CE A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV
1 r #5 @3 @8 #6 y u t !5 #7 #8 @6 w !6 e &0 q &0 #4 #3 $8 $0 %9 ^0 #9 $6 $7 %9 !2 #1 !3 $9 %0 %1 !0 @2 @1 #2 ^2 ^5 $5 %2 @5 ^8 $4 ^1 @4 %4 %5 ^7 $3 #0 $2 %6 @7 ^4 o %7 ^9 ^6 @9 %8 ML2BS $1 %3 ^3 !
CHKDB Bore size Rod end thread type Stroke Y7BA S R Water resistant cylinder Water resistant solid state switch with 2-color display NBR Seal (nitrile rubber) FKM Seal (fluoro rubber) R V F9BA Y7BA 20 and 25 32 to 100 Refer to page 2 for specifications.
ZZ + Stroke Model B C D E(h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 30-0.033 32-0.039 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 100 38 66 72.2 26 122 69 0 M10 x 1.5 x 16 188 M14 x 1.5 x 11.5 70 70 192 Mounting nuts/2pcs. packaged with each cylinder d C H d B C Part No.
DC+ 1 Brown q N.C. 2 Not used w DC 3 Blue e IN: 1 to 5 V 4 White r Power supply/Output connector (8P) Power supply/Output connector (accessory) i u y t r e w q Pin No. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.
Base, Body Seal Aluminum NBR, FPM, EPR Model Manifold base Port A Rc(PT) Port P Rc(PT) Port R Rc(PT) VVXA311-stations VVXA312-stations VVXA321-stations VVXA322-stations ManifoldO Manifold style Manifold stations B mount 2 to 10 stations 1 8 1 4 1 8 1 4 1 4 1 4 4.1-73 VVXA31/32 Common (C.O.)
AP Tech 316L SS secondary remelt steel conforms to the SEMI standard F20 UHP grade. [Hastelloy] Trademark of Haynes International A nickel-chromium-molybdenum alloy with excellent corrosion resistance. [Elgiloy] Trademark of Elgiloy Specialty Metals A cobalt-chromium-nickel alloy with excellent corrosion resistance and superelasticity.
Panel mount adapter (Part number: ZS-26-B) Front protective cover (Part number: ZS-26-01) [F20] Setting of external input Accumulated flow external reset [F22] Setting of analogue output Free range analogue output for instantaneous flow: OFF * Do not operate the product outside of the specifications. Do not use for flammable or harmful fluids.
This is a legacy product, and replaced byPF3A712H-F20-FS-M, DIGITAL FLOW SW, INTEG SENSOR, INSTRUMENTATION, IF/PFA FLOW SWITCH, KX, IF/PFA 2 INCH ALL OTHER, 5.26102 lb, ModelMeasured fluidDetection typeRated flow range Note 1)Minimum set unit Note 1)Note 2)Display unitsOperating pressure rangeProof pressurePressure lossAccumulated flow rangeLinearity Note 3)RepeatabilityPressure
.: 10 (ø10mm), Option: F20 (Fixed set pressure type (0.2 MPa))
.: 10 (ø10mm), Option: F20 (Fixed set pressure type (0.2 MPa))
.: 08 (ø8mm), Option: F20 (Fixed set pressure type (0.2 MPa))
.: 12 (ø12mm), Option: F20 (Fixed set pressure type (0.2 MPa))
.: 06 (ø6mm), Option: F20 (Fixed set pressure type (0.2 MPa))
.: 10 (ø10mm), Option: F20 (Fixed set pressure type (0.2 MPa))
.: 08 (ø8mm), Option: F20 (Fixed set pressure type (0.2 MPa))
.: 10 (ø10mm), Option: F20 (Fixed set pressure type (0.2 MPa))
.: 12 (ø12mm), Option: F20 (Fixed set pressure type (0.2 MPa))
.: 12 (ø12mm), Option: F20 (Fixed set pressure type (0.2 MPa))
.: 06 (ø6mm), Option: F20 (Fixed set pressure type (0.2 MPa))