MXU

The auto switch could activate unintentionally if a shield plate is not used. 20Data Table (1) L d Bore size (mm) MXU6 MXU10 MXU16 21 5 25 5 35 10 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted. For detailed specifications, refer to page 8-30-1.

17

4 #0 Component Parts Description Material Note No. 1 2 3 4 5 6 7 8 9 10 11 12 13 16 21 22 Description Material Note No. 23 24 25 26 27 29 Cylinder tube Head cover Cushion boss Piston yoke Piston End cover Wear ring Head plate Cushion needle Stopper Belt separator Guide roller Parallel pin Belt clamp Bearing Spacer Spring pin Seal magnet Aluminum alloy Aluminum alloy Polyacetal Aluminum alloy

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

C2SiH8 Nitric Oxide Perfluoro-butadiene NO C4F6 Phosphorous Pentafluoride Octafluorocyclopentene PF5 C5F8 Phosphine Halocarbon 12B2 PH3 CBr2F2 Sulfur Tetrafluoride Trimethylsilane SF4 (CH3)3SiH Sulfur Hexafluoride Methyl Chloride SF6 CH3Cl Disilane Methyl Fluoride Si2H6 CH3F Silicon Tetrachloride Methanol SiCl4 CH3OH Silicon Tetrafluoride Methylsilane SiF4 CH3SiH3 Dichlorosilane Halocarbon 21

Clean Regulator

If the wrench is applied on any other part, air leakage or other damage may occur. 862 Clean Regulator SRH Series Brackets For SRH3000 For SRH4000 Model B21-1-T1 1350112-T1 ARJ Material Rolled sheet steel (Electroless nickel plated) AR425 to 935 30 ARX 36 61 51 AMR 31 37 8.5 ARM Dimensions 10 ARP 21 20 28 6.5 8 IR-A 13.5 30 50 28 41 2.3 1.6 IR IRV VEX SRH SRH SRP SRF ITV IC ITVH ITVX PVQ

DOT/J844 Nylon Tubing

Green Gray Tan Symbol B R G BU W Y YR N S PU BR GD GR T S S S S S S S S S S = Standard, all other length color combinations are available by special order Tube Sizes 1/8 5/32 3/16 1/4 5/16 3/8 1/2 5/8 3/4 21

Related Products: Holder Series TMH 1

Body size AS1001F AS2001F AS2051F AS3001F AS4001F TMH-01J TMH-03J TMH-05 TMH-07 TMH-09 TMH-11 TMH-13 Dimensions Model through D2 D1 H1 H2 H3 H4 H5 L1 L2 L3 Symbol Metric size Inch size TMH-23J TMH-04J TMH-01J TMH-03J TMH-05 1/8J 1/32J 3/16 6 1/4 8 5/16 10 3/8 12 1/2 8.4 9.3 11.7 11.6 13.1 13.5 15.5 18.8 18.2 21.2 22 3.3 4.5 4.6 7.5 6 12 7.2 6.6 18 3.3 6.3 6.4 9.3 7.7 15.4 8.5 8.3 21 TMH-06J

Related Products: Multi-tube Holder TM Series

(mm) Mounting screw P L1 H2 D W1 L2 H1 W2 W3 Model (Nominal x Length) 6 4 TM-04 TM-06 TM-08 TM-10 TM-12 6 3.25 72.5 4.5 5.5 6 6.5 6.5 10 5 7.5 7.5 8 12 12 8 10 11 12 12 17 21 23 25 25 2.2 2.8 2.8 3.2 3.2 2 x 6 4.5 91.5 9.5 5.5 77.5 6 12.5 7.5 77.5 6 15 9 93 6.5 2.6 x 8 2.6 x 8 3 x 8 3 x 8 12 10 8 16.3 8.8 14.3 7.5 12 9.8 How to Use Caution 1.

Polyurethane Tubing TU/TIUB Series

KS KX Tubing size Metric size (TU series) Inch size (TIUB series) KM TU0212 TU0425 TU0604 TU0805 TU1065 TU1208 TU1610 TIUB01 TIUB05 TIUB07 TIUB11 TIUB13 Model Additional 21 new colors. Tubing O.D. (mm) 2 4 6 8 10 12 16 3.18 4.76 6.35 9.53 12.7 KF Tubing I.D. (mm) 1.2 2.5 4 5 6.5 8 10 2 3.18 4.23 6.35 8.46 Max.

VCHR

7 20 Hexagon socket head cap screw Carbon steel t 21 Hexagon nut Carbon steel @1 22 Hexagon bolt Carbon steel y 23 Spring washer Carbon steel 24 O-ring !

GA342

Change of fluid passage Caution Port size 12(PA) 23(AR) 21(AP) 32(RA) 1/2 3/4 M4 x 0.7 Port size Effective area (mm2) 12(PA) 23(AR) 1 N.C. N.O. Dimensions Please note that the pressure in the valve should be exahusted when changing the fluid passage. Loosen the hexagon socket head cap screw M4 x 0.7.

Thermo-con

CORPORATION 4-14-1,Sotokannda,Chiyoda-ku, Tokyo 101-0021,Japan HEC 13.7 (347) 11.8 (300) 10.6 (270) MADE IN JAPAN 11.1 (281) 6.2 (157) H OUT Air Air 3.8 (97) 1.2 (30) L 10.6 (270) IN DRAIN 12.6 (321) 0.5 (12) Circulating fluid drain port (with plug) Rc1/4 14.3 (364) Circulating fluid level gauge Foot (Accessory) Filter cover Circulating fluid inlet Rc1/4 Filter 6.0 (152) 1.1 (29) 14.1 (358) 0.8 (21

AP500

Delivery pressure (MPa) Delivery pressure (psig) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 5 0.03 0 0.00 0 10 20 30 40 50 60 70 80 Flow Rate (slpm, N2) A Connections AP501A Input pressure : 2 psig (14 kPa) inch (mm) FV4 MV4 TW4 760 0 2.78 (70.6) 700 -8 2.12 (53.8) Delivery pressure (mmHg abs) Derivery pressure (kPa) 600 -21

฀AS

FlowRateandEffectiveArea FlowDirection SymbolonBody AS1002F 3.2,4,6 1/8",5/32" 1/4" 100 1.5 AS2002F 4 AS3002F AS2052F AS4002F 12 Series Metricsize 6 2 8 1/4" 5/16" 460 7 8 6 6 10 10,12 JISsymbol Inchsize TubeO.D. 5/16" 1/4" 5/32" 3/8" 1/4" 3/8" 1/2" Flowrate(l/min(ANR)) 230 3.5 20 0.3 290 4.5 130 2 920 14 660 10 390 6 920 14 1390 21 Controlledflow (Freeflow) Effectivearea(mm2) Note)Flowratevaluesaremeasuredat0.5MPaand20C

P

AS2000-N02-X800 NPT1/4 12 50 26 20 62 58 21 170 AS3000-N03-X800 NPT3/8 12 60 26 17 71 64 24 250 AS4000-N04-X800 NPT1/2 17 81 36 22 92 83 30 480 Note) Reference dimensions

Series VQ1000 10- Base Mounted 21- Plug-in Unit

(Except double wiring) With name plate External pilot 1 station 01 Copper/Fluorine/Silicone free + Low particle generation 21 Kit type The number of max. stations differs from kit to kit. (Refer to the table below.) Note 1) When two or more symbols are specified, indicate them alphabetically.

Low-Speed Compact Rotary Actuator Rack & Pinion Type CRQ2X Series Size: 10, 15, 20, 30, 40

IC circuit A96 A96V 5 V Yes 24 V Grommet A93V2 A93 A90 100 V Relay, PLC 2-wire 12 V A90V No IC circuit 100 V or less 1Although it is possible to mount water resistant type auto switches, note that the rotary actuator itself is not of water resistant construction. 21 m type lead wire is only applicable to D-A93.

Magnetically Coupled Rodless Cylinder: Low Profile Guide Type ø 10, ø 15, ø 25 CY1F Series

Consult with SMC regarding water resistant types with the above model numbers. 21 m type lead wire is only applicable to D-A93. DLead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ For details about auto switches with pre-wired connector, refer to pages 1648 and 1649.

G15/G27

G27 21 (Width across flats) How to Order G 10 01 15 Option Connection thread Symbol Specifications Size R 1/8: M5 (Female thread) R 1/16 Symbol Pressure gauge 01 (1) Nil X30 Both MPa and psi R1 (2) X201 M5 (Female thread) only Size Note 1) Both R1/8 and M5 (female thread) in case of G15 type Note 2) Compatible with G27 type only Note 1) X3 (Wetted parts SUS) specifications are not available

21- AF-A 10- Series Air Filter

Clean series 10 AF 03 A 30 F J B 21 AF 03 A 30 F J B Copper, fluorine and silicone-free + Low particle generation q w e r t Air filter Option/Semi-standard:Selectoneeachfora to e. Option/Semi-standardsymbol:Whenmorethanonespecificationisrequired,indicateinalphanumericorder.

Series 10-SZ3000 5 Port Solenoid Valve Plug-in Type [Option]

Downward) B Valve stations F: D-sub connector P: Flat ribbon cable connector (26 pins) Note Note Stations Stations Symbol Symbol 02 02 2 stations 2 stations Double wiring Note 1) Double wiring Connector mounting position 10 11 10 stations 11 stations Symbol Mounting position 02 02 2 stations 2 stations D D side Specified layout (Up to 22 solenoids possible) Specified layout Note 2) (Up to 21