RHC

2-B 1-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 2-A 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 20 8, 10 1/4 CX 500 9.5 0 1,000 2,000 3,000 CY Maximum speed Vmax (mm/s) 50 12, 16 1/4, 3/8 1000 19 MQQ M 63 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3/8, 16 3/8

ALF400 to 900, ALT-5/-9

F L A N 5 1 . 3 ) 0 8 ( 9 3 . 9 ) 5 . 8 3 2 ( 3 7 . 1 ) 4 4 ( 2 / 1 8 / 3 4 / 1 6 0 N 0 0 4 F L A N 5 3 . 3 ) 5 8 ( 0 7 . 9 ) 5 . 6 4 2 ( 1 8 . 1 ) 6 4 ( 4 / 3 0 0 5 F L A N 4 5 . 3 ) 0 9 ( 3 6 . 1 1 ) 5 . 5 9 2 ( 9 8 . 1 ) 8 4 ( 1 4 / 3 0 0 6 F L A N 4 9 . 3 ) 0 0 1 ( 8 5 . 2 1 ) 5 . 9 1 3 ( 1 0 . 2 ) 1 5 ( 1 0 0 8 F L A N 4 9 . 3 ) 0 0 1 ( 3 3 . 3 1 ) 5 . 8 3 3 ( 2 3 . 2 ) 9 5 ( 2 /

IDX-OM-X004

/ Compliance Requirements . i 5 Chapter 1 Name of each Parts 1 1 Name of each Parts . 1 1 Chapter 2 Transportation / Installation 2 1 Transportation . 2 1 2 2 Installation . 2 1 2 2 1 Location . 2 1 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 2 2 2 4 Electric wiring . 2 3 2 3 Cautions about Reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation

High Power Cylinder Series RHC

So [mm] 1500 2000 2500 3000 28.5 3/8, 16 3/8, 16 3/8, 16 1/2, 16 100 =0.7 38 47 0.5 56.5 0.1 0.3 50 10, 12, 16 1/4, 3/8 500 15 63 1000 1500 2000 2500 3000 30 3/8, 16 1/2, 16 1/2, 16 3/4, 16 3/4, 16 0 45 1,000 2,000 3,000 60 Maximum speed Vmax [mm/s] 75 80 89.5 16 3/8, 1/2 500 24.5 =0.7 1000 1500 2000 2500 3000 500 1000 1500 2000 2500 3000 48.5 3/8, 16 1/2, 16 3/4 3/4 3/4 3/8 1/2, 16 3/4

High-precision Digital Pressure Switch ( compatible)

Name Lead wire colour Function 1 DC(+) Brown 12 to 24 VDC 2 OUT2 White Switch output 2 3 DC(-) Blue 0 V 4 OUT1 Black Switch output 1 Used as IO-Link device No.

Air Cylinder CP Series Cylinder Positioner Assembly

I e zz 1.38 (35) 2.76 (70) 2.05 (52) o.79 (20) 1.57 (40) 0.39 00) 0.67 (17) MBxl 25 a.2a (;) 0.43 ( 1 1 ) M18x1.5 t . l 8 (30) 3 5 4 (s0) 2 2 8 t58) 6.26 (1s9) 205 (52) ( 1 1 2 ) 2 6 0 (66) 6.57 t167) 1.34 (35) 3 3 5 (85) 2.52 (64) {20) 1 5 7 (40) 0 3 9 o0) 0 6 7 o7) Ml0x1 25 o 2 a (7) 0.55 M 1 A x 1 5 't.22 ( 3 1 ) 3 8 6 (93) 2 2 8 153) s T o 6 6 9 (r 70) 2 0 5 (52) 1112) 264 (66) 1173)

VZ3000

Refer to page 3-13-4.) 20 or less 35 or less 10 3 2 position single Operating pressure range (MPa) 2 position double 3 position Ambient and fluid temperature (C) Response time (ms) (1) (at the pressure of 0.5 MPa) 2 position single, double 3 position 2 position single, double 3 position Max. operating frequency (Hz) Effective area Refer to the table below.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

B C Type of actuation Type of actuation 2 position double 2 position double 3 position closed center 3 position exhaust center 3 position pressure center Symbol 1 2 3 4 5 Function Function Standard type (1W) High pressure type (1.5W) External pilot Low power consumption type (0.5W) Symbol Nil H R Y 1 Stations U side D side 2 3 Note 1) When specifying two or more, list them in alphabetical

5 Port Solenoid Valve Series SQ1000/2000

of actuation MB Note 2) 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure center Dual 3 port valve N.C. + N.C.

S070

unit valve, the applicable tubing size is 3.18/2 for all 1 (SUP), 2 (OUT), and 3 (EXH) ports.

0.01

Figure (1) Chamfer is not allowed. 1.5 2 1 Detection surface 2 or more 2 or more 2 or more 3 or more 3 or more 3 or more 871 Series ISA2 Setting Procedure The detection distance is set with the LED level meter and setting dial. Keep the setting dial pulled out while in use. If released, it will return to its original position and become unable to rotate. 1.

Digital Flow Switch (Integrated display type)

/OUT2 White Not connected/Switch output 2 (SIO) 3 DC(-) Blue 0 V 4 OUT1 Black Switch output 1 Used as IO-Link device No. Name Lead wire colour Function 1 L+ Brown 18 to 30 VDC 2 N.C.

VZ1000

length specified Stations For 2 to 10 stations : One side (Same as direction of connector mount) For 11 to 20 stations: Both sides Nil Standard length Nil 02 2 stations 3 For 3 stations (Specify a longer rail than the standard length.)

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

9.4 IN OUT (34.2) 13 1 IN 2 x 8 One-touch fitting 3 18 2 x 3.4 With connector cover 28 8 2 x 2.5 depth 5 PFMB7201-C8L 88 48 18 OUT2 OUT1 10.2 DC () DC (+) 1 43 12 (34.2) 3 1 IN 18 2 x 3.4 OUT IN 2 x 8 One-touch fitting 68 28 8 2 x 2.5 depth 5 6 Series PFMB7 Dimensions PFMB7201-(N)02 70 48 Width across flats 17 18 OUT2 OUT1 10.2 DC (+) DC () 1 43 IN OUT (34.2) 13 1 IN 3 2 x Port size 18 Rc1

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

For Water 30 20 VX2 60-02 10 VX234.5 VX2 46 VX2 6010 VX2 50 8 3 2 04 03 3 2 3 2 VX223 10 3 2 VX2112 5 4 3 Flow rate Q l/min 2 1 0.001 (0.0018) (0.0054) 0.01 (0.017) 0.05 (0.07) 0.1 Pressure differential P = (P1 P2) MPa How to read the graph When a water flow of 2 l/min is generated, lP 0.017 MPa for a valve with 3 orifice (VX212, 222, 232).

3 Port Solenoid Valve Rubber Seal Series SY100 1

For blowing off 2. For vacuum control 3. For driving single acting cylinders 4.

3 Port Solenoid Valve Rubber Seal Series SY100

For blowing off 2. For vacuum control 3. For driving single acting cylinders 4.

Water-cooledThermo-chiller

Specific heat C [kg/m 3] [g/L] ([kcal/kgC]) [J/(kgK)] 10C 1.10 x 10 3 3.02 x 10 3 0.72 20C 1.08 x 10 3 3.15 x 10 3 0.75 50C 1.06 x 10 3 3.27 x 10 3 0.78 80C 1.04 x 10 3 3.40 x 10 3 0.81 Water Density : 1 x 10 3 [kg/m 3] [g/L] Specific heat C: 4.2 x 10 3 [J/(kgK)] (1.0 [kcal/kgC]) 107 Thermo-chiller Series HRW Fluorinated Fluid Type SEMI How to Order 002 H HRW Fluorinated FluidType Option

IS3000

N.O. 125 AC 250 AC 30 DC 125 DC 5 3 4 0.4 3 2 3 0.4 1.3 0.8 2.5 1.5 0.7 0.5 1.5 1 3 0.05 2 0.05 0.1 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 1500 VAC, Hz for 1 min.

4 Port Solenoid Valve Series VQD1000

(R) port 4-Rc1/8 Indicator light 7 2-4.5 (Mounting hole) 57 5.3 5.3 50.5 52 0.6 4 4 4 4 4 P 1 R 3 R 3 P 1 30 17 6.5 15 2 2 2 2 2 8 0.5 0.5 P=11 10 M5: M5 thread 2n-M5 4(A), 2(B) port 35 4 L2 38 L1 42 M plug connector (M) Stations 1 2 3 4 5 n D side U side Direct manual override (Non-locking) 24 15 43 L plug connector (L) n: Stations Dimensions n L 11 12 13 14 15 16 17 18 19 20 28 20 39 31