Plug-in Unit

B 23 () (+) Grey Red 11 () (+) White Red SOL. A Station 11 SOL. B 24 () (+) Black White 12 () (+) Yellow Red SOL. A Station 12 SOL. B 25 () (+) White None COM. 13 (+) () Orange Red Note) Negative COM. spec. Positive COM. spec. Note) When using the negative COM. specification for VQC1000/2000, use valves for negative COM.

Escapements Series MIW/MIS

Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Selection Mounting Warning Mounting 1.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-10} at ambient temperature, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperature, excluding gas permeation External Flange type KF (NW), CF KF (NW) KF (NW), CF KF (NW) Principle materials Body: SCS13 (Conforms to Stainless steel SUS304) Bellows: Stainless steel SUS316L Bellows holder: Stainless steel SUS304.

Compact Hydraulic Cylinder

(mm) H I J K L C D E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 82 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 84 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 98 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 102 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22 11

Table of Contents

RQ MU DSpecifications Dimensions -X 11 3.5 The specifications are the same as those for the standard double acting type.

MGZ Series

, 251 to 1000 mm Rubber bumper Cushion JIS class 2 Thread tolerance 1/4 1/4 1/4 Port size Standard strokes Bore size (mm) Standard strokes (mm) Long strokes (mm) 75, 100, 125, 150, 175 350, 400, 450, 500, 600 40, 50, 63 200, 250, 300 700, 800, 900, 1000 Weight table kg (lb.)

CYP

Standard stroke Bore size (mm) Standard stroke (mm) Piping port position 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h Nil Note 1) Consult SMC if the

CYPSeries

(Refer to page 5 for detailed specifications of the contact protection boxes.) 6.2 5.7 3.4 12.5 Most sensitive position 11 Series CYP Clean Room Rodless Cylinder Solid State Auto Switches/Direct Mount Type D-Y59 /D-Y69 /D-Y7P (V) A B A B Auto Switch Specifications D-Y5, D-Y6, D-Y7P, D-Y7PV (with indicator light) D-Y7PV D-Y59B D-Y59A D-Y69A D-Y7P D-Y69B Auto switch part no.

CYPSeries

(Refer to page 5 for detailed specifications of the contact protection boxes.) 6.2 5.7 3.4 12.5 Most sensitive position 11 Series CYP Clean Room Rodless Cylinder Solid State Auto Switches/Direct Mount Type D-Y59 /D-Y69 /D-Y7P (V) A B A B Auto Switch Specifications D-Y5, D-Y6, D-Y7P, D-Y7PV (with indicator light) D-Y7PV D-Y59B D-Y59A D-Y69A D-Y7P D-Y69B Auto switch part no.

I

Chamfering causes a narrower detection distance range. 1.0 ~ 2.0mm H O W T O O R D E R A I R C AT C H S E N S O R S E R I E S ISA Min 2.0mm ACCESSORIES A I R C AT C H S E N S O R S E R I E S ISA Bracket ISA-1-A Gauge G33-3-01 ISA 01 O U T P U T 11 NPN 15 PNP Min 3.0mm N O.

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

IFW520 125 VAC 10 to 20 25 1.5 or less 5 5 1.5 0.7 4 4 2.5 1.3 IFW550 250 VAC 20 to 50 60 3 or less 5 5 1 0.5 4 4 1.5 0.8 Note) Hysteresis is the flow rate that is necessary for moving the microswitch from the operation position (ON signal) to the return position (OFF signal). 8 VDC 7 5 3 3 5 4 3 3 5 5 3 3 4 4 3 3 14 VDC 30 VDC 5 5 3 3 4 4 3 3 125 VDC 0.4 0.4 0.1 0.1 0.4 0.4 0.1 0.1 250 VDC

Precision Regulator Series IR1000/2000/3000

Panel When mounting on a panel, refer to page 561 in Specific Product Precautions. 4.5 M5 x P0.5 8.5 M6 x P0.5 5.5 71 11 18 124 46 53 92 10 10 9.5 Bleed Bleed 63 Exhaust SUP(1) OUT(2) 30 OUT(2) SUP(1) 43 35 2 x Rc 1/8 Port size EXH 43 50 50 2 x Rc 1/4 Port size 2 x Rc 1/8 35 60 2 x Rc 1/8 Pressure gauge port Pressure gauge port 50 Mounting hole IR300-0 IR2120-02 36 2 Bracket (Option) 30

Membrane Air Dryer

Specifications 1) Single Unit Type 2) Unit Type (Unit M, Unit V) Model Specifications IDG10 IDG20 IDG10H IDG20H Compressed Air Fluid Range of operating conditions Inlet air pressure MPa 0.30.85 -555 -555 Inlet air temperature oC Ambient temperature oC Standard performance Outlet air atmospheric pressure dew point oC Inlet air flow rate L/min(ANR) 125 250 111 222 Outlet air flow rate L/min

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

223 212.5 191.5 16 12 235.5 225 202 17 13 248 237.5 212.5 18 14 248 237.5 223 12.5 15 260.5 250 233.5 13.5 16 273 262.5 244 14.5 L1 L2 L3 L4 External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 135.5 125 107.5 14 3 148 137.5 118 15 4 160.5 150 128.5 16 5 173 162.5 139 17 6 173 162.5 149.5 12 7 185.5 175 160 13 8 198 187.5 170.5 14 9 210.5 200 181 15 10 223 212.5 191.5 16 11

Multistage Ejector Series ZL

Suction cover PVF 1 9 Sound absorbing material B ZL112-SP01 Front cover Without valve PVF 2 10 Sound absorbing material A (set no. for 9, 10 &11) End cover PE 3 11 Suction filter Body 4 When ordering a vacuum pressure gauge or a digital vacuum pressure switch separately, use the part numbers shown in the option specifications on page 3.

Process Gas Diaphragm Valve

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 200 psig (1.4 MPa) 375 pisg (2.7 MPa) -10 to 71C (No freezing) 0.29 0.5 Inboard leakage Outboard leakage 2 x 10-11 Pam3/s 2 x 10-10 Pam3/s 1) 4 x 10-9 Pam3/s 1) Ra 10in. (0.25 m) Face seal, Tube weld 60 to 110 psig (0.4 to 0.76 MPa) M5 x 0.8 Top Bottom mount 0.06 in3 (1.07 cm3) 0.24 kg 2) Leak rate Across

For post-stoppage positioning and locking

.) * Values for W-R1 Series Integration of the clamping unit and cylinder unit reduces design and assembly labor Cylinder Approx. 70 Clamp assembly 436 mm Selectable proximity switch for checking arm operation (Option) 250 mm Selectable when the mass of the transferred object is either 1000 kg or 3000 kg, with consideration given to the impact during positioning 15-E655 W-R1/W-R3 Series

AME

Accessory (Option) Applicable model Bracket assembly With cap bolt and spring washer AME150 AME250 AME350 AME450 AME550 AME650 AME850 BM51 BM52 BM53 BM54 BM55 BM56 BM57 AME 250 03 R B HA Option specifications AT R IN-OUT reversal direction Body size Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 ID Nil Bracket B Nil AMG Port

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

AT ID 1 Standard 11 2 Standard Accessory (Option) AMG Description Bracket Symbol Nil Rc Thread type Nil AFF B JIS Symbol F G N NPT N.C. auto-drain C AMG N.O. auto-drain D AM Refer to the table below for accessory/Option combinations. Port size Misc.