VNH

Pilot solenoid valve 17-4-36

SQ1000/2000

Dimension L 31 398 32 410.5 33 423 34 435.5 35 448 36 460.5 37 473 38 485.5 39 498 40 510.5 104 Series SQ1000/2000 Manifold Options for SQ1000/SQ2000 Negative COM specifications The following valve part numbers are for negative COM specifications. Manifold part numbers are the same as standard.

Series SYJA300 3 Port Air Operated Valve

Refer to p. 0-33 to 0-36 for Safety Instruction and common precautions.

SZ3000

For details on attachment of sockets, refer to the section "How to use plug connectors" on page 36.

VHK

Refer to p.0-33 to 0-36 for Safety Instructions and common precautions. w To screw in the fitting, first hand-tighten; then, use a tool to rotate it 2 to 3 turns. If it is tightened excessively, the amount of sealing agent that protrudes will increase, so make sure to remove the sealing agent that has protruded.

VHS

Filtration rating has to be 5m or smaller. 3(R) Model VHS2500 VHS3500 VHS4500 VHS5500 A 60 78 85 136 B 20 29 32 56 C 12.8 12.8 12.6 32 D 40 53 70 90 E 44 53 64 80 F 33 42 49 65 G 28 29 36 54 H 7.5 7.5 10 10 3.6-18

VQ

L size Blank plate with 2 screws and gasket 39 498 38 485.5 37 473 36 460.5 35 448 34 435.5 33 423 32 410.5 31 398 No. L size 40 510.5 2.9-15

VXA21/22

VXA225l VXA226l VX070-022 1 4 1 4 03 ( ) 3 8 04 ( ) 1 2 VX070-029 Ordering Example (Example) Series VXA21, Orifice size 4.5mm, Normal closed, Rc(PT)1/4 (Part number)VXA2130-02 4.1-59 VXA21/22 Dimensions (Orifice size 3 mm, 4.5 mm, 6 mm) VXA212m, VXA213m, VXA223m, VXA224m Model Port size P Rc(PT) A B C D E F With bracket G H I J VXA21 VXA22 , , 18 21 9 10.5 40 45 21 27 55 62 64 71 11 13 36

XL

the bonnet assembly (1) is a heat resistant structure. 10 High Vacuum Angle Valve Series XLC, XLCV Dimensions (mm) 1in = 25.4mm (b) XLC/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) H J Heater (optional) B G A A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 E Note 1) A 40 50 65 70 88 90 J 26 28 36

%silltr

F 3 COMPRESSED AIR THEORY Units Pressur Prooerties of Gases lsothermic change (Boyle's Law) lsobaric change Charles Law Law of Gay Lussac lsochoric change Adiabatic (lsentropic) change Standard Volume Flow Bernoulli's Equation Air Humidity Relative humidity Pressur and Flow Use of the diagram: Formulae: 6 6 I 1 0 1 0 1 1 1 1 1 1 1 1 1 2 1 2 1 2 1 2 1 2 1 3 1 5 1 6 1 6 AE 36 36 5 AIR TBEATMENT

Title not found

t.o7 (78) 0.98 (25) 2.05 (52) t.55 i14l 0.43 121) ).43 t l l I 1.89 (44) M22xL5 1.46 ) 7 9 (20t 457 1 1 1 5 1 1 . 1 0 (2Al r.21 :;dd5r 3 1 . 5 : 3 : l 2.36 (60) 2.gJ 171) 9.25 t235) I0.04 t255) 2.56 (65) 0.49 1 2 5 ) 1 . 1 5 t80l 9.61 1244\ (264) 1.57 4.57 ( 1 1 6 ) 3.62 (92) 1 . 1 8 (30) 2.05 (52) ).55 (14) 0 4 3 t21) 1.43 l l 1 ) 2.25 (54) M26xl 5 1.57 (40) 1.98 (25) 4.96 (1261 1.42 (36

PSxx-OMG0005CN

X175X186X188X189) () NG NG -5No.PS-OMG0005CN-E * (Nm) RNPTRc1/8 79 RNPT1/4 1214 TSJ Crawford fitting (Swagelock )URJ Cajon (VCR ) FG (50N () () 6 33 ( ) () -6No.PS-OMG0005CN-E 30m DC(-)() () * ( ) () CE -1060 * 2030 10 1% * -7No.PS-OMG0005CN-E 0 01 28 C2 PSE56 0 (01MPa) (1) C2 1 (0-101kPa) 3 (-100100kPa) *PSE200 4 (0500KPa) (15V) 01 R1/8(M5) 28 (420mA) 02 R1/4(M5) C01 Rc1/8 N01

IR10-OM00007

-X30 IR1010G33-4-01 G33-P4-N01-X30 IR1020G33-10-01 G33-P10-N01-X30 011/84 Rc NNPT FG 00.0050.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R101BG M AX.

IR20-OM00008

(B),2 (C),(B)(A), () (B)(C) (A) BLEED (B) (C) OUT SUP SUP. 1 1 M Pa/ m ( B) m 2 N / m m m M Pa M Pa/ m m M Pa B m /N (A) ) ( N N m / N ( C) m 2 N ( A) m 2 N -5- 3. 1 SUP OUT 2 %F.S 3 4 R B(P36202028) G 2 3 Rc,F N IR2000G43-2-01 G43-P2-N01-X30 IR2010G43-4-01 G43-P4-N01-X30 IR2020G43-10-01 G43-P10-N01-X30 021/44 Rc NNPT FG 00.0050.2MPa 1: 0.010.4MPa 20.010.8MPa

IR30-OM00013

-X30 IR3010G43-4-01 G43-P4-N01-X30 IR3020G43-10-01 G43-P10-N01-X30 02:1/4 03:3/8 04:1/2 Rc FG NNPT 00.010.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R302BG No.

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8)

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: S (-90 kPa), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8)

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: S (-90 kPa), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8)