Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF 1.3 1.3 ASV220F-U10/32 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

Speed Controller: Standard Type In-line Push Locking Type AS Series

dm3/(sbar) 2.3 Critical pressure ratio 0.35 Flow rate (L/min (ANR)) 810 Controlled flow Sonic conductance dm3/(sbar) 2.3 Critical pressure ratio 0.2 How to Order 02 AS3500 Thread type Rc NPT G Material for handle Resin Metal Nil 2 Nil N F Port size 1/4 3/8 02 03 Metal handle Resin handle Needle Valve/ Flow Rate Characteristics Note) The flow rate characteristics are representative values

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 646 B

Soft start up valve with lock out

Large effective area Low power consumption AVL2000-*02 1/4 67 111 31 55 40 64 (Max. 73) Manual/Manual solenoid lock out Modular design AVL2000-*02-*DZM 1/4 67 20.5 111 31 55 34 40 64 (Max. 73) AVL3000-*03 3/8 76 118 36 57 48 64 (Max. 73) How to Order AVL3000-*03-*DZM 3/8 76 12.5 118 36 57 34 48 64 (Max. 73) AVL4000-*04 1/2 98 133 47 61 52 64 (Max. 73) G 20 00 F DZM R 5 02 AVL AVL4000

VCC

Cleaning valve (2 port valve): 5 pcs. + Gate valve: 1 pc. 2 port valve mountable number Pilot port fitting size 4 One-touch fitting (Antistatic) 6 One-touch fitting (Antistatic) C4 C6 3 port valve mountable number 00 02 04 No 2 port valves used 2 pcs. (colors) 4 pcs. (colors) 00 02 04 No 3 port valves used 2 pcs. (colors) 4 pcs.

Electro-Pneumatic Proportional Valve Series VEF/VEP

03 13 9 5 Symbol 2 1/4 Nil 02 03 0.05 to 0.65MPa 1 3/8 2 1/4 0.1 to 0.9MPa 2 2 02 03 04 03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2(A) 1/4 3 3/8 2(A) 2(A) 1(P) 3(R) 1(P) 3(R) 03 04 06 25 3/8 1/2 3/4 1 4 Note) Does not conform

VXA21/22

Model VXA212 VXA213 VXA21 VXA22 VX070-020 LQ 1 8 1 4 1 4 3 8 1 2 01 ( / ) 02 ( / ) 02 ( / ) 03 ( / ) 04 ( / ) VXA223 VXA224 VXA225 VXA226 VX070-022 LVN VX070-029 TI/ TIL PA Ordering example (Example) Series VXA21, Orifice size 4.5 mm, Normally closed, Rc 1/4 (Part no.) VXA2130-02 PAX PB 17-3-95

E-P HYREG ® VY1 Series

00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12 14 20 Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Base mounted Symbol 2 1 8 1 4 Internal pilot VY1D0 (5) Without sub-plate 1 4 4 3 8 1 2 (3) (3) A M5 3(R) 1 8 2(A) 1(P) (3) (3) 1 1 4 1 4 3 8 3 External pilot 1 2 Body ported 1 2 5 3 4 P1 1 1 VY1B0 (5) 7 1 1 4 1 4 1 1 2 1 3(R) 2(A) 1(P) 9 2 2 Note 3) Only bracket or foot

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Note 3) Polyurethane is only applicable for the ZFC050-02. SP Made to Order (Refer to page 1115 for details.)

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in10R 1/4AS3201FG-02-10AS3211FG-02-10AS3301FG-02-10AS3311FG-02-10

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in4R 1/4-02-04AS2211FG-02-04-02-04-02-04

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in6R 1/4-02-06AS2211FG-02-06-02-06-02-06

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in8R 1/4AS3201FG-02-08AS3211FG-02-08AS3301FG-02-08AS3311FG-02-08

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in12R 1/4AS3201FG-02-12AS3211FG-02-12AS3301FG-02-12AS3311FG-02-12

Precision Regulator

Marking on product Product name plate IR2120 IR2120 IR2120 IR2120-02 02 02 02BG BG BG BG *** *** *** ***-*** *** *** *** Product number MAX.SUP.PRESS. MAX.SUP.PRESS. MAX.SUP.PRESS. MAX.SUP.PRESS. 1.0 1.0 1.0 1.0 MPa MPa MPa MPa Product code INPUT INPUT INPUT INPUT PRESS. PRESS. PRESS. PRESS. 0.01 0.01 0.01 0.01 0.8MPa 0.8MPa 0.8MPa 0.8MPa OUTPUT PRESS. OUTPUT PRESS. OUTPUT PRESS.

Quick Exhaust Valve Series AQ

Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Mass (g) Model IN OUT OUT EXH AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 M5 x 0.8 2 2.8 25 1 8 4 5.8 45 1 8 25 25 110 1 4 35 40 105 1 4 40 42 215 8 3 60 70 205 1 2 105 115 690 3 4

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

S Couplers Series KK/KK13

/I.D. mm 8/5 9/6 10/6.5 12/8 12.5/8.5 16/11 Symbol 01 02 03 04 06 Symbol 50 60 65 80 85 110 Symbol 04 06 08 10 12 16 Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Tubing O.D. mm 4 6 8 10 12 16 Construction Description Material Plug Description Material Socket Note Note Electroless nickel plated No. 1 14 15 No. 1 2 3 4 5 6 7

Rotary One-touch Fittings Manifold Series KM

F(mm) Port B min. port size Weight (g) L1 L2 L3 L4 L5 L6 P Q1 Q2 M KM12-04-02-6 6 17 89 110 99 125 108 139 40 67 75 84 96 100 117 1 4 4 10 18 29.5 19.5 29 10.6 16 6 12 KM12-04-02-10 10 KM12-06-02-6 6 KM12-06-02-10 10 KM12-08-03-6 6 KM12-08-03-10 10 61.5 47 1 4 6 17 10 19.5 31.5 21.5 31 13 17 7.5 13.5 73 55 3 8 8 19 11.5 22.5 35.5 24 34.5 15.5 18.5 9 14.7 86 63 Series KM One-touch Fittings

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

22 L For positive pressure ZSE50 02 M F L 22 For compound pressure Piping specifications Option 02 T2 G2 R 1/4 (M5 with female screw), Piping in backward direction Nil None NPT 1/4 (M5 with female screw), Piping in backward direction Bracket A G 1/4 (M5 with female screw), Piping in backward direction Optional A Input/output specifications 22 30 62 NPN open collector 2 output + Analog output