Air Pilot Operated Series NVSA

>Aiv EJ E) =:-:H8 I 10 l 1 I : i/b.a $n a ltfllon!. @nl6l t dory. DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.

VCL

W (44) (Y) Z (X) (V) T R T 25 IN port 2 x 3/8 l=280 l=300 : Thread type Plug provided on U side at shipping. 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n x 1/4 H H P = J (Pitch) 2 n x 1/8 : Thread type L Dimension (mm) n (stations) Model Dimensions 2 3 4 5 6 7 8 9 10 L1 70 105 140 175 210 245 280 315 350 VV2CL2 L2 82 117 152 187 222 257

Digital Flow Switch (Integrated display type) ( compatible)

(N) value 4 L 16 L 40 L 100 L 250 L -2 10-2 -1 10-1 Minimum Minimum Minimum Minimum Minimum 0 100 1 101 2 102 3 103 4 104 5 105 Maximum Maximum 6 106 Maximum Maximum Maximum : Unit setting: G Flow range AC_E set value 10(N) value 4 L 16 L 40 L 100 L 250 L -2 10-2 Minimum -1 10-1 Minimum Minimum Minimum Minimum 0 100 1 101 2 102 3 103 4 104 Maximum 5 105 Maximum Maximum 6 106 Maximum Maximum

Cylinder with Lock Series CLS

(Different surfaces, Same surface), 1 pc. 10 85 90 80 D-M9V D-M9WV 10 + 30 (n2) 2 80 + 30 (n4) 2 85 + 30 (n4) 2 90 + 30 (n4) 2 n pcs. (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) 2 pcs. (Different surfaces, Same surface), 1 pc. 20 115 120 D-M9AL 20 + 40 (n2) 2 115 + 40 (n2) 2 120 + 40 (n2) 2 n pcs. (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) 2 pcs.

ARM10/11

3 35 x 31 x 2 28 x 25 x 1.5 O-ring NBR i How to order (1) When adding n stations to ARM Regulator n pcs. Bracket assembly n pcs. (2) When regulators, end plate assembly and bracket assembly are assembled to make the manifold of n stations. Regulator n pcs. Bracket assembly n pcs.

ARM10/11

3 35 x 31 x 2 28 x 25 x 1.5 O-ring NBR i How to order (1) When adding n stations to ARM Regulator n pcs. Bracket assembly n pcs. (2) When regulators, end plate assembly and bracket assembly are assembled to make the manifold of n stations. Regulator n pcs. Bracket assembly n pcs.

Rotary Gripper Series MRHQ

40 40 Pressure 0.6MPa Pressure 0.6MPa Gripping force N Gripping force N 30 30 0.5MPa 0.5MPa 20 20 0.4MPa 0.4MPa 0.3MPa 0.3MPa 10 10 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ20S MRHQ20C 50 100 Pressure 0.7MPa Pressure 0.7MPa 40 80 Gripping force N Gripping force N 0.6MPa 0.6MPa 0.5MPa 30 60 0.5MPa 0.4MPa 20 40 0.4MPa 0.3MPa 0.3MPa 10 20 0.25MPa 0.25MPa

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

90 5 90 10 180 10 90 5 90 10 180 10 90 5 90 10 180 10 90 5 Air (Non-lube) Fluid 1.05 1.5 Proof pressure (MPa) 5 to 60C Ambient and fluid temperature 0.15 to 0.7 0.2 to 0.7 0.15 to 1.0 Operating pressure range (MPa) Rotation time adjustment range (sec/90) 0.07 to 0.3 Allowable radial load 40 N 50 N 60 N 20 N 30 N 60 N 80 N 15 N Shaft load Allowable thrust load 2 15 N 30 N 40 N 10 N Allowable

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Refer to page 829-10. 8-29-17 18 Dual Rod Cylinder: With End Lock For Retraction Side Series CXS 6, 10, 15, 20, 25, 32 How to Order CXS M Y7BW 50 S R 10 Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Air Slide Table Series MXQ

F A F Lr 6 6 6 Lr = 40mm MXQ6-30 0.015 0.03 0.05 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-30 MXQ6-50 MXQ6-50 MXQ6-40 Table displacement mm Table displacement mm Table displacement mm MXQ6-50 0.04 MXQ6-20 MXQ6-40 0.010 0.02 MXQ6-20 MXQ6-40 0.03 0.02 MXQ6-10 0.01 0.005 MXQ6-10 0.01 0 0 40 80 120 10 20 30 10 20 30 0 Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf

Air Slide Table Series MXJ

Lr=40 mm MXJ4 MXJ4 MXJ4 0.03 0.20 0.10 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXJ4-10 MXJ4-10 MXJ4-5 MXJ4-5 MXJ4-5 MXJ4-5 -10 0.08 -10 0.15 MXJ4-10 MXJ4-10 0.02 0.06 MXJ4-5 MXJ4-5 0.10 0.04 0.01 0.05 0.02 20 40 60 0 10 30 50 20 40 60 0 10 30 50 0 10 5 15 Load (N) Load (N) Load (N) MXJ6 MXJ6 MXJ6 0.04 0.10 0.20 Table displacement amount

CQS

10 12 16 20 5 6.5 8 10 14 15 18 20 7 10 12 14 4 4 5 5 5 5 8 10 * Refer to P.2.3-18 for detail of the rod end nut and mounting brackets.

High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Thus, F= 5 x 0.05 x 9.8 = 2.5 (N) 1. Calculation of applied lateral load F F = N m g (N) = 0.2 x 10 x 0.1 x 9.8 = 2.1 (N) CC 70 Lateral load F (N) RB 60 0.4 MPa 50 J 40 2. Confirmation of allowable lateral load From the graph, the allowable lateral load at L = 50 mm and P = 0.4 MPa is 18 N. Because 2.1 N < 18 N, it is applicable. 30 20 D2.

Electric Rotary Table

30 50 0.3 1.2 10 6 10 1 2 25, 50, 75 6 10 1 2 25 50 420 Gripper Step Motor (Servo/24 VDC) 2-finger type Long stroke 2-finger type With dust cover 3-finger type 2-finger type Series LEHZ Series LEHS Series LEHZJ Series LEHF CAT.ES100-77 Series LEHZ Series LEHZJ Series LEHF Series LEHS Max. gripping force (N) Max. gripping force (N) Max. gripping force (N) Stroke/both sides (mm) Stroke/both

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Thus, F= 5 x 0.05 x 9.8 = 2.5 (N) 1. Calculation of applied lateral load F F = N m g (N) = 0.2 x 10 x 0.1 x 9.8 = 2.1 (N) CC 70 Lateral load F (N) RB 60 0.4 MPa 50 J 40 2. Confirmation of allowable lateral load From the graph, the allowable lateral load at L = 50 mm and P = 0.4 MPa is 18 N. Because 2.1 N < 18 N, it is applicable. 30 20 D2.

CV/MVGQ

D-C7/C80 50 50 + 45 (n 2) 10 15 15 + 45 ( n 2) (n = 2, 4, 6) 2 D-H7/H7W D-H7NF D60 + 45 (n 2) 60 15 10 D-C73C/C80C D-H7C 15 + 50 ( n 2) (n = 2, 4, 6) -X 2 65 + 50 (n 2) 65 15 10 4. One-touch fitting cannot be replaced. One-touch fitting is press-fit into the cover, thus cannot be replaced.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

10 16.5 163 43.5 96.5 1(P), 5(R1), 3(R2) port 3-Rc 1/2 (Pilot EXH port) Rc 1/8 SMC 1 P 5 3 R2 R1 42 17.5 PE 18 18 38 72 L n Dimensions Formula L1 = 25n + 63, L2 = 25n + 198 n: Stations In the case of DI unit, 1 pc., 54 mm is added per 1 pc. 9 288 423 10 313 448 7 238 373 11 338 473 6 213 348 12 363 498 5 188 323 13 388 523 4 163 298 14 413 548 3 138 273 15 438 573 8 263 398 L1 L2 2 113

Clamp Cylinder with Lock Series CLK1

A B 3 5.5 7 7 15 60 65 + 45 (n-2) D-H7, D-H7W D-H7F 30.5 28.5 30 30 n-2 2 15 + 50 ( ) (n = 2, 4, 6...) Approx. Hs 30.5 35 40.5 47.5 D-H7C 15 65 10 65 + 50 (n-2) A B Approx. Hs 3 5.5 7 7 n-2 2 D-H7C 31.5 28.5 30 30 15 + 50 ( ) (n = 2, 4, 6...)

Low Profile Slide Table Series MXF

F A A Lr MXF8 Lr = 20 mm 0.08 0.04 0.03 MXF8-30 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXF8-30 0.06 MXF8-10 MXF8-20 MXF8-30 0.03 0.02 MXF8-20 0.04 0.02 MXF8-20 MXF8-10 0.01 0.02 0.01 MXF8-10 0 0 0 10 20 30 40 10 20 30 10 20 30 40 Load (N) Load (N) Load (N) MXF12 Lr = 30 mm 0.10 0.08 MXF12-50 0.06 Table displacement amount (mm) Table displacement