Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Light weight & compact Series XMA with KF(NW) flange Model Weight kg A mm B mm Conductance l/s XMA-16 5 0.33 40 103 XMA-25 XMA-40 XMA-50 14 0.61 50 113 B 45 1.40 65 158 80 2.00 70 170 A 160 XMA-63 XMA-80 3.60 196 88 200 6.20 90 235 : Common to all series.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(increment of 0.1 s), 1 to 10 s (increment of 1 s), 20 s, 30 s, 40 s, 50 s, or 60 s.

VQC

B 16 SOL. A 4 Station 6 SOL. B DIN rail mounting bracket [-D] VVQ1000-57A for {F, L, M, P, S (EX500) kit} VVQC1000-57A-S for {S (EX250) kit} VVQC1000-57A-T for {T, S (EX126) kit} 17 SOL. A 5 Station 7 SOL. B 18 SOL. A 6 Station 8 SOL.

Series KDM Rectangular Multi-connector

Model . o N t r a P h c n I . o N t r a P c i r t e M e b u T . D . O f o r o l o C e s a e l e r n o t t u b f o r o l o C e s a e l e r n o t t u b g u l P t e k c o S g u l P t e k c o S e b u T . D .

Prevents Micro-Bubbles

S) PB PA PB SMC B PA A A B SMC SMC (mm) Dimensions (Max.

Industrial Filters

574 70 634 574 70 665 3/8, 1/2, 3/4 3/8, 1/2, 3/4 A (L250) A (L250) 315 70 375 315 70 408 FGDT FGDF FGDT FGDF B (L500) B (L500) 574 70 636 574 70 665 28 B Industrial Filter FGE Series FGD How to Order FGE FGE FGG FGE S A 10 B N A 002 G1 FGES/FGEL type (V-band type) FGA Material Symbol Option FGC Symbol Body Gasket/O-ring NBR FKM Pressure gauge type G46-10-02M (Brass at wetted parts) G1 G2

Short Stroke Electric Actuator Series LX

H 5 B C 100 S B F9N 1 Actuator configuration Number of auto switches/proximity switches Flat table type F 1 pc. 2 pcs. 1 2 Guide rod type P Slide table type S 6 pcs. 6 Guide type Direct acting guide H Auto switch/Proximity switch type Ball bushing B Without auto switch/proximity switch Nil With sensor plate, without proximity switch GN Proximity switches Motor type D-F9N (lead wire length

LG1H

Positioning distance (mm) 1000 500 100 10 1 10 100.5 50.5 10.5 1.5 0.5 100 10.5 5.5 1.5 0.6 0.5 Speed (mm/s) 500 2.7 1.7 0.9 0.6 0.5 1000 1.9 1.4 0.9 0.6 0.5 A B C D Values will vary slightly depending on the operating conditions.

IDU/IDF

Note 3) 200 to 240VAC is "S" specification standard. Note 4) Combinations of M and H, H and M, R and S, S and T, L and M are not available.

HRS100/150

Operating time 20 s 30 s HRZ 10 s Voltage HRZD 5 s Min. 2 s HRW 1 s 0.5 s dV dt HECR = Voltage increase ratio 0.2 s 0.1 s dV HEC 0.05 s 0.02 s Time HEB 0.01 s 100 125 200 300 500 400 600 700 1000 2000 3000 4000 1500 dt HED Current (% for chiller main breaker volume) < For option B [With earth leakage breaker]> 3.

Thermo-chiller

Operating time 20 s 30 s Voltage 10 s 5 s Min. 2 s dV dt 1 s = Voltage increase ratio 0.5 s dV 0.2 s 0.1 s Time 0.05 s 0.02 s dt 0.01 s 100 125 200 300 500 400 600 700 1000 2000 3000 4000 1500 < For option B [With earth leakage breaker]> 3. This product is installed with a breaker with the following operating characteristics.

Digital Flow Switch

30 s, 40 s, 50 s, or 60 s.

IIIIIIIIII

OPERATING PRESSURE: 100 PSI .007 B-062-007 B-125-007 .008 B-062-008 B-125-008 .009 B-062-009 B-125-009 .010 B-062-010 B-125-010 .012 B-062-012 B-125-012 .014 B-062-014 B-125-014 .016 B-062-016 B-125-016 .017 B-062-017 B-125-017 .019 B-062-019 B-125-019 .020 B-062-020 B-125-020 .025 B-062-025 B-125-025 .030 B-062-030 B-125-030 .035 B-062-035 B-125-035 .040 B-062-040 B-125-040 Back to Top .

Refrigerated Air Dryers

Applicable air dryer A B Weight [g] Part no.

Model Selection 1

C D E G H J K L M N P Q S V Note 1) B Brass/Copper H B Note 1) Stainless steel/Silver High corrosive spec., Oil-free Note 1) Non-leak, Oil-free H Steam (Max. 183C) Brass/Copper Non-leak, Oil-free B Note 1) L, M, V options are for non-lube treatment.

Speed Controller with One-touch Fitting

A 3.2 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS221F-01-04(S)A 4 8.2 AS221F-01-06(S)A 6 10.4 10 (9) AS221F-01-08(S)A 8 13.2 22.4 29.5 14.2 11 (10) AS221F-01-10(S)A 10 15.9 25.3 32.4 15.6 12 (11) AS221F-02-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-04(S)A 4 8.2 AS221F-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS221F-02-08(S)A 8 13.2 23.9

53

Page 145 137 B Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type (400 V type only) (Option S only) (UL Standards) (Option S only) RoHS HRSH090 Series How to Order A HRSH090 20 Cooling capacity 090 9.5 kW Option Nil None B Note 1) With earth leakage breaker J With automatic fluid fill function M Applicable to deionized water piping S Note 2) Conforming to CE/UL standards Cooling method

CC

S F 35 ML2B CCVS02-G-S 45 80 86 35 25 1 36 17.5 88.2 72 45 1/2 148.5 103.9 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 57 1/2 148.5 121.8 101 M5 x 0.8 5.4 to 7.5 C J G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CV CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57

EXxx-OMV0017-D

Fixed at "Manual". b) Diagnostic allocation Advanced Advanced Available Fixed at "Advanced". c) DA refresh time 0.1 / 0.2 / 0.5 / 1 / 2 / 5 / 10 / 30 / 60 s 1 s Available (sec) Output action when upper communication is disconnected. d) Clear / Hold / Individual Clear Available Timing of Wireless Communication 20 / 40 / 100/ 200 / 500 / 1,000 / 2,000 / 5,000 msec 500 msec Available e) System

LEC-T1_C

Speed 000 Absolute 000 100mm/s 001 Relative 001 200mm/s ESC keySET key ESC keySET key AX IS. Step 1 Step 1 No. Move mode No. Speed 000 Absolute 000 100mm/s () 001 Relative 001 200mm/s b) SET AX IS. AX IS. Step 1 Step 1 No. Move mode No. Speed 000 Absolute SET 000 300mm/s SET 001 Relative 001 200mm/s 58 - (3-2) TB Ver.511 Step data Step No.