PSxx-OMU0002CN

No.PS-OMU0002CN-D // ZSE20A(F) ISE20A 2 8 10 11 15 15 17 19 [] 22 23 3 24 26 28 28 28 F0 30 F1 OUT1 31 F2 OUT2 34 F3 36 F4 37 F5 FUNC 39 F6 41 F10 42 F11 48 F80 49 F81 50 F82 52 F90 53 F96 55 F97 56 F98 58 F99 60 61 65 65 66 75 75 78 -1No.PS-OMU0002CN-D 1 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

PSxx-OMU0005CN

No.PS-OMU0005CN-C // ZSE20B(F) ISE20B 2 8 10 11 15 15 17 20 [] 23 24 3 25 27 29 29 29 F0 31 F1 OUT1 32 F1 OUT2 35 F3 37 F4 38 F5 FUNC 40 F6 42 F10 43 F11 49 F80 50 F81 51 F82 53 F90 54 F96 56 F97 57 F98 59 F99 61 62 66 66 67 76 76 79 -1No.PS-OMU0005CN-C (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

Air Preparation Equipment

Number of arranged elements 4 7 9 18 22 Symbol Number of arranged elements 29 34 37 53 83 04 07 09 18 22 29 34 37 53 83 Symbol Nominal filtration accuracy (m) Note) Nominal filtration accuracy (m) 0.5 1 2 5 10 20 40 Symbol Nominal filtration accuracy (m) 50 70 74 75 100 105 120 X50 001 002 005 010 020 040 050 070 074 075 100 105 120 Symbol Element length Element length L250 L500 (L250 x 2

MHK2

MHC Note) Width at opening (mm) L2 Model Bore size (mm) Width at closing (mm) L1 Effective gripping force per finger (N) Action Opening/Closing stroke (mm) L2L1 Max. operating frequency (c.p.m) Mass (g) Symbol Specifications/Description MHT External grip: 14 Internal grip : 16 External grip: 27 Internal grip : 30 External grip: 45 Internal grip : 53 External grip: 79 Internal grip : 90 -X4

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

SET SET button Use this button to set the value or the set mode. y DOWN button ( button) Use to change the mode or decrease the set value. 53 Digital Flow Switch Series PF2D For Deionized Water and Chemicals Functions/PF2D Refer to the Instruction Manual for information on setting and operating.

SMC Basic Pneumatics

Cyl.Dia Mass (kg) T 60" 45' 30' e u 0.01 po.2 p 0.01 It 0.2 p 0.01 p 0.2 tr 0,01 It 0.2 25 100 50 25 12.5 51.8 (87.2) 80 40 20 1 0 32 180 90 45 22.5 54.9 (s5.6) 47.8 53 78.4 39.2 4 2.2 '| .

Clamp Cylinder with Lock Series CLK1

12 6 5 3-Rc 1/8 Unclamp side port 47 45 45 9.5 M10 x 1.25 12 40 26 26 10 Width across flats 10 Width across flats 36 R12 0.040 0.076 +0.022 0 Shaft: 10d9 +0.5 +0.2 12 12 6 Hole: 10H8 102 + Stroke 55 26 41.2 169 + Stroke Unclamp side lock (F) 3-Rc 1/8 Unclamp side port 3-Rc 1/8 Clamp side port 25 60 34 + Stroke 20 Rear cushion valve 12 4 53 12 6 5 47 45 45 19 9.5 M10 x 1.25 12 40 26 26 10

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

White] () OUT () Blue [Black] OUT () Blue [Black] DC () Blue [Black] Indicator light/Display method Proper Auto Switch Mounting Positions Solid state switches A 10.5 13.5 13.5 17.5 26 32 33 41 38 47.5 Reed switches A 6.5 9.5 9.5 13.5 22 28 29 37 34 43.5 Rotation angle Size Operation range m Operation range m Switch actuation range Switch actuation range B 13 22.5 18 30.5 34.5 53.5 45 68 53

Compact Type Dual-Rod Cylinder Series CXSJ

47 C 11 21 27 34.5 35.5 44.5 A 19.5 29.5 35.5 43 44 53 6 10 15 20 25 32 Note 1) 6: D-A90, D-A96, D-A93, D-F9BAL 10: D-A90, D-A96, D-A93 Only outward electrical entry (D dimension) is available.

Large Bore Compact Cylinder Series CQ2

Lead wire length Internal circuits Model 3m (~9ft) 0.5m (~1 1/2ft) 53 (1.9) 10 (0.35) D-Y59A, Y69A, Y7P D-Y59A, Y69A 50 (1.8) 9 (0.3) D-Y59B, Y69B, Y7PV Dimensions (mm) DC (+) Brown [Red] 1in = 25.4mm D-Y59A, Y59B D-Y7P Mounting screw M2.5 x 4l Main switch circuit OUT Black [White] Slotted-head set screw 2.5 3.4 Indicator light 6.2 6.2 5 DC () Blue [Black] 29 (500) (3000) (5000) D-Y7P (V)

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

through) 2-M5 x 0.8 thread depth 4.5 (piping port) IN 7 2-M3 x 0.5 (through) 13 + ST 2-M5 x 0.8 thread depth 4.5 (piping port) (same on reverse side) 10 2-M3 x 0.5 thread depth 4.5 (same on reverse side) 4 8 6 11 22.5 (13) (10 + 1/2ST) 4 Model ST 13 + ST 45 + ST 58.5 + ST 10 + 1/2ST CXS6-10-XB19 10 23 55 68.5 15 CXS6-20-XB19 20 33 65 78.5 20 CXS6-30-XB19 30 43 75 88.5 25 CXS6-40-XB19 40 53

Precision Cylinder Series MTS

N Backlash Manual unlocking Theoretical Output 12 16 20 40 Rear end only 125 211 29 53 82 329 1mm Non-locking type only Standard Strokes (N) Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm) Bore size (mm) Standard stroke (mm) 0.2 10 8 23 17 40 30 63 47 98 72 161 121 251 188 0.4 20 15 45 34 80 60 126 94 196 143 322 241 502 377 0.3 15 11 34 25 60 45 94 71 147 107

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 40 50 63 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 10 14 14 45 55 68 21 26 32 36 46 53 34.5 40 46.5 40 45 50 46 55 66 59 71 82 23.5 28 34.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63 M6 x 1.0 M8 x 1.25 M8 x 1.25 12 16 16 6 6 6 9.5 12.5 15 178 195 221 16 16 16 12 15 15 44 50 56

Cylinder with Lock Series MNB

Bore size (mm) Bore size (mm) B DA DB DL DU DC DX DE DO DR DT DS DH DD A B A+ B+ 90 Z H10 (Aperture) 32 40 50 63 80 100 54 42 32 22 44 14 62 9 6.6 7 33 224 10 15 + 0.058 0 10 32, 40 MB-B03 45 25 160 63 42 32 22 44 14 62 9 6.6 7 33 235 10 15 + 0.058 0 10 75 53 43 30 60 20 81 10.5 9 8 45 271 11.5 18 + 0.070 0 14 50, 63 MB-B05 60 40 190 90 53 43 30 60 20 81 10.5 9 8 45 285 11.5 18 + 0.084 0

Wedge Cam Operation Gripper Series MHK2

) MHKL2-20D 20 18 16 34 11.0 O.D. holding:17.8 (79) I.D. holding :20.2 (90) MHKL2-25D 25 22 19 41 19.8 MHKL2-12S 90 12 2.0 (9) 11 9 20 3.7 Normally open Normally closed MHKL2-16S 16 3.8 (17) 14 14.6 28.6 5.8 MHKL2-20S 20 7.2 (32) 18 16 34 11.1 MHKL2-25S Single acting 25 11.9 (53) 22 19 41 19.9 MHKL2-12C 12 2.5 (11) 11 9 20 3.7 MHKL2-16C 16 4.9 (22) 14 14.6 28.6 5.9 L1 MHKL2-20C 20 9.0 (40

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

Note 2) Refer to pages 53 through 65 for detailed auto switch specifications. Cylinder Bore Size MHS 2 D 50 32 to 63 Y59A Number of auto switches Nil S 2 pcs. 1 pc.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

142 14 45 17 18 115 35 18 108 60 55 15 15 25 to 1400 63 M12 x 1.5 90 165 63 10 27 19 14 43 35 1/2 52 148 18 50 19 20 132 41 19 106 71 65 15 20 25 to 1500 1/4 stroke 80 M16 x 1.5 110 190 80 11 22 22 16 44 44 3/4 65 166 18 60 24 24 155 45 20 124 74 80 17 20 25 to 1800 The maximum stroke is 1500mm for series CH2G only. 100 M18 x 1.5 135 230 102 11 22 22 18 44 44 3/4 75 172 22 71 27 28 190 53

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

19 above (2 sets) 12 MXP12-PS 16 MXP16-PS 6 Series MXP Dimensions MXPJ6 4-M3 x 0.5 depth 3 7 5 H 3 D B 18 1 0.05 3.5 16.5 14 13 20 6 F 6 6 5 2-M4 x 0.7 Piping port 13.5 Prepared hole dia. 3.3 2-M3 x 0.5 (Plug: M-3P) 17 0.05 Mounting reference planes B D M Stroke: S 1 5 J Z 2.4 Piping port 2-M3 x 0.5 (mm) MXPJ65 MXPJ6-10 SMXPJ6, #1 SMXPJ6, #2 F H J M S Z Model 25 38 27 37 5 44 MXPJ65 35 53

Air Slide Table Series MXQ

Model Axial piping type (S: Stroke mm) With end lock With buffer 20 30 40 50 75 100 125 150 10 Extension end Retraction end Extension end Retraction end Extension end Retraction end MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 5 10 100 120 140 180 200 25 5 6 13 + 0.2S 10 23 23 30 140 170 210 250 315 385 35 10 10 40 26 + 0.2S 23 30 35 47 335 340 380 450 490 745 655 70 23 25 100 43 + 0.2S 40 53

MXS Series Air Slide Table

Q Q MXS Series Q Q Q Product Features .pages 42-43 Q Q MXS Series Q How to Order .page 44 Specifications.pages 45-46 Q How to Select .pages 47-48 Q Table Deflection .pages 49-50 Q Stroke Adjuster .pages 51-52 Construction/ Parts List, Seal Kits .page 53 Q Dimensional Drawings.pages 54-65 Q How to Order MXS L (Symmetric type) .page 66 Dimensional Drawings MXS L (Symmetric