Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?

Magnetically Coupled Rodless Cylinder Slider Type: Ball Bushing Bearing CY1L Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40

Port thread type With shock absorber (With plate A) Installed on side A at time of shipment. Bore size 6, 10, 15 Type M thread Rc NPT G Symbol BS Nil Shock Absorbers 20, 25, 32, 40 TN TF Type Bore size (mm) 25 32, 40 10, 15 20 6 Standard (shock absorber RB series) Magnetic holding force Refer to page 1517 for specifications.

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked