Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

5 !6 !7 !8 !

Short Stroke Electric Actuator Series LX

234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12 With brake 274 CE Marking _ Page 282 Made to Order AC servomotor specification _ 288 Low particulate generation specification _ 294 Construction _ 296 Mounting _ 299

air-filter-e

, 100 Fiber 65 x L250 1, 5, 10, 20 5, 10, 20, 40 74, 105 Micromesh 65 x L250 Refer to pages 256 and 257 for the replacement element type.

Air Preparation Equipment

, 100 Fiber 65 x L250 1, 5, 10, 20 5, 10, 20, 40 74, 105 Micromesh 65 x L250 Refer to pages 256 and 257 for the replacement element type.

HRX-OM-X084

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-9 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-X084 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

A_HEC-OM-K001

I C o n s t a n t Function Sets integral time used for PID control/ M O D E < 1 5 0 s e c 5.5 How to operate 5-10 A_HEC-OM-K001-1.7 Chapter 5 Operation <6> D constant setting: Mode indication D Constant Default value: 0 sec. Setting range 0.0 to 99.9 sec. Indicated contents D constant (Derivative time) D Constant indicates that it is D constant setting mode.

Thermo-chiller

(Fe) [mg/L] 0.3 or less v v Copper (Cu) [mg/L] 0.1 or less v Sulfide ion (S2) [mg/L] Should not be detected v Ammonium ion (NH4+) [mg/L] 0.1 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Free carbon (CO2) [mg/L] 4.0 or less v Reference item 5 s 2 s 1 s Min. 0.5 s 0.2 s 0.1 s *1 In the case of [Mcm], it will be 0.003 to 0.01.

Plug-in Unit

(metal) (A) 4 (B) 2 (A) 4 (B) 2 5 Note) S kit is only available for 24 VDC. 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 2 Function 2 position double (rubber) 3 position perfect (A) 4 (B) 2 (A) 4 (B) 2 Nil R Y Standard type (1 W) External pilot Low wattage type (0.5 W) 6 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) When specifying more than one option, enter symbols in alphabetical order. 3 position

LG1H

Applicable strokes: 150, 250, 350 Example) LG1H2021PA-150-F2-X2 100 5.3 8.3 400 7.7 12.0 5 to 40 (with no condensation) 200 6.1 9.6 300 6.9 10.8 mm kg kg C kg N mm/s mm Standard stroke Aluminum Stainless steel Body weight Operating temperature range Work load Rated thrust Maximum speed Performance 30 180 500 0.02 AC servomotor (100W) Incremental system Ground ball screw 15mm, 10mm lead High

Micro Mechanical Valve Series VM1000

VZM400 5 port (A) (B) 2 4 Metal spool 12 3 1 5 14 Best Pneumaticsz-2 (EB) (P) (EA) Side ported 1/8 VZM500 5 port (A) (B) 2 4 Rubber spool 12 3 1 5 14 (R2) (P) (R1) VFM200 5 port (A) (B) 2 4 Metal spool 12 3 1 5 14 (EB) (P) (EA) Side ported 1/4 VFM300 5 port (C2) (C1) 2 4 Rubber spool 12 3 1 5 14 (E1) (S) (E2) Front matter 2 2/3 Port Mechanical Valve Series VM100 RoHS Compact size Piping

Compact Type

(mm) Overhang L (mm) Graph V = up to 800 mm/s (up to 700 mm/s for 15, 20) 4 CXSJM CXSJL Graph V = up to 600 mm/s 3 CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15, 20. 4 Series CXSJ Horizontal Mounting V = up to 400 mm/s V= = up to 800 mm/s V = up to 400 mm/s V= = up

LECP6_C

mm mm/s mm/s mm mm mm mm/s 0 ABS 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 28 - TB No.

45

S 5 VDC Mixed M Common specifications for the valve must correspond with common specifications for the manifold.

Series AP500

Material Code Body Poppet Diaphragm Nozzle S 316L SS Elgiloy 316L SS 316L SS secondary remelt Pressure gauge unit3) Seat material Hastelloy C-22 SH Code Unit psig/bar MPa Code Material PCTFE (Standard) PTFE4) Vespel 5) No code MPA No code TF VS Surface finish Surface finish Ra max 15 in. (0.4 m) Standard 10 in. (0.25 m) 7 in. (0.18 m) 5 in. (0.13 m) Code 3) Pressure gauge unit MPa or psig

LX Series Compact Electric Actuators

; 6mm lead @5 stepping 200 @q 12mm lead I a-.1 Teaching Box See Page 40 Low Pmfils tlEctrh Slide lilE Specif ications Stroke(mm) 25, 50, 75, 100 Motol 5-phase stepping motor Screw(mm) 08, Lead 6 s8, Lead 12 68, Lead 2 s8, Lead 5 Max. pay load (horlzontal orientation) 30N (6.6 rb) 20N (4.4 rb) 30N (6.6 rb) 30N (6.6 rb) Max. speed 100mm/s 200mm/s 30mm/s 80mm/s Positioning repeatability :tO

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

5 !6 !3 !2 !1 !0 q t r i S u y o !4 !8 !

10

Shock absorber Load Load Graph q/RJ06 Graph w/RJ08 Graph e/RJ10 8 30 5 25 Impact mass m [kg] Impact mass m [kg] Impact mass m [kg] 4 6 RJ0604 20 RJ0806L RJ1007L 3 4 15 2 10 2 RJ0806H RJ0805 1 RJ1007H 5 RJ1006 0 0 0 0 500 1000 1500 2000 0 200 400 600 800 1000 0 500 1000 1500 2000 Collision speed [mm/s] Collision speed [mm/s] Collision speed [mm/s] Graph r/RJ14 Graph t/RJ20 Graph y/RJ27

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Enclosure: IP65 Leakage Select from 2 Piping Directions. 1 x 10-10 Pam3/s Rear ported Bottom ported 1 x 10-5 Pam3/s Applicable Fluid Examples Welded structure for sensor units and fitting parts Select from a face seal or compression fitting.

e-Rodless Actuator

1500 Speed (mm/s) Speed (mm/s) Speed (mm/s) Load weight / E-MY2C E-MY2C/m1 E-MY2C/m2 E-MY2C/m3 60 60 60 50 50 50 30 30 30 20 20 20 Load weight (kg) Load weight (kg) Load weight (kg) E-MY2C25 E-MY2C25 10 10 10 E-MY2C25 E-MY2C16 5 5 5 E-MY2C16 E-MY2C16 4 4 4 3 3 3 2 2 2 1 1 1 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 Speed (mm/s) Speed (mm/s) Speed

MK

Do not clamp on a slanted surface. 5. Make sure that the workpiece does not move during clamping. J D-X 20Data Fig. (5) Fig. (6) 10-7-3 4 Rotary Clamp Cylinder: Standard Type Series MK 12, 16, 20, 25, 32, 40, 50, 63 How to Order MK A S F9BW 20 10 R F Number of auto switches Nil S 2 pcs. 1 pc.