5 to 100 , Mountings include: Through hole (standard), threaded, clevis, rod flange, head flange, and foot , Auto switch capable, 25MM NCQ2-Z NON-ROT AUTO-S, ACTUATOR, NCQ2-Z COMPACT CYLINDER, IL, 25MM NCQ2-Z NON-ROT AUTO-S, 0.39462 lb

5 to 100 , Mountings include: Through hole (standard), threaded, clevis, rod flange, head flange, and foot , Auto switch capable, 25MM NCQ2-Z NON-ROT AUTO-S, ACTUATOR, NCQ2-Z COMPACT CYLINDER, IL, 25MM NCQ2-Z NON-ROT AUTO-S, 0.39462 lb

5 to 100 , Mountings include: Through hole (standard), threaded, clevis, rod flange, head flange, and foot , Auto switch capable, 25MM NCQ2-Z NON-ROT AUTO-S, ACTUATOR, NCQ2-Z COMPACT CYLINDER, IL, 25MM NCQ2-Z NON-ROT AUTO-S, 0.39462 lb

5 to 100 , Mountings include: Through hole (standard), threaded, clevis, rod flange, head flange, and foot , Auto switch capable, 32MM NCQ2-Z NON-ROT AUTO-S, ACTUATOR, NCQ2-Z COMPACT CYLINDER, LL, 32MM NCQ2-Z NON-ROT AUTO-S, 2.25264 lb

, Auto switch capable, 40MM NCQ2-Z NON-ROT AUTO-S, ACTUATOR, NCQ2-Z COMPACT CYLINDER, ML, 40MM NCQ2-Z NON-ROT AUTO-S

Rc, NPT, G, Auto switch capable, 160MM NCQ2-Z DBL-ROD AUTO-S, ACTUATOR, NCQ2-Z COMPACT CYLINDER, VX, 160MM NCQ2-Z DBL-ROD AUTO-S, 26.67593 lb

Rc, NPT, G, Auto switch capable, 25MM NCQ2-Z DBL-ROD AUTO-S, ACTUATOR, NCQ2-Z COMPACT CYLINDER, IX, 25MM NCQ2-Z DBL-ROD AUTO-S, 2 lb

Rc, NPT, G, Auto switch capable, 20MM NCQ2-Z DBL-ROD AUTO-S, ACTUATOR, NCQ2-Z COMPACT CYLINDER, HX, 20MM NCQ2-Z DBL-ROD AUTO-S, 0.2706 lb

140, 160 , Standard stroke (mm): 10 through 300 , Through hole mount, Auto switch capable, 100MM NCQ2-Z DBL-ACT AUTO-S, ACTUATOR, NCQ2-Z COMPACT CYLINDER, SE, 100MM NCQ2-Z DBL-ACT AUTO-S, 5.016 lb

5 to 100 , Mountings include: Through hole (standard), threaded, clevis, rod flange, head flange, and foot , Auto switch capable, 63MM NCQ2-Z NON-ROT AUTO-S, ACTUATOR, NCQ2-Z COMPACT CYLINDER, PL, 63MM NCQ2-Z NON-ROT AUTO-S

Rc, NPT, G, Auto switch capable, 20MM NCQ2-Z DBL-ROD AUTO-S, ACTUATOR, NCQ2-Z COMPACT CYLINDER, HX, 20MM NCQ2-Z DBL-ROD AUTO-S, 0.39143 lb

Rc, NPT, G, Auto switch capable, 25MM NCQ2-Z DBL-ROD AUTO-S, ACTUATOR, NCQ2-Z COMPACT CYLINDER, IX, 25MM NCQ2-Z DBL-ROD AUTO-S, 2 lb

Compact Slide ø 6, ø 10, ø 16, ø 20 MXH Series

Compact Slide 6, 10, 16, 20 MXH Series RoHS MXH MXH How to Order MXS MXQ 10 M9BW MXH Z 60 MXQ MXF Made to Order Refer to page 20 for details. Compact Slide MXW Bore size Number of auto switches MXJ 6 mm 10 mm 16 mm 20 mm 6 10 16 20 Nil S 2 pcs. 1 pc. MXP MXY Auto switch MTS Without auto switch (Built-in magnet) Nil For applicable auto switch model, refer to the table below.

SY series valves have polarity when the electrical entry is a grommet or L/M plug connector with a surge voltage suppressor (option “S” or “Z”). The red lead wire is positive (+) and the black lead wire is negative (-). SY series plug-in type valves also have polarity when the type with a surge voltage suppressor (option “S,” “Z,” “NS,” or “NZ”) is selected.

EXxx-OMY0006CN

. *2) *1) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2.

XL-OMV0002

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 2 XL-OMV0002 1. 2. 3. 4., / 1 1.5 *3) *3)1 1 () 3 XL-OMV0002 1.1 A6063SUS316LSUS304 FKM XLC-80,XLC-100,XLC-160 :Y-VAC2 60 XLC-16,XLC-25,XLC-40 0.3MPa0.5MPa XLC-50,XLC-63,XLC-80,XLC-100,XLC-160 0.4MPa0.5MPa 245250Hz 30m/s (/H0 H4 H5) 4 XL-OMV0002 510 O 0.1mm0.2mm Assy O 5 P11 O 6 (P12P14) 5 XL-OMV0002 2.2

High Vacuum L Type Valve

Step 6 Bolt b 3 Tightening torque of bolt b Nm 1 2 Valve Tightening 4 size torque Handle assembly XLH-16 0.7 -25 1.5 -40 2.5 -50 6 Tightening torque of bolt a Nm Bolt a Valve Tightening size torque Body All sizes 0.3 Cover Heater Tighten Bolt b in numerical order to assemble the Body and the Handle assembly with the valve opened a little in numerical order.

AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Two Hand Control Valve

Two Hand Control Valve VR51 Series RoHS An output is available through synchronized, twohanded operation (within 0.5 s)!