SY

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 40.1 39.3 18.8 3/5 R 3/5 R 3/5 R 3/5 R A 4 A 4 A 4 A 4 A 4 A 4 18 A 4 A 4 A 4 A 4 39.3 63.3 79.8 2-Plug [1 (P), 3/5 (R) port] 1 P 1 P B 2 B 2 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 2n1-One-touch fitting [4 (A), 2 (B) port] Applicable tube O.D.: 8 10 12 2n2-Rc 1/4, 3/8 [4 (A), 2 (B) port] 2-One-touch fitting

Table of Contents

Slide Bearing Felt Holder Ball bushing Spacer Aluminum alloy Replacement Parts: Seal Kit Bore size (mm) Contents Kit no. 20 25 32 40 50 MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS Set of nos. above @1, @2, @3, @4, #2, #3, $1, $2 Seal kit includes @1 to @4, #2, #3, $1, $2.

Table of Contents

ZPT2004U ZPT10UT 2 2 2.6 1.2 10 1.2 0.3 11 4 2.6 4.6 1 ZPT04U-B-A8 ZPT3507U ZPT13UT 4 3.5 4.8 1.8 13 1.6 0.8 0.5 14 7 4.3 7.8 1.5 ZPT06U-B-A8 ZPT4010U ZPT16UT 6 4 7 2 16 0.8 17 10 5 11 2.5 2.5 ZPT10CT 10 11 0.8 ZPT08U-B-A8 8 9 1 ZPT13CT 13 14 Dimensions by Stroke 1 16 17 F: M3 x 0.5 F: M5 x 0.8 E G H J G H D Model J ZPT 6-B-A8 46 18 15 44 ZPT10-B-A8 79 23 77 84 3 6 5 8 ZPT15-B-A8 28 43 82

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

9 13 11 13.5 17.5 21.0 A 9 7 9.5 13.5 17 B 10 10.5 13 13 13.5 19 21.5 20.5 29 31.5 B 15 17.5 16.5 25 27.5 A 5 8 8 8 9.5 13.5 11.5 14 18 B 10.5 11 13.5 13.5 14 19.5 22 21 29.5 32 A 2 5 5 5 6.5 10.5 8.5 11 15 18.5 B 7.5 8 10.5 10.5 11 16.5 19 18 26.5 29 A 8 12 10 12.5 16.5 20 B 12.5 18 20.5 19.5 28 30.5 A 12 16 14 16.5 20.5 24 B 16.5 22 24.5 23.5 32 34.5 A 11 15 13 15.5 19.5 23 B 15.5 21 23.5

5

D-M9mAV D-A3m D-A44 D-G39 D-K39 D-A9m D-A9mV D-A5m D-A6m D-A59W D-F5m D-J59 D-F59F D-F5NT REA D-P3DWA D-P4DW REB REC A B A B A B A B A B A B A B A B A B A B Bore size 32 10 8 6 4 0 0 4 2 6.5 4.5 11.5 9.5 0 0 3.5 1.5 5.5 3.5 3 1 Smooth Smooth 40 9 9 5 5 0 0 3 3 5.5 5.5 10.5 10.5 0 0 2.5 2.5 4.5 4.5 2 2 50 10 9 6 5 0 0 4 3 6.5 5.5 11.5 10.5 0 0 3.5 2.5 5.5 4.5 3 2 Low Speed 63 10 9 6 5 0 0

Made to Order

(mm) Bore size (mm) Without auto switch With auto switch Without auto switch With auto switch A B Q OA OB RA RC 12 16 20 25 30.5 30.5 34 37.5 17.5 17.5 19 21 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7 7 10 10 14 14 17 17 35.5 35.5 44 47.5 27 27 29.5 32.5 32 32 39.5 42.5 CQ2 series 2 x 5.5 through 2 x 2 x 9 counterbore depth 17 (Bottom side counterbore depth 7) Th9 10 10 B + Stroke

Series SV

With external pilot specification (Pitch) P = 24 11 25 24 20 13.7 E 3/5 E 3/5 E 3 E 3 4 4 A 4 A 4 A 4 A 4 A 4 A A 4 A 4 A 4 A 14.5 35.8 35 61.8 58.3 74.8 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 P 1 B 2 B 2 B 2 B 2 B 2 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 N11 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, N9, 10, N11, 12 X PE x PE Rc 1/4, 3/8 [4(A), 2(B)

LX

1 C 25 GD X60 Low Profile Slide Table Type LXPB 2 B 1 B C 50 F9N X60 Guide Rod Type X60 High Rigidity Slide Table Type C 50 F9N 1 B LXSH 2 B Motor type Low particulate generation specification 2 phase stepper motor 5 phase stepper motor 2 5 Number of auto/proximity switches Ball screw B Lead screw type 1 2 1 pc. 2 pcs.

ZP

6 7 7 Width across flat 10 Width across flat 10 2 2 D 2 2 D M5 x 0.8 2 M5 x 0.8 M8 x 0.75 M8 x 0.75 10 22 A B 10 22 A B Square 8 Square 8 4 4 15 15 1.8 1.8 8.4 13 2 10 6 Dimensions (per stroke) Dimensions (per stroke) Weight (g) Weight (g) 11 Model Model 14 A A B D B D Rotating (K) Non-rotating (J) Rotating (K) Non-rotating (J) ZP3-Y10B:3-B5 ZP3-Y10B:6-B5 ZP3-Y10B:10-B5 ZP3-Y13B:3-B5 ZP3

Fluoropolymer Piping Equipment

Port size 1 2 1 2 1 2 3 4 5 6 8 1 2 3 4 1 2 3 1 2 3 1 1 2 2 3 3 3 3 3 3 3 4 4 4 4 5 5 5 6 6 6 1 2 2 3 3 3 3 4 4 4 4 5 5 5 6 6 6 7 A A B A B C D A B C D A B C A B C A 1/8" 1/8" 1/8" 1/4" x 5/32" 1/8" 1/4" 1/4" 6 x 4 1/8" 10 x 8 8 x 6 10 x 8 8 x 6 10 x 8 1/4" 3/8" x 1/4" 1/8" 3/8" 1/2" 1/4" 1/4" 3/8" 1/2" x 3/8" 3/8" 1/2" 8 x 6 1/2" 1/4" 3/8" 1/2" 3/4" 3/8" 1/2" 3/4" 1/2" 3/4" 1" 3/4" 3/8"

Hydraulic

) Load (kN) 126 Technical Data 2 Series CH2E, CH2F, CH2G, CH2H Stroke range limit charts: Bore sizes 50, 63, 80, 100 Bore size 50 B-rod C-rod 5 2 4 8 3 7 2 4 8 3 7 5 2000 6 1 6 1 1000 Stroke (mm) 500 100 50 0.5 1 5 10 20 30 0.5 1 5 10 20 30 Load (kN) Load (kN) Bore size 63 B-rod C-rod 2000 1 2 8 5 4 3 7 6 1 2 3 5 4 8 7 6 1000 Stroke (mm) 500 100 50 0.5 1 5 10 20 50 0.5 1 5 10 20 50 Load (

SQ1000/2000

B A B A B A B A B A B A 4 SMC 47.5 56 37.6 53.6 B 2 18.5 Approx. 12 Approx. 12 EXH outlet Applicable connector: D-sub connector (25P) D side U side Stations 1 2 3 4 5 6 7 8 n (conforming to MIL-C-24308) C10: EXH port C10: SUP port For top ported Approx. 10 R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 62 41.5 25.5 39.5 (58) 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 21 P 1 P = 17.5 63.3 44.5 7.5 2n-C4, C6, C8

Table of Contents

C common view) 2 10 38.5 22 (76) 70 11 25 2 12 0 0.05 5 0 0.03 5 0 0.03 4 Open: 37 Closed: 19 2-M5 x 0.8 thread depth 10 (Thread for mounting attachment) 25 25 7 7 10 10 12-5-16 17 2 Finger Rotary Actuated Air Gripper Series MHR2/MDHR2 With auto switch (Built-in magnet): MDHR2-30R 76 73 B 3-M5 x 0.8 thread depth 10 MDHR2-30E Port Location P .C.D.43 (Mounting thread) MHZ 80 MHF 120 MHL MHR

V100

Flow Characteristics With DIN terminal block With terminal block Port size Flow characteristics 2 3 (A R) b Cv C [dm 3/(sbar)] 1 2 (P A) b Cv C [dm 3/(sbar)] 26 38 0.38 0.30 7.0 9.8 27 38 0.37 0.32 7.4 9.8 27 40 0.36 0.22 7.3 9.8 25 40 0.37 0.20 6.8 9.6 2 1 (A P) b Cv C [dm 3/(sbar)] 3 2 (R A) b Cv C [dm 3/(sbar)] 1/2 3/4 Port size Effective area (mm2) 2 3 (A R) 1 2 (P A) 235

CQ2

Rod end nut FootAdd foot bracket (#2) to SCQ2 Bore size B, #10. Front flangeAdd front flange (#3) to SCQ2 Bore size B, #10. Rear flange Add rear flange (#4) to SCQ2 Bore size B, #10.

Table of Contents

size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.

ZP

) Width across flat 10 (Hexagon) P Q Q P 5 5 S S 31 8 31 (39) (39) 14.9 14.9 R R 6 6 M5 x 0.8 M5 x 0.8 8 Y Y C A A a a C b B 20 21 Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y Model ZP2-R3507W--B5 ZP2-R4010W--B5 ZP2-R5010W--B5 ZP2-R6010W--B5 ZP2-R4020W--B5 ZP2-R5020W--B5 ZP2-R6020W--B5 ZP2-R8020W--B5 2 x 1.5 0.5 0.5 10 11 2.5

Table of Contents

Burst Pressure Characteristics Curve and Operating Pressure Specifications 10-TCU 10-TFU 10-TFU 10-TCU 0425B-2 0425B-3 0604B-2 0604B-3 0805B-2 0805B-3 3 cores 2 cores 3 cores 2 cores 3 cores 10-TFU 10-TFU Model Tubing O.D. (mm) No. of cores 2 cores 4 6 4 8 5 2.5 Tubing I.D.

SX

28 A COM B + A B A B A 42 18.4 2-4.2 Manual override (Press and turn for the locking type.) 2-One-touch fittings (Mounting hole for manifold) 71.9 2-4.2 42 18.4 (Light/Surge voltage suppressor) Applicable tubing O.D.: 8 10 (A, B port) (A, B port) 2-One-touch fitting (Mounting hole for manifold) 71.9 (5.5) Applicable tubing O.D.: 8 10 (5.5) 48.6 (Light/Surge voltage suppressor) 33.3 48.6 31.5

Electric Actuator/Slider Type

5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.