ModelFlow-rate characteristicsOperating pessure rangeNote)Weight(g) C [dm3/(s?bar)]bCvq Used with vacuum (Pa?abs)w Used with pressure (MPa?G)31/4, 3/85VX2341.960.550.750.1 to atmospheric pressure0 to 1.0580
ModelFlow-rate characteristicsOperating pessure rangeNote)Weight(g) C [dm3/(s?bar)]bCvq Used with vacuum (Pa?abs)w Used with pressure (MPa?G)21/4, 3/84VX2241.900.520.620.1 to atmospheric pressure0 to 1.0460
ModelFlow-rate characteristicsOperating pessure rangeNote)Weight(g) C [dm3/(s?bar)]bCvq Used with vacuum (Pa?abs)w Used with pressure (MPa?G)21/4, 3/84VX2241.900.520.620.1 to atmospheric pressure0 to 1.0460
ModelFlow-rate characteristicsOperating pessure rangeNote)Weight(g) C [dm3/(s?bar)]bCvq Used with vacuum (Pa?abs)w Used with pressure (MPa?G)31/4, 3/85VX2341.960.550.750.1 to atmospheric pressure0 to 1.0580
ModelFlow-rate characteristicsMaximum operating pressure differential (MPa)Note)Weight(g) C [dm3/(s?bar)]bCv21/4, 3/84VX2201.900.520.621.0340
ModelFlow-rate characteristicsMaximum operating pressure differential (MPa)Note)Weight(g) C [dm3/(s?bar)]bCv21/4, 3/84VX2201.900.520.621.0340
ModelFlow-rate characteristicsOperating pessure rangeNote)Weight(g) C [dm3/(s?bar)]bCvq Used with vacuum (Pa?abs)w Used with pressure (MPa?G)31/4, 3/85VX2341.960.550.750.1 to atmospheric pressure0 to 1.0580
(convertible) , Threads: Rc, NPT, NPTF, G, VALVE, AIR PILOT, VALVE, VP3/5/7 SOL VALVE 3-PORT, FA, VP3/5/7 BODY PT 1/4, .34149 lb, ModelPort size1 2 (P A)2 3 (A R)Weight (g) Note) C [dm3/(s?bar)]bCvC [dm3/(s?bar)]bCvVPA3421/83.50.260.83.60.260.9118
Fluid: Air/inert gas , Operating pressure range: 0MPa/10Torr (Vacuum) - 0.7MPa (7.1kgf/cm 2 ) , Effective area (Cv factor): Standard type 0.9mm 2 (0.05); high flow type 1.5mm 2 (0.08) , Coil rated voltage: 12, 24VDC , Response time: ON: 4ms; OFF: 2ms , Ambient/fluid temp: -10 to 50°C, VALVE, BASE MOUNT, CLEAN ROOM, 4/5 PORT SOLENOID VALVE