AHC System Series MA

MHK MHS 90 reverse unit MHC Air gripper for auto hand changing system MHT MHY Variations MHW Adapter for assembling robot Series MA2 8, 10, 11, 14, 15, 20 Series MA3 10, 11, 14, 15, 20, 24, 25 Additional installation unit of electrical contact point (Able to add 8 contact points) 90 reverse unit -X Air grippers for auto hand changing system (10 to 20) Standard type Narrow type Added to the

Thermo-dryer

[Space required for maintenance] Front: 600 mm Back: 600 mm Top: 600 mm Right side: 600 mm Left side: 600 mm Caution 1. Provide ventilation space. Unless a necessary ventilation space for each piece of equipment is provided, this product could cool poorly or stall.

PF2D

1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

VQ4000

: Rc3/8 VQ4 0 1 G H 0 1 G H 0 1 G H G H 3 position double check: VQ465 0 1 2 position double: VQ425 l 3 position closed center: VQ435 l 3 position exhaust center: VQ445 l 3 position pressure center: VQ455 l VQZ VQD 0 1 178.5 105.5 73 42.5 50 VZS 164.5 178.5 Indicator light 11(A port) (12.5) 11(B port) (12.5) 59 73 42.5 105.5 VFS Indicator light 50 11 (A port) 11 (B port) VS 2 4 (12.5) (12.5

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Material Note PBT PBT Description Body A Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring Gasket 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 1 2 3 4 5 6 7 8 9 10 11 12 13 14 Body A Elbow body Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Electroless nickel plated Electroless nickel plated Electroless nickel plated Brass

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

For detailed selection procedures, refer to pages 8-11-12 to 8-11-13. 8-12-7 8 Series MY1W Maximum Allowable Moment/Maximum Load Weight Maximum Allowable Moment: MY1MW MY1MW/M2 MY1MW/M3 MY1MW/M1 200 40 50 20 100 30 10 20 50 40 5 4 30 10 3 MY1MW63 MY1MW63 MY1MW63 MY1MW63 MY1MW63 MY1MW63 20 MY1MW63 MY1MW63 MY1MW63 2 MY1MW50 MY1MW50 MY1MW50 Moment (Nm) Moment (Nm) Moment (Nm) MY1MW50 MY1MW50

Gun Type Ionizer

150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance [mm] 5) Supply pressure: 0.4 MPa Flow rate consumption: 316 L/min (ANR) 6) Supply pressure: 0.5 MPa Flow rate consumption: 390 L/min (ANR) 200 200 2 s 150 150 1.5 s 100 100 50 50 0.5 s 1 s 1.5 s 0.5 s 1 s 50 50 100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 Distance

CXT

16 20 25 32 40 5.5 6 2.5 0.5 1 1.5 4.5 4 7.5 9.5 9 11.5 5.5 6 10 11 12 16 14.5 15 11.5 9.5 10 7.5 0 0 3.5 5.5 5 7.5 3.5 3 6.5 8.5 8 10.5 1.5 2 6 7 8 12 1.5(4) 4.5 5 9 10 11 15 2(4.5) Bore size (mm) 1.5(1) 3.5(1) 3(0.5) 5.5(3) Long stroke 12 16 20 25 32 40 1 0.5 6 8 10.5 16.5 11 10.5 16 18 20.5 26.5 9 9.5 13 14 12.5 16 5 5.5 9 10 8.5 12 7 6 11.5 13.5 16.5 22.5 5(2.5) 8 8.5 12 13 11.5 15 10

Flow Control Equipment

4.6 7.5 6 12 7.2 6.6 18 3.3 6.3 6.4 9.3 7.7 15.4 8.5 8.3 21 TMH-06J TMH-06 TMH-08 TMH-10 4.3 7.1 7.2 11 10 20 11 10.6 26.5 TMH-07 TMH-09 TMH-11 4.3 9.5 9.6 14 14 28 14.2 14.6 34 TMH-12 TMH-13 Note 1) Mounting bracket is not available.

Series KP/KPQ/KPG

20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection threads H 12 22 20.9 25 58 46 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

Series KP/KPQ/KPG

20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection threads H 12 22 20.9 25 58 46 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

Compact Vacuum Unit

Note 11) Be sure to hold the filter case when connecting and disconnecting the tube for the elbow type. Warning The filter case of this suction filter is made of nylon. Contact with alcohol or similar chemicals may cause it to be damaged.

asilltr

Series NCQT Male Rod End NGOQTOOO-OOM Threaded Mounting Holes (Both Ends) NCOQTOAO'OOO f. 056 (s16") #a-32 07s (31) *10-32 106 (11/re") 5/rc-24 150 (11/r-) 3la-24 200 (2) 1/z-20 250 (21/z\ 1/z-20 300 (3) 5/e-18 ,100 (4') e/+-16 MThreaded r06 (r-rlr6") i50 (r.r/2) M-Threaded 25O (2-1f2'l 3(xr (3') 4OO {4') 150 (11/r) Series NCDQT Constnrction / Autn Suitch Capable Double Acting Spring Return

MY1

MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 3.6 14.6 30 5.8 39.5 6 7 40.8 5.4 (Max.11) 4 20 32 5.8 45.5 3.6 6 10 RB0806 RB1007 40.8 5 (Max.11) 4 58 70 D24 38 6.5 53.5 7 12 3.5 46.7 5 (Max.16.5) 6 RB1412 RB1412 29 50 8.5 67 12 14 67.3 8 (Max.20) 88 104 4.5 6 -X 35 57 10 83 12 17 67.3 9 (Max.25) 4.5 6 RB2015 40 66 14 106 128 152 15 20 73.2 13 (Max.33) 6 5.5 Technical Data RB2015 52 77 14 129

Process Valve Series VNA

(mm) Symbol 3 2 1 Port size Rc 100 VAC 50/60 Hz 1 2 3 Note 1) 4 Symbol 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz Nil: Non-locking push type N.C. 1 MPa N.C. 0.5 MPa N.O. 1 MPa C.O. 1 MPa Note 2) Note) Note 2) 4 5 6 7 9 Other A: Non-locking push type A (projecting) 1 6A 8A 10A 1 8 1 4 3 8 24 VDC 12 VDC 7 Note 2) Valve size 1 to 4 Note 2) 240 VAC 50/60 Hz 11 15 11 10A 3 8 Note 2) B:

Digital Gap Checker ( compatible)

"Line name communication data" Value (16 decimal 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F number) 7 seg Display digit 11 seg Value (16 decimal 10 11 12 13 14 15 16 17 18 19 1A 1B 1C 1D 1E 1F number) 7 seg Display digit 11 seg Value (16 decimal 20 21 22 23 24 25 26 27 28 29 2A 2B 2C 2D 2E 2F number) 7 seg Display digit 11 seg Remark The value of cannot be displayed -105No.PS-OMW0009

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) With low load shock absorber + Adjusting bolts MY1W Bore size Stroke L TT h h E F EA h EB W F Stroke adjusting unit S (Shock absorber stroke) T MY1W16, 20 F MY1W50, 63 Shock absorber EC EY h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S

Compact Guide Cylinder Series MGQ

11 12, 16 4 14 6 9 21 2 20, 25 Over 50 stroke 50 stroke or less MGQM32 to 100 18 17 2 22 13 3 16 1 7 5 15 10 11 23 8 20 11 21 4 14 6 9 Over 50 stroke Component Parts Description Material Note Retaining ring Retaining ring Bumper A Bumper B Magnet Slide Bearing Felt Holder Ball bushing Piston seal Rod seal Gasket A Gasket B No.

Micro Mist Separator

Bowl Assembly Specifications 11-18 7. Assembly of Optional Parts 19 8. Operation and Adjustment 20-21 9. Trouble Shooting 22 10. How to Replace the Components 23-26 10-1. Bowl Assembly Replacement 23-24 10-2. Element Replacement 25-26 11. Disassembly Drawing 27 12.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Material Note PBT PBT Description Body A Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring Gasket 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 1 2 3 4 5 6 7 8 9 10 11 12 13 14 Body A Elbow body Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Electroless nickel plated Electroless nickel plated Electroless nickel plated Brass