Electro-Pneumatic Proportional Valve Series VEF/VEP

Repeatability 3% F .S. Sensitivity 0.5% F .S. Linearity 3% F .S. or less Lubrication Not required (Use turbine oil Class 1, ISO VG32, if lubricated.)

Digital Flow Switches

These vortexes are stable under certain conditions, and their frequency is proportional to the flow velocity, resulting the following formula. f = k x v f: Frequency of vortex v: Flow velocity k: Proportional constant (determined by the vortex generator's dimensions and shape). Therefore, the flow rate can be measured by detecting this frequency.

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Note 1) Equipped with unit switching function (Types without the unit switching function use SI units (kPa or MPa) only.) 22 62 30 70 Set pressure range Setting range Note 2) For ZSE40 (F)/ISE40-mNote 3) For ZSE40 (F)/ISE40-mNote 4) For ZSE40F (compound pressure) with "psi" indication, this is 0.03 to 0.04 psi.

VCB

OR-1860-120F F: FKM E: EPDM For VCB30 OR-2380-130F F: FKM E: EPDM For VCB40 OR-2600-180F F: FKM E: EPDM e When external leakage occurs after disassembling a valve, replace the above seals.

SZ3000

SZ3 60 LOZ Manual override E Nil D Non-locking push type A B C D Push & turn locking type, screw driver operated E F F A, B port size Type of valve actuation Rated voltage COM specifications Pilot system A B C 4 One-touch fitting 6 One-touch fitting M5 x 0.8 Mixed 2 position single solenoid 2 position double solenoid 3 position closed center 3 position exhaust center 3 position pressure

VCB

F: FKM E: EPDM For VCB30 OR-2380-130F F: FKM E: EPDM For VCB40 OR-2600-180F F: FKM E: EPDM If external leakage occurs after replacing the coil, replace the above seals. When the loosened clip is pulled out in direction using pinchers, etc., the coil can be removed and replaced in direction .

Adsorption Plate

Adsorption surface size 9 SP1130 SP1230 50 x 50 80 110 20 50 65 95 70 5 100 x 100 130 160 20 100 115 145 95 A D Rc 1/8 (Suction port) C F F B D G E E 8 x 5.5 drill Element fixing nut N pcs. 9.5 depth of counter bore 7 (mounting hole) A B C D E F G N Part no.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series RoHS Stainless steel Universal Elbow 1 AS-F Model TMH ASD Applicable tubing O.D.

Stroke Reading Cylinder and Counter

24 V F Black 0 V -X G Shield 649 CEP1 Series Construction 12, 20 !

CJ5-S

side GB F NN MM GA Piping port 2-M5 x 0.8 Cover surface Piping port M5 x 0.8 0 0.3 CEP1 BA CB D CE1 LH LB LY CE2 With head cover port in axial location (R) 0 0.3 LT BB NB A ML2B NA X Y LX LZ S + Stroke Z + Stroke H C J G5-S CV 2-LC Mounting hole MVGQ CC Bore size (mm) A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

QL 6 13.5 Prepared hole diameter 3.3 2 x M3 x 0.5 (Plug: M-3P) 170.05 6 (fitting seat surface dimension) M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port A 2 x M3 x 0.5 A 5 5.5 3.2 J 2.4 Z Section AA 3.5 depth 2 2.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL 11-/22-MXPJ6-10 4 x M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28 8 5 44 11-/22-MXPJ6-51

E-P HYREG

D B Valve size PVQ Sub-plate VEXD-5 VEXB-2-2 P (Port size: M5) VY1 VY1 Thread type Port size Symbol A B Port size M5 Symbol Nil F N T Thread type Rc G (7) VBA VBAT 1 8 AP100 NPT NPTF VYD-7 VEXB-4-1 Base gasket 2 4 Valve size VEX1-9-1 P VEX4-2AP Sub-plate Port size Thread type Port size Thread type Symbol A B Port size Symbol Nil F N T Thread type Rc G (7) Symbol A B C Port size Symbol Nil

High Vacuum Angle Valve

Bellows seal C Double acting Bellows seal F Single acting (N.C.)

Compact Cylinder with Air Cushion

Material: Chrome molybdenum steel (nickel plated) mm Bore size (mm) YA 03 B D E F M T1 T2 Part no.

CJ5-S

H C J G5-S CV 2-LC Mounting hole MVGQ CC Bore size (mm) A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 12 RB 16 15 18.3 20 20 5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8 M12 x 1.0 12.5 9.5 47 6 9 75 18.3 J D-X 20Data 10-14-7 8 Series CJ5-S Dimensions R V Rod side flange style (F):

RQ

D-X 100 Lateral load F (N) 2080 10 Data 63 50 Operating pressure 0.5 MPa Operating pressure 0.4 MPa 40 32 25 Graph (1) 1000 20 1 10 100 300 Stroke + Eccentric distance (mm) Cushion Needle Adjustment 100 100 Load weight kg Caution 80 63 50 1.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Vertical upward: Lifter Vertical downward: Press Horizontal: Chucking l l m m F m Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F Maximum speed (mm/s) Load center of gravity position l (mm) Maximum speed (mm/s) up to 300 up to 500 up to 700 up to 300 up to 500 up

CLQ

Bore size (mm) T1 T2 M F E D B Part no.

53

When this product is sold on the market in the EU after January 1, 2017, it needs to be compliant with the quota system of the F-Gas Regulation in the EU. Note 2) See specification table for refrigerant used in the product. 154-1 A

PF3A7xxH-L.eng

[F 2] 2 Press the button once to reduce the value by one digit, press and hold to continuously reduce. : Display set by customer [F 3] [FiL ] Select digital filter [ 1.0] 1 second Product number Suitable screws Tightening torque Thread depth [F 5] [FUnC] Select FUNC (switching analogue output 3/external input) [AoUt] Analogue output Align the master IO-Link version to the device.