of consumables

HRX-OM-R005

Accessories [Drain pan set] . 6-3 6.4.1 Optional Accessories [Drain pan set] . 6-3 6.4.2 Optional Accessories [Drain pan set] setting and checking . 6-4 Chapter 7 Alarm indication and trouble shooting . 7-1 7.1 Alarm Display . 7-1 7.2 Alarm buzzer stop . 7-3 7.3 Troubleshooting . 7-4 7.4 Other Errors . 7-6 Chapter 8 Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid

VFR

Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

HRX-OM-I051

Message and Troubleshooting . 6-1 6.1 Error Message . 6-1 6.2 Troubleshooting . 6-2 Chapter 7 System Maintenance . 7-1 7.1 Water Quality Management . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1 Daily inspection . 7-2 7.2.2 Quarterly inspection . 7-3 7.3 Storage . 7-3 7.3.1 Draining of circulating fluid out of tank . 7-4 7.3.2 Draining of facility water . 7-5 7.4 Periodic Replacement Parts

HRX-OM-O021

Accessories [Drain pan set] . 6-3 6.4.1 Optional Accessories [Drain pan set] . 6-3 6.4.2 Optional Accessories [Drain pan set] setting and checking . 6-4 Chapter 7 Alarm indication and trouble shooting . 7-1 7.1 Alarm Display . 7-1 7.2 Alarm buzzer stop . 7-3 7.3 Troubleshooting . 7-4 7.4 Other Errors . 7-6 Chapter 8 Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Applicable bore A 0.51 D C 1/4-28 UNF B 0.16 JM-025 0.44 3/4", 7/8" JM-03 0.50 0.19 5/16-24 UNF 0.50 1 1/16" JM-045 0.69 0.79 0.26 7/16-20 UNF 1 1/4", 1 1/2" JM-04 0.56 3/8-24 UNF 0.65 0.23 1 1/4", 1 1/2" (Non-rotating) JM-05 0.75 1/2-20 UNF 0.32 0.87 2" 6-14-20 21 Series NCM Mounting Bracket Accessory Material: Rolled steel P dia.

HRX-OM-X027

trouble shooting . 7-1 7.1 Alarm Display . 7-1 7.2 Alarm buzzer stop . 7-3 7.3 Troubleshooting . 7-4 7.4 Other Errors . 7-6 HRS-R Series HRX-OM-X027 Contents Chapter 8 Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid Quality . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection

CG5-S

6 14 4 M14 x 1.5 44 1/8 93 143 50 to 1200 109 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 1/4 167 63 to 1200 109 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 1/4 167 80 to 1400 130 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth 22 10 22 7 M22 x 1.5 80 3/8 201 100 to 1500 110

0.4

19 6 18 5 17 4 16 3 15 2 14 1 Station 1 VQ 1/2 VQ 1/2 Station 2 VV5Q11 VQ 4/5 Station 3 Station 4 Stations VQC 1/2 D side U side Station 5 VQC 4/5 Station 6 Station 7 VQZ Connector terminal no.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

7 o #0 !6 i @7 @1 @9 @6 @4 #9 !0 !9 u #6 20 t #8 Single acting (TL, TM) Double acting spring type (BL, BM) q y $0 $1 #4 r !1 e #5 @2 #7 #7 !2 #7 #3 @5 @5 #1 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 Single acting spring extended (TL, TM) Double acting spring type (BL, BM) y r $0 !1 !

VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing