Rotary Actuator

Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Type Special function Electrical entry Wiring (Output) M9NV M9N V V V v v IC circuit 3-wire (NPN) Solid state auto switch 5 V, 12 V 3-wire (PNP) M9PV M9P V V V v v 2-wire 12 V M9BV M9B V V V v v 3-wire (NPN) 5 V, 12 V M9NWV M9NW

MY1

12 12 11.5 11.5 Operating range Note) Operating range Note) Perpendicular electrical entry is not available for 50 and 63.

AC

Y type standard Y20M Y30M Y40M Y50M Y60M IS1000M-2 IS1000M-3 IS1000M-4 IS1000M-5 IS1000M-6 1.1-20 Interface/Bracket Accessories Interface AC AV AU Y30 AF AR Interface Model A Applicable model Model File IR 8 Y10 AC1000 to AC1020 Y10 SAC1000, #12 10 Y20 AC2000 to AC2040 Y20 SAC2000, #12 VEX AC2500 to AC2540 Y30 11 Y30 SAC2503, #12 AC3000 to AC3040 Y40 SAC4000, #12 AW Y40 14 AC4000 to AC4040

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

10 12.5 27 32 M5 x 0.8 5 9 ZQ 1.5 ZPT13F-B5 ZPT20F-B8 13 15 20 22 M8 x 1.25 8 12 10.5 13 27.5 36 ZPT16F-B5 ZPT20F-B01 2 16 18 Rc 1/8 6.2 14 ZF 15.5 12.5 ZPT25F-B5 32 M5 x 0.8 5 9 ZPT25F-B8 25 28 M8 x 1.25 8 12 ZP 36 ZPT25F-B01 40 50 8 01 Rc 1/8 6.2 14 ZPT F-B (Without buffer/Female thread) ZPT32F-B5 32.5 M5 x 0.8 5 9 ZCU ZPT32F-B8 16 13 32 35 M8 x 1.25 8 12 36.5 ZPT32F-B01 Rc 1/8 6.2 14

Compact Cylinder

(Refer to page 12 for contact protection box.)

3 Port Solenoid Valve Series VQ100 1

For DIN rail model number, refer to page 4-12-12.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

32 F J/K10-0-A14 (With Buffer) S S M14 x 1 M14 x 1 Width across flats 19 I 5 Width across flats 19 5 I 5 J 5 J Width across flats 12 Width across flats 12 Applicable tube O.D.

CE2

12-53 for details.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

OUT1 12 to 24 VDC 12 to 24 VDC Load Load Load White OUT2 White OUT2 Load Blue DC () Blue DC () -R: NPN (2 outputs) + Auto-shift input -S: NPN (2 outputs) + Auto-shift input -T: PNP (2 outputs) + Auto-shift input -V: PNP (2 outputs) + Auto-shift input Brown DC (+) Brown DC (+) Load Gray Auto-shift input Gray Auto-shift input Load + + Black OUT1 Black OUT1 12 to 24 VDC 12 to 24 VDC Load

Digital Flow Switches

White Load 50 OUT2 2 12 to 24VDC + Load (41.5) 3 Blue PF2W7T--67(-M) Connector pin numbers 4 3 77 34 2 1 Pin no.

MQQ

M6 x 1.0 52 8 10 28 5.4 9 55 10 6 7 25 10 to 50, 75, 100 96.5 M6 x 1.0 84.5 12 12 45 13.5 M6 x 1.0 60 4.5 10 12 34 5.5 9 58 10 49.5 7 7 28 10 to 50, 75, 100 116 M8 x 1.25 104 13 16 52 17.5 M6 x 1.0 69 5 14 12 40 5.5 9 71 10 57 10 7 With rod end male thread: MQQDM Rod end nut H1 Bore size (mm) L1 C1 H1 X 10 23.5 10.5 M5 x 0.8 15.5 16 26.5 11.5 M6 x 1.0 16.5 C1 20 28.5 13.5 M8 x 1.25 18.5

MQQ

M6 x 1.0 52 8 10 28 5.4 9 55 10 6 7 25 10 to 50, 75, 100 96.5 M6 x 1.0 84.5 12 12 45 13.5 M6 x 1.0 60 4.5 10 12 34 5.5 9 58 10 49.5 7 7 28 10 to 50, 75, 100 116 M8 x 1.25 104 13 16 52 17.5 M6 x 1.0 69 5 14 12 40 5.5 9 71 10 57 10 7 With rod end male thread: MQQDM Rod end nut H1 Bore size (mm) L1 C1 H1 X 10 23.5 10.5 M5 x 0.8 15.5 16 26.5 11.5 M6 x 1.0 16.5 C1 20 28.5 13.5 M8 x 1.25 18.5

MY1

IC circuit 3-wire (PNP) 2-wire 12 V Diagnostic indication (2-color indicator) Water resistant (2-color indicator) 100 V 3-wire (NPN) 5 V, 12 V IC circuit Relay, PLC Yes Grommet 24 V 3-wire (PNP) 2-wire 12 V 3-wire (NPN) 5 V, 12 V IC circuit M9PA1 M9PAV1 3-wire (PNP) 2-wire M9BA1 M9BAV1 12 V 5 V 12 V Relay, PLC Z76 Z732 A96 A93 A90 IC circuit 3-wire (NPN equivalent) Yes Grommet 24 V

Compact Hydraulic Cylinder

M9NW M9PW M9BW M9NA1 3-wire (NPN) Diagnostic indication (2-color indicator) IC circuit 5 V, 12 V 12 V Relay PLC 24 V 3-wire (PNP) 2-wire Yes Grommet 3-wire (NPN) IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PA1 M9PAV1 3-wire (PNP) 2-wire 4-wire M9BA1 M9BAV1 12 V 5 V, 12 V F79F IC circuit Diagnostic output (2-color indicator) A96V A72 A93V2 A96 A72H A93 A90 Relay PLC IC circuit

Digital Flow Switches, Series PF2A, Series PF2W

White Load 50 OUT2 2 12 to 24VDC + Load (41.5) 3 Blue PF2W7T--67(-M) Connector pin numbers 4 3 77 34 2 1 Pin no.

MXF

12 V M9PV M9P 3-wire (PNP) M9BV M9B 12 V Relay, PLC 2-wire 24 V Grommet F9NWV F9NW 3-wire (NPN) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) F9PWV F9PW 3-wire (PNP) 2-wire F9BWV F9BW 12 V Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Solid state switches marked with are produced upon receipt of order.

HRX-OM-S004

4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 8-6 Cooling capacity(HRS150-A-20/40/46/46-) 8.4 Cooling capacity HRS Series 8-12 HRX-OM-S004 Chapter 8 Documents : Facility water temperature 32 oC 8.4.3 HRS100-W-20/40/46: Facility water temperature 40 oC 14 14 12 12 10 10 Cooling capacity [kW] Cooling

HRX-OM-X071

5.4.1 Screen configuration . 5-12 5.4.2 Main menu . 5-12 5.4.3 Alarm display menu . 5-14 5.4.4 Notice for maintenance Menu . 5-15 5.5 Advanced setting mode . 5-17 5.5.1 Switch to advanced setting mode . 5-17 5.5.2 Display contents of monitor menu . 5-17 5.5.3 Display contents of the standard setting menu . 5-19 5.5.4 Alarm setting menu . 5-33 5.5.5 Communication setting menu . 5-46 5.5.6

T

(mm) 6 8 10 12 2.5 I.D.

Thomas Oil-less Rotary Vane Compressor / Vacuum Pump Flow Rate: 4.41 LPM , 4.41 LPM, Max Pressure: 1.4 PSIG / 97 mbar , 1.4 PSIG / 97 mbar, Max Vacuum: 7.4 in HgV / -250 mbar , 7.4 in HgV / -250 mbar, Voltage (DC): 12, DC Motor Type: Standard, Item Dimensions: Length: 3.07 in / 78 mm Width: 1.02 in / 26 mm Height: 1.14 in / 29 mm , Length: 3.07