PF2D

1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

. 4 stations 4 1 SOL. 5 stations 5 SOL. 6 stations 6 (b) SOL. 7 stations 7 2 SOL. 8 stations 8 SOL. 9 stations 9 Black White SOL. 10 stations 10 SOL. 11 stations 11 SOL. 12 stations 12 SOL. 13 stations 13 SOL. 14 stations 14 SOL. 15 stations 15 SOL. 16 stations 16 SOL. 17 stations 17 SOL. 18 stations 18 COM 19 COM 20 Electrical wiring specifications 18

VQ4000

: Rc3/8 VQ4 0 1 G H 0 1 G H 0 1 G H G H 3 position double check: VQ465 0 1 2 position double: VQ425 l 3 position closed center: VQ435 l 3 position exhaust center: VQ445 l 3 position pressure center: VQ455 l VQZ VQD 0 1 178.5 105.5 73 42.5 50 VZS 164.5 178.5 Indicator light 11(A port) (12.5) 11(B port) (12.5) 59 73 42.5 105.5 VFS Indicator light 50 11 (A port) 11 (B port) VS 2 4 (12.5) (12.5

HRX-OM-R028

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig 3.3-2 RS-232C connector connection 3.3 Connected explanation HRSH Series 3-2 HRX-OM-R028 Chapter 4 MODBUS communication function Chapter 4 MODBUS communication function MODBUS protocol is a communication protocol developed by Modicon.

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DC Specification AC Specification (Built-in Full-wave Rectifier Type) Model Power consumption (W) Note 1) Temperature rise (C) Note 2) Model Apparent power (VA) Note 1) 2) Temperature rise (C) Note 3) VXS23/24 12 100 VXS25/26 15 100 VXS23/24 12 100 VXS25/26 15 100 Note 1) The value at ambient temperature of 20C and when the rated voltage is applied.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.

VXA21/22

(P1+0.1013) l/min(ANR) Calculation by effective area Q=109.6.S.(P1+0.1013) l/min(ANR) Water How to Read the Graph In case of a flow of 2 l/min.

Intrinsically Safe Valve

MPa) Operating pressure range 15 to 100 psi (100 kPa to 0.7 MPa) External pilot operating pressure range 2-position single 35 to 100 psi (0.25 to 0.7 MPa) Pilot pressure range 2-position double 35 to 100 psi (0.25 to 0.7 MPa) 3-position Based on IEC 60529 Note)Impact resistance: No malfunction occurred when tested in the axial direction and at the right angles to the main valve and armature

MGZ Series

40 510 30 50 70 100 200 300 2 10 30 50 70 100 200 300 Eccentric distance L (mm) Eccentric distance L (mm) Continuous line: Operating pressure 0.4MPa or more Selection graph to 700mm/s Selection Example: Vertical Upward Mounting 100 50 Selection conditions Mounting: Vertical upward (lifter) Maximum speed: 500mm/s Load weight: 40kg Eccentric distance: 80mm Load weight m (kg) Refer to graph

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Chamfering causes a narrower detection distance range. 1.0 ~ 2.0mm H O W T O O R D E R A I R C AT C H S E N S O R S E R I E S ISA Min 2.0mm ACCESSORIES A I R C AT C H S E N S O R S E R I E S ISA Bracket ISA-1-A Gauge G33-3-01 ISA 01 O U T P U T 11 NPN 15 PNP Min 3.0mm N O.

PSxx-OMU0008CN

DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -21No.PS-OMU0008CN-D ZSE20C(F)/ISE20C(H)-S/-R () NPN 2 DC(+) Max.28 V80 mA 1 V R15 V OUT1 1 k S420 mA OUT2 12 V 300 24 V 600 DC(-) 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -22No.PS-OMU0008CN-D -V/-T () PNP 2 DC(+) Max.80 mA 1 V T15 V OUT1 1 k V420 mA OUT2

PSE550/300

(Not including sensor accuracy), Response time: 150 ms or less Accuracy (To display value) (25C) 1.0% F .S. or less 1.5% F .S. or less 2.0% F .S. or less PF2 0.5% F .S.

MX-OMP0051

MXQ16B 0.2 MXQ20(A) 0.2 MXQ20B 0.2 MXQ25(A) 0.2 5 2. 2-1 ,2 L1 L2 (Nm) (mm) (mm) MXQ6 M40.7 2.1 5 8 MXQ8 M40.7 2.1 8 11 MXQ12 M50.8 4.4 11 15 MXQ16 M61 7.4 14 19 MXQ20 M61 7.4 9 MXQ25 M81.25 18 12 MXQ6A M40.7 2.1 8 11 MXQ8A M40.7 2.1 8 11 MXQ12A M50.8 4.4 8 12 MXQ16A M61 7.4 12 17 MXQ20A M61 7.4 9 MXQ25A M81.25 18 12 MXQ6B M40.7 2.1 5 8 MXQ8B M50.8 4.4 4 9 MXQ12B M61 7.4 7 12 MXQ16B M61

CE

GND F.G. 4-3 (1)CEU5 CE1-R** (2) (3) (4) (5) *(CEU5**-D)EMC CEU5) 5. 5-1 () CE1 14.5mT CE1 15000 18cm 5-2 0.1mm 0.0 0.2 0.1 A B (1)0.8mm (2) sin cos 2 0.8mm (3)1/8 90,0.1mm/ (4)0.1mm 5-3 CE1 A /B 90 A B 3 2 2 1 1 0 A ON90B ON B ON90A ON A B 6. 6-1 11 11 DC12V DC24V DC12V24V CEU5 CEU5 MODE 2 90 CEU5 4 10,11 SMC 13 CEU5 13 23m 23m () CEU5 11 AC 10 70500mm/s 12

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

/110 VAC (50/60 Hz) DC: 1 W (With light: 1.2 W), 100 VAC: 1.4 W (1.45 W), 110 VAC: 1.45 W (1.5 W) Air Operated Valve Specifications Refer to page 13-4-11 for dimensions.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

54 M6 x 1.0 42 12 12(11.8) 45 8.5 M6 x 1.0 7 60 4.5 10 12 34 5.5 9 23 10 49.5 7 30 10 to 50, 75, 100 60.5 M6 x 1.0 48.5 13 16(15.8) 52 8.5 M8 x 1.25 7 69 5 14 12 40 5.5 9 26 10 57 10 40 10 to 50, 75, 100 62 M8 x 1.25 50 13 16(15.8) 64 12 M8 x 1.25 8 86 7 14 12 50 6.6 11 26 14 71 10 Note) Figures in ( ) are the dimensions for applying a wrench.

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

Terminal part no. 1 10 2 11 3 12 4 13 5 14 6 15 7 16 8 17 9 18 A mark is located on the connector number 1 side. 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 View from the insertion side View from the wiring side Switches Home position switch: This switch indicates the home position. Connect this switch when returning to the origin point.

Parallel Type Air Gripper Series MHZ

acting/Single acting Basic Type Scale: 100% 12 10 0.05 (14) 5 2-M2 x 0.4 thread depth 4 (mounting thread) 2-M3 x 0.5 through (mounting thread) Prepared hole dia. 2.6 through (mounting hole) 0 -0.1 4 13.6 (28) 12 20 +0.022 0 4 7H8 depth 1.5 When open 12 1 When closed 8 0 -0.4 16.5 2-M2 x 0.4 thread depth 4.5 (mounting thread) 11 19.7 44 M3 x 0.5 (finger closing port) M3 x 0.5 (finger opening

EXxx-OMN0027CN

A SI 1 PNP(-COM) 2 NPN(+COM) PR PROFIBUS DP No. 1 LED 2 3 4 (BUS OUT) 5 6 (PCI) 7 8 9 10 11 (BUS IN) 12 (2 ) (BUS OUTPCI) -16No.EX-OMN0027CN-D BUS IN BUS OUT 1 NC 2 RXD/TXD-N 3 NC 4 RXD/TXD-P 5 Shield T PROFIBUS DP BUS OUT SI IP67 PROFIBUS DP A [kbps] 9.6 19.2 45.45 93.75 187.5 500 1,500 3,000 6,000 12,000 [m] 1,200 1,000 400 200 100 -17No.EX-OMN0027CN-D (1

Wireless System

Link, No Activity (100 Mbps) Communication status of EtherNet/IP ports 1 and 2 Green LED flashes. Link, Activity (100 Mbps) Orange LED is ON. Link, No Activity (10 Mbps) 7 LINK/ACT1 LINK/ACT2 Orange LED flashes. Link, Activity (10 Mbps) Red LED is ON.