Support Guide/11-LEFG Series

X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work

VCL

Valve model VCL2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCL4 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 Mounting screws (for mounting bracket) are included

Parallel Type Air Gripper

Model Screw Max. tightening Maximum screw-in depth (L mm) torque (Nm) MHZ2-10 M3 x 0.5 0.9 6 MHZ2-16 M4x0.7 1.6 4.5 MHZ2-20 M5 x 0.8 3.3 8 L L MHZ2-25 M6x1 5.9 10 MHZ2-32 M6x1 5.9 10 MHZ2-40 M8 x 1.25 13.7 13 Model Screw Max. tightening torque (Nm) Maximum screw-in depth (L mm) MHZ2-10 M3 x 0.5 0.69 5 MHZ2-16 M4x0.7 2.1 8 MHZ2-20 M5 x 0.8 4.3 10 MHZ2-25 M6x1 7.3 12 MHZ2-32 M6x1 7.9 13 MHZ2

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

10 15 15 20 20 2 pcs. 5 10 15 10 20 15 Auto Switch Mounting Bracket Part Nos.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

10 12 Only R is available.

PSxx-OMT0001CN

1 6 2 1 3 G1/8 G1/8 3 7 NPN2 PNP2 A B 4 L 7 5 SI N 1 2 3 1 2 3 4 5 6 S 6 7 8 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMT0001CN-E 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 6 10 N 3 10 0.4MPaMPa 0 G1/8 F G1/8 3 1 11 0.4MPaMPa 0.2MPaMPa 0.2MPaMPa 2 3 C Rc1/4 F 12 G1/4 4

PSxx-OMU0002CN

DC1224 V10% DC1224 V 10 DC(+) DC(-) 8 DC1224 V10% DC1224 V10% DC(+) DC(-) 9 ( ) 10 11 -71No.PS-OMU0002CN-D No. / 5 m / 12 1015 10 SI (kPaMPa) ( ) 13 SI kPa,MPa 14 15 16 FUNC 17 -72No.PS-OMU0002CN-D No. 4 m 4 m FUNC (Er13) 18 10 10 () 19 () / ( ) () -73No.PS-OMU0002CN-D 80 mA 7 F.S.(3.5F.S.) 1 1F.S. 1 -74No.PS-OMU0002CN-D ZSE20A() ZSE20AF() ISE20A() 0.0-101.0 kPa -100.0100.0

Short Stroke Electric Actuator Series LX

D-M4 x 0.7 (for work piece mounting) 10.5 12 2-M3 thread depth 5 (3.5) 6 4-8 50 18.5 10 20 17.5 22 25 35 (5) 62 72 12 (6) 8 (15) 1 0.2 31 5H9 +0.030 0 depth 5 Photo micro sensor wire (300mm) 10 13 1.5 [5.5] 6 25 (4) 30.5 10 (39.5) E Motor wire (300mm) Stroke + 135 The dimension inside [ ] shows the location at which the home position switch operates.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Flow Rate and Sonic Conductance Model AS22l1FSl-U01 AS22l1FSl-U02 AS32l1FSl AS42l1FSl Flow Direction Symbols on Body Meter-out Meter-in Metric size 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Symbol Tubing O.D.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

size (mm) MM A NN D F G1 G2 S ZZ I H J N1 N2 NA TN TF 10 15 M12 x 1 4 M5 x 0.8 8 15 6 M4 x 0.7 65 101 18.5 28 16 11 20 16 16 15 M14 x 1 5 M5 x 0.8 10 15 6 M5 x 0.8 74 114 22 30 22 12 21 19.5 20 18 M20 x 1.5 8 Rc1/8 13 NPT1/8 25 G1/8 8.5 M8 x 1.25 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M10 x 1.25 18 M26 x 1.5 10 Rc1/8 13 NPT1/8 30 G1/8 8.5 102.5 160 34.5 44.5 32 20.5 38 32 Refer to page

High Precision Digital Pressure Switch, Series ZSE40/ISE40

Rc1/8 12 3 High Precision Digital Pressure Switch Dimensions ZSE40(F)/ISE40 C4 C6 M5 32.3 20 30 2-4.5 12.8 8 28.15 22.15 MPa 44.3 30 OUT1 OUT2 SET 19 25.4 6.4 18.35 Atmospheric release port 600 (3000) Lead wire length 3.5 ForM5 7.8 12.4 7 2.6 2.5 30 15.2 43 10.7 8.5 7 12 M5 x 0.8 thread depth 5 One-touch fitting 4, 6 For splash proof use (IP65), insert an air tube into the atmospheric release

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Rc1/8 12 3 High Precision Digital Pressure Switch Dimensions C4 C6 M5 ZSE40(F)/ISE40 32.3 20 30 2-4.5 12.8 8 28.15 22.15 MPa 44.3 30 OUT1 OUT2 SET 19 25.4 6.4 18.35 Atmospheric release port 600 (3000) Lead wire length 3.5 ForM5 7.8 12.4 7 2.6 2.5 30 15.2 43 10.7 8.5 7 12 M5 x 0.8 thread depth 5 One-touch fitting 4, 6 * For splash proof use (IP65), insert an air tube into the atmospheric release

CU

CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8 with depth 8 M6 x 1.0 with depth 9 9.3 with depth 8 9.3 with depth 9 11 with depth 11.5 53 51.5 56 72 74.5 83 30 38 48 5 6 7 5

Series CE1

M8 X 1.25 10 8 28 25.5 Q R T* V Y N O P Bore (mm) 12 20 5.5 47 7 53.5 22 7 M4 X 0.7 M5 X 0.8 50 15 62.5 36 5 M6 X 1 M5 X 0.8 * Refer to p.4.4-8 regarding the rod end nut which is included. * Dimensions for auto switch model D-F79W. 4.4-10 Stroke Reading Cylinder Series CE1 Foot CE1L Bore size Stroke MK/MK2 RSQ/RSG RSH CE1 Front flange CE2 CE1F Bore size Stroke ML2B ML1C REA REC RHC MTS Rear

ZSE30/ISE30

System error Brown DC(+) Internal data error 12 to 24VDC + Black OUT Load Internal data error Blue DC() 6 Series ZSE30/ISE30 Dimensions 20 0.1 2-M3 x 0.5 Thread depth 4 Lead wire with connector 9.5 25 8 30 3.6 M5 x 0.8 MPa PRESSURE 20 0.1 10 SMC OUT Width across flats 12 SET 1.5 01: R 1/8 T1: NPT 1/8 With bracket 42.5 10 15 4.2 3 22 30 20 25 20 SMC 45 30 1.8 35 35 Panel mount 8 17.8 7.2

Series VCS

Valve model Port size VCS21 VCS20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCS30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCS30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCS30-12-04 VCS41 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCS Direct Operated

e-Rodless Actuator

Yes 5 V A93V A93 Grommet 12 V 100 V Relay PLC 24 V 2-wire IC circuit A90V A90 5 V,12 V 100 V or less M9NV M9N 3-wire (NPN) IC circuit 5 V 12 V M9PV M9P 3-wire (PNP) M9BV M9B 12 V 2-wire Relay PLC Yes Grommet 24 V F9NWV F9NW 3-wire (NPN) Diagnostic indication 2-color display IC circuit 5 V 12 V F9PWV F9PW 3-wire (PNP) F9BWV F9BW 2-wire 12 V . . .

Process Pump

Mount with this surface up FLUID OUT Rc, NPT, G 1/8 84 72 60 41 7.5 45 2 x 4.5 Mounting hole Manual override pin 66 16 16 Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth 6 12 Silencer: AN120-M5 (Option) 8 AIR SUP Rc, NPT, G 1/8 16 Lead wire length: Approx. 570 mm FLUID IN Rc, NPT, G 1/8 8 18 12 11 11 AIR EXH M5 x 0.8 Thread depth 8 Air Operated PB1013A 18 1.5 10 Mount with

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

ACB ACB SYJ 2-4.5 (Mounting hole) SX 57.5 VK 52.5 51 3(R) 1(P) 3(R) 1(P) VZ 9 16 32 17 4 VF VFR 10 4 10 P=11 L2 VP7 36.5 41.5 L1 VP4 45 M plug connector (M) VQ D side U side VQ4 Stations 1 2 3 4 5 n Direct manual override VQZ (Non-locking) 2n-C4, M5 (A, B port) C4: 4 One-touch fitting M5: M5 thread VQD VZS 2(B) 2(B) 27.5 VFS 20 15 4(A) 4(A) 5 VS 46 12.5 P=11 VS7 L plug connector (L) n: Station

Series VCL

Valve model Port size VCL2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCL4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCL Direct Operated