SMC's PFM dual color digital flow switch was developed initially to detect microchip component adsorption in vacuum, and early clogging in both filter and nozzle applications.  The series is incredibly compact and lightweight compared to existing flow sensors.  The PFM is available in four maximum flow rate options 10, 25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon

Series VFM is a 5 port, compact, mechanical valve available in a rubber (VFM300) or metal (VFM200) seal style. This series has a large flow capacity (Cv 1.0) and a high cycle rate. The VFM offers an internal or external pilot body option and a variety of actuator choices.Fluid: air, inert gas, Operating pressure range: 0.1 to 1.0MPa, Effective area (Cv): 18mm 2 (1.0), Maximum frequency (

Special Applications: 10- (Clean Room Compliant), Size: 20, Backflow Function: None, Thread: N (NPT), Port Size: 02 (1/4), Accessory: None, Specifications: 0.005 to 0.4MPa Setting, Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 10- (Clean Room Compliant), Size: 20, Backflow Function: K (Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Accessory: None, Specifications: 0.005 to 0.4MPa Setting, Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 10- (Clean Room Compliant), Size: 30, Backflow Function: K (Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Accessory: None, Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 10- (Clean Room Compliant), Size: 30, Backflow Function: None, Thread: N (NPT), Port Size: 02 (1/4), Accessory: None, Specifications: 0.005 to 0.4MPa Setting, Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 10- (Clean Room Compliant), Size: 30, Backflow Function: None, Thread: N (NPT), Port Size: 02 (1/4), Accessory: None, Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 20, Backflow Function: None, Thread: N (NPT), Port Size: 02 (1/4), Accessory: None, Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 40, Backflow Function: None, Thread: N (NPT), Port Size: 02 (1/4), Accessory: None, Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 10- (Clean Room Compliant), Size: 30, Backflow Function: None, Thread: N (NPT), Port Size: 02 (1/4), Accessory: None, Specifications: 3 (0.008 to 0.6 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 40, Backflow Function: K (Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Accessory: None, Specifications: 1R (1+R), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Body Size: 2, Set Pressure: 1 (1.5 to 58 psi [0.01 to 0.4 MPa]), Exhaust Direction: 0 (Bottom Exhaust), Thread: N (NPT), Port Size: 02 (1/4), Option: None, Semi-standard: RZ (Flow Direction: Right to Left + Name Plate & Pressure Gauge in Imperial Units: psi)

Body Size: 2, Set Pressure: 1 (1.5 to 58 psi [0.01 to 0.4 MPa]), Exhaust Direction: 0 (Bottom Exhaust), Thread: N (NPT), Port Size: 02 (1/4), Option: None, Semi-standard: VZ (Downward + Name Plate & Pressure Gauge in Imperial Units: psi)

Body Size: 3, Set Pressure: 1 (1.5 to 58 psi [0.01 to 0.4 MPa]), Exhaust Direction: 2 (Rear Exhaust), Thread: N (NPT), Port Size: 02 (1/4), Option: None, Semi-standard: RZ (Flow Direction: Right to Left + Name Plate & Pressure Gauge in Imperial Units: psi)

Body Size: 3, Set Pressure: 0 (Body Size 1, 2: 0.73 to 29 psi [0.005 to 0.2 MPa]; Body Size 3: 1.5 to 29 psi [0.01 to 0.2 MPa]), Exhaust Direction: 2 (Rear Exhaust), Thread: N (NPT), Port Size: 02 (1/4), Option: None, Semi-standard: Z (Name Plate & Pressure Gauge in Imperial Units: psi)

Body Size: 3, Set Pressure: 2 (1.5 to 116 psi [0.01 to 0.8 MPa]), Exhaust Direction: 1 (Front Exhaust), Thread: N (NPT), Port Size: 02 (1/4), Option: None, Semi-standard: Z (Name Plate & Pressure Gauge in Imperial Units: psi)

Body Size: 2, Set Pressure: 1 (1.5 to 58 psi [0.01 to 0.4 MPa]), Exhaust Direction: 0 (Bottom Exhaust), Thread: N (NPT), Port Size: 02 (1/4), Option: None, Semi-standard: RVZ (Flow Direction: Right to Left + Downward + Name Plate & Pressure Gauge in Imperial Units: psi)

Body Size: 2, Set Pressure: 2 (1.5 to 116 psi [0.01 to 0.8 MPa]), Exhaust Direction: 0 (Bottom Exhaust), Thread: N (NPT), Port Size: 02 (1/4), Option: None, Semi-standard: RZ (Flow Direction: Right to Left + Name Plate & Pressure Gauge in Imperial Units: psi)

Body Size: 2, Set Pressure: 0 (Body Size 1, 2: 0.73 to 29 psi [0.005 to 0.2 MPa]; Body Size 3: 1.5 to 29 psi [0.01 to 0.2 MPa]), Exhaust Direction: 0 (Bottom Exhaust), Thread: N (NPT), Port Size: 02 (1/4), Option: None, Semi-standard: Z (Name Plate & Pressure Gauge in Imperial Units: psi)

Body Size: 2, Set Pressure: 2 (1.5 to 116 psi [0.01 to 0.8 MPa]), Exhaust Direction: 0 (Bottom Exhaust), Thread: N (NPT), Port Size: 02 (1/4), Option: None, Semi-standard: Z (Name Plate & Pressure Gauge in Imperial Units: psi)