212

0 q 4 Series LVR Dimensions Integral ttings/LQ3 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Model A B C D E LVR20-Z07(06) 40 40 49.3 68 20.1 LVR40-Z11(10) 82.5 82.5 89 115 33 LVR40-Z13(12) 82.5 82.5 89 115 33 LVR50-Z19 100 100 117.5 135 45 Breathing port M5 x 0.8 IN Model F G H J LVR20-Z07(06) 8 27 56 88 LVR40-Z11(10) 14 64.5 100 150.5 LVR40-Z13(12) 14 64.5 100 159.5 LVR50-Z19

Stations: 5 Stations, A, B Port: 04 (Side 1/2), SI Unit: QW (DeviceNet), P, R Port Size: 04 (1/2), P, R Port Location: U Side, Thread: T (NPTF)

Stations: 5 Stations, A, B Port: 04 (Side 1/2), SI Unit: 0 (w/o SI Unit), P, R Port Size: 04 (1/2), P, R Port Location: D Side, Thread: T (NPTF)

Stations: 4 Stations, A, B Port: 04 (Side 1/2), SI Unit: QW (DeviceNet), P, R Port Size: 04 (1/2), P, R Port Location: D Side, Thread: T (NPTF)

Stations: 8 Stations, A, B Port: 04 (Side 1/2), SI Unit: QW (DeviceNet), P, R Port Size: 04 (1/2), P, R Port Location: D Side, Thread: T (NPTF)

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Regulator AR30 to 60

Accessory/ Optional specification combinations : Combination available : Combination not available : Varies depending on the model : Available only with NPT thread Combination Accessories Optional specifications Applicable regulators Symbol Accessory/ Optional specifications B E G P 1 N R Z AR30 to 60 With bracket (with set nut) B Optional specifications Accessories Square embedded type pressure

Filter Regulator AW30, 40

Accessory/ Optional specification combinations : Combination available : Combination not available : Varies depending on the model : Available only with NPT thread Optional specifications Applicable filter regulator AW30, 40 Accessories Symbol Accessory/ Optional specifications Combination B C D E G P 1 2 6 8 C J N R W Z With bracket (with set nut) Float type auto drain (N.C.)

Clamp Cylinder with Lock Series CLK1

Hs B 16 14 14 26 29 (36) D-C73C 8.5 A D-H7C 8.5 A Hs B B Hs 14 36.7 38.2 D-G5NT D-B5, B6 B A Hs Hs B A 24.5 24.5 13 33 13 33 Hs D-A3 D-G3, D-K3 B A 49 B Hs A 49 34 56 18 36 18 36 B D-A4 Hs A 34.5 56 18 36 Minimum Strokes for Auto Switch Mounting (mm) 1in = 25.4mm Minimum strokes are as follows based on the space required for mounting auto switches.

Title not found

Range Back Pressure SMC 22 8.0 -750mmHg~58psi 0~100C 0~30psi (60psi) 136 150 75 Height Width Operator Dia. 1 LVQ60 LQ Seal Locations N u t S e a l L o c k T ubing Support T aper Surface T u b i n g T r ap e zoidal T h re a d s I n s e rt Bushing Nut Lock U.S. Patent #5,996,636 Quadruple Seal Maximum leak protection. Up to 215psi @ 200C.

REC

cable O.D.: 6.8 to 11.5) CE1 CE2 Proper Auto Switch Mounting Position D-H7 D-H7C D-H7NF D-H7W D-H7BAL D-C7 D-C80 D-C73C D-C80C ML2B D-G39 D-K39 D-A33/A34 D-A44 D-B5 D-B64 D-B59W D-G5NTL Bore size (mm) C J G5-S A B A B A B A B A B A B CV 20 56.0 31.5 50.0 25.5 55.0 30.5 51.5 27.0 53.0 28.5 49.5 25.0 25 MVGQ 56.0 31.5 50.0 25.5 55.0 30.5 51.5 27.0 53.0 28.5 49.5 25.0 32 59.5 36.5 53.5 30.5

REC

Setting Position (mm) D-C7 D-C8 D-C73C D-C80C D-G39 D-K39 D-A33, A34 D-A44 D-B5 D-B6 D-H7l D-H7C D-G5NTL D-H7lW D-H7lF D-H7BAL D-B59W Bore size (mm) A B A B A B A B A B A B A B 20 56.0 31.5 50.0 25.5 55.0 30.5 51.5 27.0 53.5 29.0 53.0 28.5 49.5 25.0 25 56.0 31.5 50.0 25.5 55.0 30.5 51.5 27.0 53.5 29.0 53.0 28.5 49.5 25.0 32 59.5 36.5 53.5 30.5 58.0 35.5 55.0 32.5 57.0 34.0 56.5 33.5 53.0

VER2000/4000

port regulator) ARB310-00-B ARB210-00-B Can be made into manifold with series VV72.

Body Size: 40, Backflow: K (w/Backflow Function), Thread: Rc, Port Size: 04 (1/2), Mounting: B (w/Bracket), Set Pressure: 0.05 to 0.85 MPa, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Unit: Name Plate and Pressure Gauge in Imperial Units; MPa

Body Size: 40, Backflow: w/Backflow Function, Thread: Rc, Port Size: 1/2, Mounting: w/Bracket, Set Pressure: 0.05 to 0.85 MPa, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Unit: Name Plate and Pressure Gauge in Imperial Units; MPa

Fluoropolymer Piping Equipment

(Example) Body class 3 A side: 10 x 8 B side: 8 x 6 Order as shown below. A SMC LVN30 S 10 08 B Different dia. tubing size (B side) Applicable tubing size (A side) 938 High Purity Fluoropolymer Needle Valve LVN Series Standard Specifications Model LVN20 LVN30 LVN40 4, 6 Tubing O.D.

Process Pump

Symbol C[dm3/(sbar)] b Cv N.C.

ITV

As a result, the vacuum pressure valve t which is linked to the diaphragm r opens, VAC and OUT are connected, and the set pressure becomes negative. This negative pressure feeds back to the control circuit i via the pressure sensor u.

IR1200-A/2200-A/3200-A

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.02 to 0.2 MPa V V V 1 0.02 to 0.4 MPa V V V 2 0.02 to 0.8 MPa V V V + ARM ARP e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR-A IR-A IR r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + IRV VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH t Port size SRP a

Compact Manometer Series PPA 1

JIS B 0203 (Taper threads for piping) Mounting section Thread JIS B 0211 Class 2 (Metric fine thread) Nut section Seal (Thread portion) With seal (Standard) Adaptor for copper family incompatible parts JIS Symbol Part C3604BD (Electroless nickel plated) 2 port valve 3 port valve A I I A Principal Parts Material P R P C3604BD, PBT Body Stud C3604BD (Thread portion) Chuck spring Stainless steel