ZP

R D A6 M Applicable tubing O.D.

Electric Actuators

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 SGDE servo pack R U V 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.

High Vacuum Angle Valve

N P R Port P (Pressure port) In case of double solenoid valve Port R (Exhaust port) Q K L M B EB EA P A In case of single solenoid valve Port R (Exhaust port) (mm) P K L M N Q R Model XLCV-50 XLCV-63 XLCV-80 12.5 9.5 9.5 1 1 23.5 52.6 17.4 9.5 9.5 1 1 18.6 62.3 23.5 9.5 9.5 1 1 12.4 70.8 Other dimensions are the same as the XLC.

SYJ3000/5000/7000

(Value in the initial state) Base mounted Solenoid Specifications JIS Symbol 5 port 4 port (manifold) Grommet (G), (H), L plug connector (L), M plug connector (M), M8 connector (W) 2 position single 2 position single Electrical entry (B) 2 (A) 4 (B) 2 (A) 4 24, 12, 6, 5, 3 DC Coil rated voltage (V) 100, 110, 200, 220 AC 50/60 Hz 1 (P) 1 (P) 3 (R) 3 (R) 5 (R) Allowable voltage fluctuation

Table of Contents

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 R U V SGDE servo pack 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

SMC Basic Pneumatics

A r-ll B T-l I t# r. r-1 zK 9K Flg. 8.25 Two cylinder cascade- P N E U M A T I C T E C H N O L O G Y APPENDIX SYMBOLS T H E S Y M B O L S F O R F L U I D P O W E R S Y S T E M S A N D C O M P O N E N T S A R E S T A N D A B D T Z E D I N I S O 1 2 1 9 . T H E S T A N D A R D C O M B T N E S H Y D R A U L I C A N D P N E U M A T I C C O M P O N E N T S .

%silltr

A r-ll B T-l I t# r. r-1 zK 9K Flg. 8.25 Two cylinder cascade- P N E U M A T I C T E C H N O L O G Y APPENDIX SYMBOLS T H E S Y M B O L S F O R F L U I D P O W E R S Y S T E M S A N D C O M P O N E N T S A R E S T A N D A B D T Z E D I N I S O 1 2 1 9 . T H E S T A N D A R D C O M B T N E S H Y D R A U L I C A N D P N E U M A T I C C O M P O N E N T S .

Air Fittings & Tubing

H) 4/2.5 X M5 4/2.5 X R(PT)1/8 M-5HLH-4 M-5P For soft nylon and polyurethane tube R (PT) Dl P.2.1-52 6/4 X M5 6/4 X R(PT)1/8 1 8 Gasket M-01AU-6 P.2.1-49 M-5HLH-6 Material: PVC To seal M5 thread MS P.2.1-51 M-5G1 Hose nipple M-01H-4 Elbow 4/2.5 X R(PT)1/8 P.2.1-52 Tl For nylon, soft nylon and polyurethane tube M-5ALl-6 M-5ALHl-6 M-5HL-4, 6 M-5HLH-4, 6 Gasket (H) One-sided 90 elbow M5 female

Modular Design with Uniform Body Style

(Switch body only)]*3 NPN output, Wiring top entry ISE35-R-25-MLA-X523 [ISE35-R-25-M (Switch body only)]*3 Digital pressure switch PNP output, Wiring bottom entry ISE35-N-65-MLA-X523 [ISE35-N-65-M (Switch body only)]*3 PNP output, Wiring top entry ISE35-R-65-MLA-X523 [ISE35-R-65-M (Switch body only)]*3 Float type auto drain*4 N.C.

Table of Contents

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

SYJ300/500/700

connector (L) M plug connector (M) M8 connector (WO) P R P R P R 53 [55.2] 62.8 [65] 48 54.5 61.9 59.6 [66.6] Approx. 300 (Lead wire length) 35.5 53 M8 x 1 Approx. 300 (Lead wire length) 33.1 48.5 [55.5] Refer to page 4-4-61 for dimensions with connector cable.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(Value in the initial stage) 3 position exhaust center 3 position exhaust center (B) 2 (A) 4 (B) 2 (A) 4 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) 3 position prssure center 3 position prssure center (B) 2 (A) 4 (B) 2 (A) 4 Solenoid Specifications 1 (P) 3 (R) 5 (R) Grommet(G)/(H), L plug connector(L), M plug connector(M) 1 (P) 3 (R) Electrical entry 24, 12, 6, 5, 3 100, 110, 200, 220 DC AC50/60Hz Coil

SX

-L-01 M plug connector (M): SX3240(R)-M-01 Manual override (Press and turn for the locking type.)

LJ1H

of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 2 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

[ ] for AC VS L plug connector (L) M plug connector (M) 55.5 [62] 49 18.5 10.5 1 49 4-Rc (PT)1/8 18.5 (P/R port) 10.5 1 10.5 10.5 P R P R 53.4 57.4 [58.7] 20.5 20.5 38 38 67 25.5 25.5 4-Rc (PT)1/8 (P/R port) (Lead wire length) 66.6 [73.1] 300 (Lead wire length) 300 43.1 [ ] for AC Other dimensions are the same as the grommet.

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

Table of Contents

For EE (ZSE4E) 24 V 12 V 6 V 5 V 3 V 5 6 V S R Lead wire length 0.5 (2.9) m NPN output Analog output PNP output 27 26 67 Lead wire length 0.5 (2.9) m Lead wire length 0.5 (2.9) m Not required for Nil, vacuum adapter (GN) and vacuum pressure gauge (G).