S070

With the 0.1 W specification, the vibration and impact resistance is 10/50 m/s2 or less. Note 3) With the low vacuum specification, the operating pressure range is 1.33 102 Pa to the maximum operating pressure.

Electro-Pneumatic Proportional Valve Series VEF/VEP

cable O.D. 6 to 12 50 G1/2 4 x 9 Mounting hole 101.2 105.9 88.7 93.4 66 50 3 x 7 Mounting hole 52 891 A

Air Suction Filter Series ZFA 1

Pitch (Section F-F') Port size (The above diagram is for ZFA200) ZFA100 Port size Symbol Model A B 19 18 24 28 1 8 1 4 ZFA200 L1 1 Number of manifold stations Model Symbol 2 56 68 76 88 3 74 86 104 116 4 92 104 132 144 5 110 122 160 172 6 128 140 188 200 7 148 158 216 228 8 164 176 244 256 9 182 194 272 284 10 200 212 300 312 38 50 48 60 ZFA100 L2 L1 L2 ZFA200 13-10-3

For post-stoppage positioning and locking

Rc3/8 14 12 25 220 25 140 60 60 R5 50 118 160 270 210 60 2 x M8 x 1.25 thread depth 13 (External cover mounting screw) 4 x 11 10.5 (Clamp block mounting hole) 4 x 13 through 18 4 x 26 counterbore depth 9 2 x 8H7 +0.015 0 118 14 (Mounting hole) 500.03 32 25 15 44 140 20 35 10 18 18 82 10.5 (Fully open) 46 204 211 19 118 480 2 W-R1/W-R3 Series Specific Product Precautions Be sure to read this

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

33.8 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 3/4 3 33.8 1/8 30.4 75 8 93.2 44 35.8 70.8 M42 x 1.5 50 33.8 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 3/4, 1 3.2 43.3 1/8 40 90 7 125.2 44 43 80.3 70 43.3 66 65.8 11 13 90 3.2 1 3.2 43.3 1/8 44.5 95 4.5 129.6 44 46 80.3 70 43.3 66 65.8 11 13 90 3.2 Note 1) The dimension of B is the length when the filter regulator knob is unlocked.

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

9 Rod seal NBR Basic (B) CM2QB Bore size Stroke (mm) Stroke range 1 to 300 1 to 300 1 to 300 1 to 300 S 65 65 67 91 N 15 15 15 21.5 Bore A 18 22 22 24 B2 26 32 32 41 D 8 10 12 14 H2 8 8 8 10 I 28 33.5 37.5 46.5 ZZ 119 123 125 157 NA 24 30 34.5 42.5 AL 15.5 19.5 19.5 21 E F 13 13 13 16 K 5 5.5 5.5 7 NN M20 X 1.5 M26 X 1.5 M26 X 1.5 M32 X 2 B1 13 17 17 22 G 8 8 8 11 MM M8 X 1.25 P 1/8 1/8 1

AN

Rc(PT)1 48 to 50 Rc(PT)2 3 Make sure not to apply a lateral load to the body during or after the installation.

VM

F.O.F. 20N 30 O.T. 50 T.T. Adjustable Roller Lever/VM830-01-13 JIS Symbol 20N F.O.F. At lever length 38.1mm 20 P.T. 30 O.T. 50 T.T. Adjustable Rod Lever/VM830-01-14 JIS Symbol 2.3N F.O.F.

PF2A/PF2W

535 1 5 10 20 50 1 5 10 20 50 16-11-13 10 For details about certified products conforming to international standards, visit us at www.smcworld.com.

LG1H

LG1H/ Aluminum body LG1TH/ Stainless steel body LJ1 LG1 LC1 LX LC6D/LC6C Switches 50 10 10 50 Horizontal load 100% Horizontal load 50% 20 10 20 10 Horizontal load 100% Horizontal load 50% Amount of deflection m Amount of deflection m 500 1000 1000 500 200 100 200 100 50 20 50 20 10 10 5 5 Lateral load 100% Lateral load 100% 0.5 1 2 0.5 1 2 Lateral load 50% Lateral load 50% Horizontal empty

Compact Cylinder

21 17.5 27.5 24 8 8 30 5 29.5 M4 x 0.7 36 2.5 6 3.5 21 3.5 7.5 32 8 25 5 to 50 23.5 19 30 25.5 7 10 33.5 5 M5 x 0.8 40 2.5 8 4.5 24 3.5 8 36 8 32 5 to 50 26 21 32.5 27.5 12 12 41 5 M6 x 1.0 51 2.5 10 5 31 4.5 9 43.5 10 40 5 to 50 31 25 37.5 31.5 13 14 47 6 M8 x 1.25 60 3.5 12 6 37 4.5 11 50.5 10 6 JCQ Series Bore Size Standard (Through-hole): JCQ, JCDQ 50 to 100 50 to 80 Both ends tapped

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

12 13 107 44 20 16 47 64 148 M8 35 64 19 50 11 7 14 115 49 20 16 50 78 162 M10 38 77 19 63 16.5 16.5 13.5 6.5 16.5 Bore size (mm) J K L MM ML NN OA OB OL P PA PB PW Q R S T U VA 18 M8 x 1.25 7.5 M8 x 1.25 27 27 40 20 6.6 11 1/8 38 30 104 44 118 86 106 40 13 21.5 9 M10 x 1.5 9 32 32 46 22 8.6 14 1/4 47 40 130 60 146 110 130 50 M10 x 1.5 14 28 39 39 58 22 8.6 14 1/4 55 50 130 70 158 124 142

70pvpump

Since the marked point is below the curve for 50 l/min (ANR), the maximum rate will be about 50 l/min (ANR).

CJ2X/CUX/CQSX/CQ2X/CM2X

Nil C M 40 50 63 80 100 40 mm 50 mm 63 mm 80 mm 100 mm Standard stroke Refer to Standard Stroke on page 10-3-13. D Double acting Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

CJ2X/CUX/CQSX/CQ2X/CM2X

Nil C M 40 50 63 80 100 40 mm 50 mm 63 mm 80 mm 100 mm Standard stroke Refer to Standard Stroke on page 10-3-13. D Double acting Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

240

MXH MXH Vertical Horizontal MXS L1: Load eccentricity MXQ m Mounting orientation m MXQ L H MXF L H MXW Maximum speed (mm/s) Up to 100 Up to 300 x Up to 500 Up to 100 100 b 50 v 200 n 50 m Up to 300 100 , 200 .

125

/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz)[115 VAC (50/60 Hz)] 4 220 VAC (50/60 Hz)[230 VAC (50/60 Hz)] 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC * There is no S option for AC, since a rectifier prevents surge voltage generation.

Series CE1

Switch spacer Switch mounting nut 32 40 50 63 40 V V V V V V V V V 50 BQ-2 V V V 63 V V V Contact SMC regarding non-standard strokes.

Low Profile Guide Type

Note 2) There are four YA and YB dimensions with a 50 mm stroke.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

13 43 4 x M5 x 0.8 through (Thread for mounting attachment) When open G (mm) J 26 50 70 H 144 216 256 G 114 186 226 F 84 126 146 E 28 58 78 D 76 106 126 B C 45 75 95 A MHL2-16D MHL2-16D1 MHL2-16D2 112211221122114 168 208 40 70 90 929 Parallel Type Wide Opening Air Gripper MHL2 1122Dimensions MHL2-20D 11222 x 6.6 through (Hole for mounting body) A B C D 2 x M6 x 1 thread depth 7 (Mounting