2.0

Length 3 3 x 1 6 600 mm 10 1000 mm 3A 1/8" x 1/16" 4 4 x 2 4A 5/32" x 1/32" 6 6 x 4 6A 1/4" x 1/8" 100 mm Specifications Model LPV21 LPV22 Valve type N.C. N.O.

MH-OMY0004

&/(Best Pneumatics No.6) 2. 2-5. 1. 1 ()ISO VG32 (MSDS) 2-6. 1. 2. 3. 4. 1. () 2. 5 3. 4. 5 14 2-7. 1. 2. 3. 4. 5. 3. 3-1. 1. 2. 3. 4. 5. 6. 7. 15 3-2. 16 3-3. C 1C 2 3 :MH-G04(30g) C 17 3-4. C C 1. Assy 18 3. 4. 5. 6.

VFR3000 Series

Connect no.1 and no.2 terminals with corresponding power side. Caution Ground (2) (1) Ground Terminal No. Internal w iring 1 Sol. A side 2 Sol.

CG1

1 !2 !3 !4 !5 !6 !7 !8 !

VFR6000 Series

Piping Lubrication 1. Lubrication 1.

EX260-SPR-A_eng

Designation Description Byte 1 Offset 8 4 2 5 4 1 Unused 32 outputs type Bit: 7 0 Byte 2 Offset 2 RXD/TXD-N Receive/transmit data, negative 1 3 Unused Bit: 7 0 Byte 3 Offset RXD/TXD-P Receive/transmit data, positive 4 7 Safety Instructions 5 Unused 2 0 0 0 6 4 6 4 Bit No.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported

ASx-OMT0060

Table 1 (2) Maintenance space Thread size Chamfered port size D (Recommended value) When installing the products, allow access for Rc NPT maintenance. 1/8 10.2 to 10.4 10.5 to 10.7 1/4 13.6 to 13.8 14.1 to 14.3 3/8 17.1 to 17.3 17.4 to 17.6 1/2 21.4 to 21.6 21.7 to 21.9 5 - Caution (5) Make sure that the push-lock handle is Mounting Mounting (1) There is a stopper for full close/open turn

VZA2000

VZA4341-1-01 VZA4341-1-02 VZA4341-2-01 VZA4341-2-02 VZA4441-1-01 VZA4441-1-02 VZA4441-2-01 VZA4441-2-02 0.44 0.44 0.44 0.44 0.25 0.25 0.25 0.25 1.7 1.7 1.7 1.7 0.49 0.49 0.47 0.47 0.14 0.14 0.15 0.15 2.0 2.0 1.9 1.9 Body ported Base mounted (With sub-plate) 2 position M5 x 0.8 Body side 1/8 3 position 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 0.54 0.19 0.56 0.23 2.4

AME

AME150 AME250 AME350 AME450 AME550 AME650 AME850 Model Note) 200 500 1000 2000 3500 6000 12000 Rated flow (l/min (ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

XMA/XYA Series

Note4) Figures in ( ) indicates the weight of CF , conflate fittings. 7 XM-OMP0001-A 4. Construction / Dimensions 4-1.

Pneumatic Purification

/4 115/1/60 1 NPT 232 R134a 17.7 21.3 19.9 3.3 8.3 82 PDE30-S 137 4.4 5.7 1 230/1/60 1 NPT 174 R134a 21.3 26.4 25 3.1 10.2 126 PDE40-S 137 5.1 6.5 1 1/4 230/1/60 1 1/4 NPT 174 R134a 23.2 32.3 31.7 3.5 11.4 168 PDE50-S 168 6.3 8.2 1 1/2 230/1/60 1 1/2 NPT 174 R134a 23.2 32.3 31.7 3.5 11.4 207 PDE60-S 200 7.2 10.4 1 3/4 230/1/60 2 NPT 174 R134a 23.2 32.3 31.7 3.5 11.4 227 PDE75-S 235 7.5 10.7

Process Pump <Fluororesin Type> Series PA3000

1/4 thread G 1/4 thread NPT 1/4 thread NPTF 1/4 thread Rc 1/4 thread G 1/4 thread NPT 1/4 thread NPTF 1/4 thread 0 3 PA331n (Standard assembly) PAP331n (Clean-room assembly) Automatically operated type Air pilot actuation type P11N* P11T* PAP331n (Clean-room assembly) P13 P13F* P13N* P13T* Port sizes marked "*" are optional.

ML1C

4 $7 $6 y %0 %1 CLS CLQ #3 #2 !8 @0 @2 @1 @7 RLQ @3 r MLU o #5 !6 $3 $4 MLGP Component Parts Component Parts Material No.

VFA3000

Body ported single solenoid VFA3122 F 02 Foot bracket Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size W/o sub-plate (Pilot port: Rc) VFA3 1 5 0 For 50 type manifold Nil Thread type for pilot port W/o sub-plate (Pilot port: Other than Rc) 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil Rc G NPT NPTF 00F 00N 00T Function

Precision Regulator

(Note 4) One type only. Suffix R: Bracket, Name plate, Mounting on the opposite side Note1) Type of setting 1 : Air operated Port size 02 : 1/4 Note4) Accessories NIL: None B: Bracket (P36202028) G: Pressure gauge Note2) Note3) Thread type when Rc and G. Thread type when NPT. IR2120 : G43-10-01 G43-P10-N01-X30 2 : 0.010.8MPa Set pressure Thread type NIL:Rc F:G N:NPT 4.

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

Note) Metric size 23 04 06 08 10 12 Inch size 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Made to Order (For details, refer to page 622.)

PAB-OM-O003

Actuation P07 Rc 1/8 P07N NPT 1/8 With 1/4" tubing 3 Air operated P07F G 1/8 With nut 1S07 LQ1 size 2 with Rc 1/8 1S07N NPT 1/8 nuts 1S07F G 1/8 Connection method 3S07 LQ3 size 2 with Rc 1/8 Symbol Connection method 3S07N NPT 1/8 nuts S With nutNote 3S07F G 1/8 Note) The nut is a space saving type. 13 8.

Refrigerated Air Dryer

IDFA IDFA Improved corrosion resistance with the use of stainless steel, plate type heat exchanger (IDFA4E to 75E, 100F to 150F) Rc 3/4 IDFB 35C 0.7 MPa Rc 1 R 1 R 1 1/2 IDH ID R 2 IDG IDK AMG AFF AM AMD AMH AME Large size/IDFAF Series AMF Power supply voltage: Three-phase 380 VAC (50Hz) Three-phase 400 VAC (50Hz) For Asia and Oceania ZFC For Europe SF Tolerant of high temperature environment

HAW

1 2 1 1 2 2 3 1 1 1 1 1 1 4 267.3 18