5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Note 3) Refer to page 6 for DIN rail weight. 1 Cassette Type Manifold Series SY3000/5000/7000 How to Order Valves SY 3 1 60 5 L C6 Series 3 5 7 Symbol M5 C4 C6 01 C4 C6 C8 02 C8 C10 SY3000 SY5000 SY7000 A, B port size Port size M5 x 0.8 4 One-touch fitting 6 One-touch fitting Rc(PT)1/8 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting Rc(PT)1/4 8 One-touch fitting 10 One-touch

High Precision Digital Pressure Switch, Series ZSE40/ISE40

600 (3000) 3.5 12.4 7 7.8 2.5 2.6 30 14 15.2 10.7 4.5 For splash proof use (IP65), insert an air tube into the atmospheric release port. 1.5 01: R 1/8 T1: NPT 1/8 (Refer to Specific Product Precautions 4 on the back cover for details.)

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.

Digital Flow Switch Series PFA For Air Series PFW For Water

Symbol 100 200 500 50 10 Rc NPT G 01 02 03 04 1/8 1/4 3/8 1/2 PFA510, 550 PFA511, 521 PFA551 Specifications PFA511 PFA521 PFA551 PFA510 PFA550 Model Measured fluid Dry air, N2 Detection type Heater type 20 to 200l/min 50 to 500l/min 10 to 100l/min 1 to 10l/min 5 to 50l/min Flow rate measurement range Operating pressure range 0 to 0.5MPa Withstand pressure 1.0MPa 3kPa (at 50l/min) 3kPa

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Fitting plug KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 Dimensions L (mm) A Applicable fitting size d A L D Part number KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 5 6 8.5 10 11.5 31.5 32 35 39 43 1/8 5/32 1/4 5/16 3/8 16 16 18 20.5 22 D Used to block unused cylinder port. L DIN rail AXT100-DR12.5 (Pitch) 5.25 7.5 Suffix number into from the dimension table below.

SI unit for DeviceNet TM

No.1 No.2 No.3 No.4 No.5 No.6 1 2 4 8 16 32 0 0 0 0 0 0 0 1 1 0 0 0 0 0 MAC ID 2 0 1 0 0 0 0 62 0 1 1 1 1 1 63 1 1 1 1 1 1 Communication speed setting (switches No. 7 to 8) Set the DeviceNetTM communication speed with a binary code of 125 kbps or 250 kbps or 500 kbps.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

Minimum Stroke for Auto Switch Mounting (mm) 12 16 20 25 32 40 50 63 80 100 Auto switch model No. of auto switches mounted 1 pc. 10 5 D-A9 2 pcs. 15 10 D-A9V D-M9V 1 pc. 5 2 pcs. 10 1 pc. 15 10 5 D-M9 2 pcs. 15 10 1 pc. 15 10 D-M9W 2 pcs. 15 10 1 pc. 10 D-M9WV 2 pcs. 10 D-Z7 D-Z80 1 pc. 10 5 2 pcs. 15 10 D-Y59 D-Y7P 1 pc. 5 10 2 pcs. 15 10 D-Y69 D-Y7PV 1 pc. 5 2 pcs. 5 D-Y7W D-Y7WV 1 pc.

Manifold Regulator ARM1000/2000 Series

Note 4) When a regulator is not mounted on the manifold, use the following blank plate assembly (with mounting screws and O-ring) For ARM1000: Part no. 136114A For ARM2000: Part no. 136214A VBA VBAT AP100 ARM2000-4A2-01G Option / Pressure Gauge: G15-10-01 How to Order Symbol Individual IN Common IN G15 10 01 IN 1 Max. display pressure OUT IN 2 1 OUT 2 10 1.0 MPa Not able to set the pressure

PSxx-OMG0001CN

"-M" ( ) "-M" 13 SI kPaMPa 14 15 () 16 () / ( () ) -29No.PS-OMG0001CN-H OUT1 80mA OUT2 7F.S. 3 ( 4dights ) 1 -30No.PS-OMG0001CN-H PSE3 -100100 kPa 0-101 kPa 0100 kPa 01 MPa 0500 kPa 02 kPa 1 -101101 kPa 10-101 kPa -10100 kPa -0.11 MPa -50500 kPa -0.22 kPa 0.2 kPa 0.1 kPa 0.1 kPa 0.001 MPa 1 kPa 0.01 kPa DC1224 V10P-P10 50 mA() PSE30DC15 V(1 M) PSE31DC420mA100 ) 1 26.4V

/

External pilot solenoid 1 Y A G 1 T Z B1 10 1 70 2 SGH SGHA Air operated 1 A G B1 10 1 2 70 q w e r t y u i o !0 !1 !2 q Series w Valve type e Seal material 70 r Pressure range t Thread type y Port size 1 2 3 4 1 2 A B 10 15 20 25 Nil G N T SGH100 SGH200 SGH300 SGH400 SGH100 SGH200 SGH300 SGH400 N.C. N.O.

VS7-6

2 (Top) 1 2 (Both sides) 1 2 (Bottom) 3 4 (Top) 3 4 (Both sides) 3 4 (Right) 3 8 (Right) 1 2 (Left) 3 8 (Left) 1 2 (Bottom) 3 8 (Bottom) 1 2 Combination Without air release valve 1 1 Without air release valve With air release valve 04D 04U 04B 06D 06U 06B Without silencer box With silencer box 03R 04R 03L 04L 03Y 04Y ... ... 1 2 3 4 10 10 100A CV 50/60Hz 200A CV 50/60Hz 24V DC 12V DC Others

Pressure Gauge Guide

Model (Standard) Model Pressure range (1) VY1 Indication unit Connection thread Note MPa GP46-10-01 to 02 GP46-10-01 to 02L2 GP46-10-01 to 02L5 0 to 1.0 G 1 8 R MPa 1 4 R PPA Note 1) Do not apply pressure more than the maximum display pressure. This will cause a malfunction. Be sure to read the precautions in page 14-11-15 for selection and installation.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

Common Supply Regulator

Structural Drawing and Replacement Parts 10 7. Assembly of Optional Parts 11 8. Operation and Adjustment 12-13 9. Trouble Shooting 14-15 10. How to Replace the Components 16-21 10-1. Diaphragm Assembly Replacement 16 10-2. Valve Guide Assembly and Valve Assembly Replacement 17 10-3. Square Embedded Type Pressure Gauge Replacement 18 10-4.

7.4

S070P B 5 G 1 Base Mounted Body Ported Base Mounted EX510 S 01 0 Voltage Accessory Output specifications 0 NPN output (Positive common) 1 PNP output (Negative common) Symbol Specifications Nil None 1 Stopper plate is included.

AS

Inch size Metric size 01 02 23 2 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 03 05 07 09 11 13 Control type 04 06 08 10 12 0 1 Meter-out Meter-in Use 1/8" tube.

AS

Metric thread (M3, M5) Unified thread (10-32 UNF) R NPT M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASN M5 Nil U10/32 01 02 03 04 AQ N ASV AK Needle Valve/Flow Characteristics Note) The flow characteristics are representative values.

OML0002-C

Body Assembly B Manifold mounting parts IZN10 ES 2 10 A002 01 06 Number of manifold Mounting pitch ES 17mm 2 2 stations 3 3 stations 4 4 stations Nozzle shape NIL 01 02 11 Piping female Note 1) Rc1/8 Large flow nozzle Type Energy saving charge elimination nozzle Electrode needle cleaning kit/IZS30-M2 Piping diameter 06 f6: metric 07 f6.351/4"): inch 16 f6: metric (elbow) 17 f6.351/4"): inch

Digital Pressure Switch

Linearity 1%F.S. Analogue output Output impedance approx. 1 k Output current (rated pressure range) 4 to 20 mA 2.5%F.S. 2.4 to 20 mA Current output 3 2.5%F.S. Linearity 1%F.S.

EtherNet/IP TM Compatible Fieldbus System

Service Class Inst Attr ID Values ID ID Reset 01 h [Identity Object] 1 h 01 (Type1 reset) 37 No.EX-OMS0014-A < Properties tab > Network information including the GW unit MAC address and communication speed are displayed. 38 No.EX-OMS0014-A Specification Specifications Basic Specifications Item Specifications Power supply voltage range Power supply for input and control: 24 VDC 10% Power