The SQ plug lead units are available with D-sub connector, flat ribbon cable connector or PC wiring system compatible flat ribbon cable kits.SQ2000, plug-in type manifold , D-sub connector kit , Maximum stations as standard-12 , 25 pin connector, MFLD, PLUG-IN, SQ2000, VALVE, SS5Q2 MANIFOLD SQ2000, 2N, SS5Q2 NO SIZE RATING, 1.76369 lb

The SQ plug lead units are available with D-sub connector, flat ribbon cable connector or PC wiring system compatible flat ribbon cable kits.SQ2000, plug-in type manifold , D-sub connector kit , Maximum stations as standard-12 , 25 pin connector, MFLD, PLUG-IN, SQ2000, VALVE, SS5Q2 MANIFOLD SQ2000, 2N, SS5Q2 NO SIZE RATING, 1.98416 lb

The SQ plug lead units are available with D-sub connector, flat ribbon cable connector or PC wiring system compatible flat ribbon cable kits.SQ2000, plug-in type manifold , D-sub connector kit , Maximum stations as standard-12 , 25 pin connector, MFLD, PLUG-IN, SQ2000, VALVE, SS5Q2 MANIFOLD SQ2000, 2N, SS5Q2 NO SIZE RATING, 13.44819 lb

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Top ported, Options: external pilot, built-in silencer, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MFLD, BASE MT, DIN RAIL MT, VALVE, SS5Y3 MANIFOLD SY3000, UM, SS5Y3 BUILT IN FITTING

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Top ported, Options: external pilot, built-in silencer, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MFLD, BASE MT, DIN RAIL MT, VALVE, SS5Y3 MANIFOLD SY3000, UM, SS5Y3 BUILT IN FITTING

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Side ported, Available with external pilot, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MFLD, BASE MT, DIN RAIL MT, VALVE, SS5Y3 MANIFOLD SY3000, UM, SS5Y3 BUILT IN FITTING

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base , Top ported , Options: external pilot, built-in silencer , Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring , One-touch fittings, MFLD ASSY, 12-STA, VALVE, SS5Y5 MANIFOLD SY5000, UM, SS5Y5 BUILT IN FITTING

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base , Top ported , Options: external pilot, built-in silencer , Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring , One-touch fittings, MFLD ASSY, 12-STA, VALVE, SS5Y5 MANIFOLD SY5000, UM, SS5Y5 BUILT IN FITTING

For VQC4000 base mount, plug-in valves, Conforms to IP40, D-sub connector reduces labor while minimizing wiring and saving space, 25 pin D-sub connector that conforms to MIL standards, 1 to 12 stations available as standard, MFLD, W/D-SUB CONNECTOR, VALVE, VV5QC41 MANIFOLD VQC 5-PORT, 1N, VV5QC41 OTHER SIZE RATING, 12.78681 lb

For VQC4000 base mount, plug-in valves, Conforms to IP40, D-sub connector reduces labor while minimizing wiring and saving space, 25 pin D-sub connector that conforms to MIL standards, 1 to 12 stations available as standard, MFLD, PLUG-IN, D-SUB CONNECTOR, VALVE, VV5QC41 MANIFOLD VQC 5-PORT, QN, VV5QC41 BASE MNT 3/8, 13.70600 lb

For VQC4000 base mount, plug-in valves, Conforms to IP40, D-sub connector reduces labor while minimizing wiring and saving space, 25 pin D-sub connector that conforms to MIL standards, 1 to 12 stations available as standard, MFLD, PLUG-IN, D-SUB CONNECTOR, VALVE, VV5QC41 MANIFOLD VQC 5-PORT, PN, VV5QC41 BASE MNT 1/4, 17.30958 lb

For VQC4000 base mount, plug-in valves, Conforms to IP40, D-sub connector reduces labor while minimizing wiring and saving space, 25 pin D-sub connector that conforms to MIL standards, 1 to 12 stations available as standard, MFLD, PLUG-IN, D-SUB CONNECTOR, VALVE, VV5QC41 MANIFOLD VQC 5-PORT, PN, VV5QC41 BASE MNT 1/4, 17.64249 lb

NARM Series

A 1.18 (30) 1.61 (41) B 1.34 (34) 1.57 (40) C D E F G 136314 2.76 (70) 2.97 (75.5) .21 (5.4) .26 (6.5) .61 (15.4) .31 (8) 2.17 (55) 2.09 (53) .09 (2.3) .09 (2.3) NARM2500 43.5 136414 NARM3000 30 15 Precautions 0 35.3 70.6 106 Be sure to read before handling.

VER2000/4000

VS7-8-FG-D-3M 1 pc. (Third station of manifold where 1 piece of VS7-8-FG-D-3M is added to the basic unit of VER2000-A and VS7-8-FG-S-3N.) Dimensions IC PVQ VEF VEP DXT334-X72-04R-04U VER Mounting section (For M8) L side VEA VY2 VBA VBAT U side D side AP100 1 2 2 x Rc Exhaust port R side Rc 1/2 supply port (L side) 2 x Rc 1/2, Output port 709

Electric Actuator/Rod Type LEY16, 25, 32 Series LEY Step Motor (Servo/24 VDC) Servo Motor (24 VDC)

3 Controller mounting Nil D Screw mounting DIN rail mounting1, 2 1. Only available for the controller types 6N and 6P. 2. DIN rail is not included. Order it separately.

Thermo-chiller Series HRZ Fluorinated Fluid Type

Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.) Mass Note 10) (kg) Safety standards 170 175 275 145 170 UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation. Note 2) FluorinertTM is a trademark of 3M and GALDEN is a registered trademark of Solvay Solexis, Inc.

Intrinsically Safe Valve 5 Port Solenoid Valve Single Unit Body Ported Series 53-SY5000/7000/9000 Electrical Entry TT Hazardous Location Class I, II, III Division 1 Groups A, B, C, D, E, F, G Electrical Entry L and LL Hazardous Location Class I Division 1

Intrinsically Safe Valve 5 Port Solenoid Valve Series 53-SY5000/7000/9000 Body Ported Electrical Entry L and LL Hazardous Location Class I Division 1 Groups A, B, C, D Electrical Entry TT Hazardous Location Class I, II, III Division 1 Groups A, B, C, D, E, F, G Single Unit Warning Do not install in Zone 0 (as defined in IEC 60079-10-1: 2008) or Zone 20 (as defined in IEC 60079-10-2: 2009)

EX510

Accessory Dimensions 25.7 64 16 54 0.2 5 70 0.2 5 PWR (V) 40 BUS PWR 80 OUTPUT INPUT Cover view 2 x M4 Mounting hole OUTPUT INPUT COM D 60 COM C COM B COM A 1702

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

9 pin) and Contact input/output (D-sub 25 pin) Dimensions Note 9) W15 in (380mm) x D26.2 in (665mm) x H33.9 in (860 mm) Weight Note 10) Approx. 220 lbs (100 kg) Approx. 198 lbs (90 kg) Safety standards UL, CE marking, SEMI (S2-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/ Rod Type Dust-tight/Water-jet-proof (IP65 Equivalent) LEY-X5 (Made to Order) Series LEY25, 32

How to Order 6N 1 1 D B 25 50 LEY X5 R o Made to Order: Dust-tight/ Water-jet-proof q w e r t y u i !0 !1 !2 !