BP1000 Welded Connection Series Back Pressure Regulator for Ultra High Purity Series BP1000 For UHP gas delivery Operating pressure: 0.5 to 300 psig (0.0034 to 2.1 MPa) Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e BP10 01 2PW FV4 FV4 S Bonnet option Operating pressure Code Bonnet Standard Panel Installation 3) Code
Series VS3115/3110 Manifold Specifications Specifications Manifold type Max. number of stations B mount 10 stations Port location/Port size P A E P A E Port direction Applicable valve model Exhaust type Side Side Side Side Bottom Side VS3114-00 Base Base Base Common 1 4 3 8 3 8 Accessory AXT338-17A Blanking plate (With gaskets and screw) How to order manifold VVS31 1 0 05 Thread type EXH
Series VXA31/32 Dimensions P port Bracket Pilot port J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J L 29 32 M 14.5 17 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104 The VX series will be revised shortly.
L G ZA F H K J ZX I B C E D A ZR ZM 2 x M3 countersunk head screw mounting hole ZMA ZQ ZH ZU ZFC10, 20 ZL Applicable tubing O.D.
Note 1) Note 2) Max. vacuum pressure Manual override S L 84 kPa 53 kPa Nil D E Non-locking push type Push-turn locking slotted type Push-turn locking lever type Nozzle diameter 07 10 0.7 mm 1.0 mm 1082 Ejector Valve Unit Series ZYY/ZYX How to Order Ejector Valves for ZYX3000 ZA Lead wire/ Voltage suppressor specifications ZX Plug-in type Serial transmission type LOZ ZR LOZ 10 X3 ZY 5 M Z
Description Body Note Baking finish Material q Aluminum alloy w w Aluminum alloy Baking finish Housing e Aluminum alloy Baking finish Drain guard y r Foam rubber Float IN t Stainless steel + Rubber Pilot valve y Resin Lever u Brass Flushing button t i Orifice r o Rubber Diaphragm Replacement Parts 10-1 e No. Description Part no. ADH-D400 Note 10-2 !
Refer to dimensions on pages 14-20-40 to 14-20-41 for details. w e Sight glass Tempered glass AM850 is aluminum casted. Replacement Parts AME450 Model No.
M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMG850 1 2 13 42 348 220 57.5 220 10 14-20-7
M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 1 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMH850 1 2 13 42 348 220 57.5 220 10 Please refer to Made to Order Specifications of Series AMH on pages 14-20-55 to 14-20-57. 14-20-35
Description Housing Outside tube Body Flower fin tube assembly Material Note SGP, SS400 STK FC200 C1220T Flower fin Flower fin q w e r q w e r Water chamber cover FC200 t AFF AM Replacement Parts Replacement Parts Misc. HAW22 HAW55 HAW75 HAW37 HAW110 No. Description HAW2 HAW7 Material No.
id=VEX3-E" target="_blank">VEX3□□□ series valves 3-port 3-position valves
・With a neutral (closed) position (double solenoid or double pilot)・An air operated type and an external pilot solenoid type are available with an operating pressure range of -101 kPa to 1.0 MPa.
type=GUIDE&id=VFS-E" target="_blank">here.
And the VQ4000 series catalog can be found here.
Also consider VFR3000, SY9□40, and SY7□40 series valves with a rubber seal. (Pay attention to the pressure range and flow characteristics.)
For the IDF□□E and IDU□E series option “T,” remote control (operation start/stop) cannot be performed by turning an external switch ON/OFF.
The operation and error signals from the option “T” terminal block are output signals.
It is not possible to wire an input signal.