This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, MALE CONNECTOR S/S, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, CH, KQ(X23) 4MM, .00939 lb, Applicable tubing O.D. (mm)Connection threadsModel M5 type R type4M5 x 0.8KGH04-M5

This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, MALE CONNECTOR S/S, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, FH, KQ(X23) 6MM, .00992 lb, Applicable tubing O.D. (mm)Connection threadsModel M5 type R type6M5 x 0.8KGH06-M5

This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, MALE ELBOW S/S, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, 1G, KQ(X23) OTHER SIZE RATING, .01437 lb, Applicable tubing O.D. (mm)Connection threadsModel M5 type R type4M5 x 0.8KGL04-M5

This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, MALE ELBOW S/S, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, 1G, KQ(X23) OTHER SIZE RATING, .00998 lb, Applicable tubing O.D. (mm)Connection threadsModel M5 type R type6M5 x 0.8KGL06-M5

W2M/4M

t signai VDC 1 2 3 Input signalVDC 1 2 3 Hysteresis r c 0.5 z o E ! 0 E E ,o5 5 E 1 2 3 4 lnplrl signal VDC lrpul signa VDC 1 2 3 lnput slgna!

This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, MALE CONNECTOR S/S, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, CA, KQ(X23) 4MM, .01106 lb, Applicable tubing O.D. (mm)Connection threadsModel M5 type R type4M5 x 0.8KGH04-M5

7

8 r u !7 @8 @5 @6 @7 @9 CKG1C (Clevis width 12.5) i !2 #1 !3 !5 !0 !1 Component Parts No. Description Material Qty Note No.

HRX-OM-Y098

Configuration One thermo-chiller for one controller. 2 2 R D R D 3 3 S D S D 5 5 S G S G Controller Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

HRX-OM-W060

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRL Series 3.3 Installation 3-27 HRX-OM-W060 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Air Slide Table Series MXQ

Unit mm/s kg kg kg kg Va W Wa We Wmax K 8

Precision Clean Regulator Series SRP

1 0 1 01 Set pressure Gauge port orientation Nil: Standard 0.005 to 0.2MPa 0 OUT IN 1 0.01 to 0.4MPa Knob Gauge port R: R specifications Gauge port JIS symbol Port size Piping port size M5 x 0.8 Rc 1/8 Symbol M5 01 OUT IN Gauge port positions are indicated with the knob on the top side.

EX500-GPR1A.eng

OUT IN BUS COM A COM B COM C COM D F R P B U S O I R DIA BF SOL RUN GATEWAY UNIT EX500 SERIES 18 19 Switch setting Open the station number switch protective cover and set the switches with a sharp-pointed watchmakers screwdriver etc. NOTE 1. Be sure to turn off the power before setting the switches. 2. Be sure to set these switches before use.

D. P. Lube ALD600/900 Series

Lube Unit/ALDU600-06 to 10, ALDU900-12 to 20 Float switch mounting position Mounting thread M12 R 3.2 S 40 Q IN P M N M L A B C E E F G K J (Bracket mounting dimensions) H D S Bracket (Option) Panel (Option) 6 x 17 A B C D E F G H J K L M N P Q R S Model Port size ALDU600-06 ALDU600-10 ALDU900-12 ALDU900-14 ALDU900-20 289 291.2 453 453 476 24.5 13.6 51 45.5 14.5 69.5 78.2 89 94.5 102.5 4

CJ2Q

Bore d C B H NTJ-015A 10 16 8.1 9.2 7 8 3.2 4 M4 X 0.7 NTJ-010A M5 X 0.8 * Refer to p.1.3-12 for details of the mounting nut. (mm) ND NN Bore 10 16 A B C D F GA GB H MM NA NB S Z 0 0.022 0 0.022 15 12 14 4 8 8 5 28 M4 X 0.7 12.5 9.5 M8 X 1.0 46 74 75 8 15 18 20 5 8 8 5 28 M5 X 0.8 12.5 9.5 M10 X 1.0 47 10 Refer to p.1.3-8 to 1.3-10 for dimensions of each mounting bracket.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

1 CG1 @2@3@4@5 14B MB Locking at rod end C95 CA1 CS1 Manual release non-locking style: L Material Note Component Parts Material Note Component Parts No. q w e r t y No. !7 !8 !

Slide Tables MX Series

Lateral Mounting (Through Holes) Lateral Mounting (Tapped Holes) l1 12.7 15.6 20.6 24.0 l1 12.7 15.6 20.6 24.0 l 9.4 11.2 16.2 16.0 Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 Max. fastening torque in lb (N m) Bolts M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 Model MXH6 MXH10 MXH16 MXH20 22 (25) 45

XL-OMV0002

Kalrez R Chemraz R VMQ PLASMA ARMOR R No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro R Kalrez R dupont dupont Chemraz R Greene Tweed & Co ULTIC ARMOR R Nippon Valqua Industries, Ltd. 6 XL-OMV0002 3. 3-1.

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD.

MHx-OMY0005

:GR-S-010(10g):GR-L-005(5g) 14 3-3. 2 (MHF2-8D2MHF2-12D20D) 1. 2. 8:12:R 1620:C ABC 3. (8:) (12 ) :GR-S-010(10g):GR-L-005(5g)GR-L-010(10g) 8 2 12 2.5 16 3 20 4 B C C 8 A 12 0.9 16 C MHF2-8D2 20 1.3 MHF2-12D* R MHF2-8D2 8 1.5 12 2 16 2.5 20 3 12 15 3-4. /1 MHF2-8DMHF2-8D1 1 16 2 17 3 18 4 19 5 20 NBR 6 21 NBR 7 8 A 9 B 10 C 11 12 13 14 15 MHF2-8D

IR1000/2000/3000

Standard part number X1 Clean room specifications Specifications Non-grease specifications Cleanliness Bleed port Class 10 With M5 fitting (applicable tube O.D. 6) Manifold Specifications (except type IR2120 and series IR3000) 6 IR1000/2000: M5 fitting (applicable tube O.D. 6) IR3000: Rc(PT) 1/2 female thread EXH port Grease Teflon grease 2 to 8 station manifold type regulators.