Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

or less 100 Rubber seal Exhaust center 10-SQ1431 39 or less 0.19 0.20 0.80 0.15 0.20 0.64 25 or less 100 Rubber seal Pressure center 10-SQ1531 39 or less 0.14 0.20 0.59 0.19 0.21 0.79 25 or less 100 Rubber seal Note 1) Values for the cylinder port size of C6, CYL Values of EXH.

MGC

View A-A Bore size (mm) Stroke range (mm) AF AE AD AC AB AA A G F E D C B AP H 20 25 32 40 50 75, 100, 125, 150, 200 25 62 15.5 13 11 84 5.6 90 45 24 106 M5 x 0.8 depth 10 9.5 depth 6 22 M6 x 1 depth 10 30 65 16.5 13 15 89 6.8 103 45 26.5 120 11 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 14 27 75, 100 125, 150 200, 250 300 35 70 16.5 13 15 94 6.8 118 50 26.5 135 11 depth 8 M6 x 1 depth 12 M8

HRX-OM-Y120

RJ45 1 6 Serial communication connector D sub 9 female pin (socket) type 9 5 1 14 Contact input / output signal connector D sub 25 female pin (socket) type 25 13 Fig.1-3 Communication port HRL Series 1.3 Communication port 1-5 HRX-OM-Y120 Chapter 1 Read before using 1.4 Touch panel flow Press the [Comm.

Compact Cylinder

446 467 488 509 530 551 572 592 100.0 Mass of Cylinder Moving Parts: With Magnet for Auto Switch [g] 100 Allowable lateral load at rod end [N] 80 Bore size [mm] Cylinder stroke [mm] 63 5 10 15 20 25 30 35 40 45 50 50 40 32 12 6 7 8 9 10 11 10.0 16 7 8 9 10 11 12 20 16 17 19 21 23 25 27 29 31 33 25 25 25 28 31 34 37 40 43 46 49 53 20 32 43 48 52 57 61 66 70 75 79 83 16 40 69 75 81 87 93

Digital Flow Switch ( compatible)

PF2MC7501 Item Default settings [P_1] Set value of OUT1 250 L/min [H_1] Hysteresis of OUT1 25 L/min [P_2] Set value of OUT2 250 L/min [H_2] Hysteresis of OUT2 25 L/min PF2MC7102 Item Default settings [P_1] Set value of OUT1 500 L/min [H_1] Hysteresis of OUT1 50 L/min [P_2] Set value of OUT2 500 L/min [H_2] Hysteresis of OUT2 50 L/min PF2MC7202 Item Default settings [P_1] Set value of

Digital Flow Switch ( compatible)

250] 250 L/min (500 L type) [ 500] 500 L/min (1000 L type) [1000] 1000 L/min (2000 L type) [P_2 ] Set value of OUT2 [F 2] 3 Page 42 5% of maximums rated flow range [ 25] 25 L/min (500 L type) [ 50] 50 L/min (1000 L type) [ 100] 100 L/min (2000 L type) [H_2 ] Hysteresis of OUT2 [dtH2] ON delay time [0.00] 0.00 s [dtL2] OFF delay time [0.00] 0.00 s [CoL ] Display colour of OUT2 [1SoG] Green

CEx-OMP0016

Adjusting Method 35 Chapter 11: Stopping Operation 11-1. Over run 36 11-2. Dispersion of Stopping Position 36 Chapter 12: Manual Operating Procedure 37 Chapter 13: Installation / Wiring 13-1. Installation of Cylinder 3839 13-2. Electrical Wiring 40 13-3.

LEC-OM034xx

LED display.34 10. 1 LED display.34 10. 2 Controller IF communication status and LED display.35 11. Mode.36 11. 1 Outline.36 11. 2. Step data input mode .36 11. 3. Numerical data input mode.36 11. 4. Data writing mode.38 12.

VM

1 Mechanical Valves Series VM Mechanical Valves Series VM Mechanical Valves SA VA Model VM1000 VM100 VM200 VM400 VZM500 VZM400 VFM300 VFM200 VM800 SA Dimensions (mm) Side ported 11 x 36 x 16 Bottom ported 11 x 28 x 25 Side ported 17 x 44 x 25 Bottom ported 17 x 44 x 30 25 x 40 x 52 21 x 35 x 53 18 x 28 x 87 18 x 30 x 91 26 x 35 x 94 23 x 40 x 115 30 x 40 x 57 VA VM Courtesy of Steven Engineering

MLGC

32 31 60 95 60 12 63 125 132 103 1/8 Rc(PT) 70 40 7 7 9 M8 X 1.25 20 32 38 60 95 125 60 12 132 63 104 1/8 Rc(PT) 45 8 8 11 M8 X 1.25 25 38 47 70 75 12 73 150 162 115 82.5 115 Bore size (mm) Y WH Wq X Z 20 25 32 40 23 30 30 146 182 25 30 37 167 199 25 37 167 202 28.5 20 44 210 227 33 Without rear plate Long stroke Stroke range (mm) Bore size (mm) Bore size (mm) Z R Y 20 25 32 40 20 25 32 40

SMC Electronic Switch Series Variations

30 25 30 (3000) (3000) 3 40 9.5 3 40 1.5 16 18 20 16 18 20 11 11 13 13 9 9 Gasket 3.3 Gasket 3.3 3.10-5 Compact Pressure Switch ZSE2/ISE2 Dimensions/ISE2l01 T1 01 T1 01 T1 Grommet style/ISE2l-15 Connector style/ISE2l-15C trimmer Pressure setting trimmer Pressure setting Indicator light Indicator light PSE ZSE4 ISE4 15 Lead wire length 600 15 (3000) L H 20 20 ZSE5 ISE5 Lead wire length 600

Cylinder with Lock Series CLS

Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Lock Monitor Manual Unlocking Warning Caution 1.

2-Color Display Digital Flow Switch Series PFM

Integrated display 7 Rated flow range (Flow rate range) Option 2 (Refer to page 907.) 10 25 50 11 0.2 to 10 (5) l/min 0.5 to 25 (12.5) l/min 1 to 50 (25) l/min 2 to 100 (50) l/min Option 1 (Refer to page 907.) ( ): Fluid: CO2 Calibration certificate Flow adjustment valve None With calibration certificate Nil A Nil S None Yes The certificate is written in English and Japanese.

Dedicated Controller

ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.

Compact Vacuum Unit

New New Compact Vacuum Unit Ejector/Vacuum Pump System RoHS Air consumption: 17% reduced 17% 17% 17% 21% 21% 21% Response time of the valve: 21% increased 5 m ms 5 ms Quick response Energysaving Vacuum pressure reached: 25% 28 ms ms Vacuum response time: 28 ms Compared with existing model (Shortened by 25%; Comparison with other SMC products) 0.88 14.5 Air consumption SCFM (L/min (ANR))

SYJA3000

SYJ3000-21-2A1 pc. 0.1 0.2 0.3 0.4 0.5 0.6 Operating pressure (MPa) 3.1-16 Series SYJA3000 Body Ported Base Mounted 2 position single: SYJA3120-M3(-F) 2 position single: SYJA3140-M5 10 10 28.4 (Mounting holes) 3.5 25 2.5 5 5 10 22 16.4 3.2 210 SlA 22 4 (Mounting hole) Manual override M3 X 0.5 (Pilot port) M3 X 0.5 (Pilot port) (Non-locking) A B 11 17.5 VlA 1 (Bleed port) 1.5 A B 1.5 1.5 5

Rotary Table

Table 10 shows the part number of the special angle adjustment tool and Table 11 shows the dimensions of the special tool. Angle adjustment using the special tool Table 10. Part number of special angle adjustment tool Size Part number 10 P8910195 20, 30 P8910295 50 P8910495 Table 11.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

25 6-M5 x 0.8 thread depth 10 (A, B, C common view) 50 3-5 depth 10 +0.02 0 16h9 0 0.043 (A, B, C common view) 2 10 38.5 22 (76) 70 11 25 2 12 0 0.05 5 0 0.03 5 0 0.03 4 Open: 37 Closed: 19 2-M5 x 0.8 thread depth 10 (Thread for mounting attachment) 25 25 7 7 10 10 12-5-16 17 2 Finger Rotary Actuated Air Gripper Series MHR2/MDHR2 With auto switch (Built-in magnet): MDHR2-30R 76 73 B 3-M5

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

depth 22 Up to 300 50 32 25 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122

LJ1H

mm, 25 mm lead High rigidity direct acting guide With coupling LECS(Refer to page 97 for details.)