Safety Instructions

Combination screw M3 Tightening torque 0.5 to 0.6 Nm Combination screw M3 A Conduit terminal View A-A (Internal connection diagram) G + mark mark + 1 2 Series VC A Conduit When used as an IP65 equivalent, use seal (Part no. VCW20-156) to install the wiring conduit. Also, use the tightening torque below for the conduit.

Plug-in Unit

Terminal block cover 6mm M3 screw Mounting screw (M4) Gasket Electrical entry 4-G1/2 Step 3. How to replace the terminal block cover Securely tighten the screws to the torque shown in the table below, after confirming that the gasket is installed correctly.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 3) 52-SY series are not available with resin type manifold (45 type). 4 B ATEX Compliant Body Ported Type Series 52-SY5000 Dimensions 2-position single L plug connector (L) 52-SY5120-L-01 (-F2) In case with foot bracket 52-SY5120-L-01-F1 22.6 21 47 16.7 4.5 38 16.6 1.2 22 29 2 x M3 x 0.5 Threads depth 3.5 (For bracket mounting) 65 2 x 3.2 (Mounting holes) 14.7 Insulation: Black () 11.6

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Speed controller standard in-line style, Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2, Port sizes: M3, M5, 01, 02, 03, 04, SPEED CONTROLLER, INLINE TYPE, AIRLINE EQUIPMENT, AS FLOW CONTROL, FB, AS 1/2INCH STANDARD (PT), .50080 lb, ModelPort sizeFree flowControlled flowApplicable cylinder bore size

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Round head screw (M3 x 8), 4 pcs. EX600-ZMV2 (Specified for SY series) Enclosed parts: Round head screw (M4 x 6), 2 pcs. Round head screw (M3 x 8), 4 pcs. (2)End plate bracket EX600-ZMA2 Enclosed parts: Round head screw (M4 x 20), 1 pc. P tight screw (4 x 14), 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4x20) with washer, 1 pc.

EX260-SEC-A_eng

(SI unit side) Valve manifold Output No. 1 3 5 7 9 17 29 31 Solenoid on side B Accessories Bit No. 1 3 5 7 1 1 5 7 Replacement of the SI unit Remove the M3 hexagon screw from the SI unit and release the SI unit from the valve manifold. Replace the SI unit.

Fieldbus system Ethernet POWERLINK compatible SI unit

Round head screw (M3 x 8) , 4 pcs. EX600-ZMV2 (Specified for SY series) Enclosed parts: Round head screw (M4 x 6) , 2 pcs. Round head screw (M3 x 8) , 4 pcs. (2) End plate bracket EX600-ZMA2 Enclosed parts: Round head screw (M4 x 20) , 1 pc. P tight screw (4 x 14) , 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4 x 20) with washer, 1 pc.

4-channel Flow Monitor ( compatible)

Withstand voltage -13No.PF-OMA1011-A Mounting and Installation Installation Mounting by panel mount adapter Fix the panel mount adapter to the Controller with the set screws M3 x 8L (2 pcs.) as attached.

VN-OMP0002

0.5 ~0.6 Nm + G 1/2 M3 0.5 ~0.6 Nm M3 0.5 ~0.6 Nm A-A () 1) 2) 3) 30 1) 2) 1 0.1MPa 5 VN-OMP0002 Series Series Series Series 1 DC AC VT307 VNA ( ) (JIS B2301)(JIS B 2302) VNA (JIS B 6349) VNA 1 ISO VG32 VNA ( JIS K 6439) VNA VNA VNA VNA AS AS AS AS VNA AS 10A 111 420-03 3/8 B(9.5) 12 12 12 12(P1) (P1) (P1) (P1) 10(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) 15A 211 420-04 1/2 B

VN-OMP0001

0.5 ~0.6 Nm + G 1/2 M3 0.5 ~0.6 Nm M3 0.5 ~0.6 Nm A-A () 6 VN-OMP0001 VNC VNC VNC VNC VNH VNH VNH VNH / / / / 1 DC AC VT307 12(P1) 12(P1) 12(P1) 12(P1) 10(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) Air operated Solenoid Port VNC02 12 (P1) External pilot Bleed port External pilot 10 (P2) Bleed port External pilot Pilot exhaust Ass Ass Ass Ass y y y y VNH VNH VNH VNH () 3 3 3 3

Speed controller with one-touch fittings , Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2 , Maximum operating pressure 1MPa, Meter in or meter out control , Port sizes: M3, M5, U10/32, 01, 02, 03, 04 , Various tube O.D. in both metric and inch, FLOW CONTROL W/FITTING *LQA, AIRLINE EQUIPMENT, AS***F 1/2INCHSTANDARD (NPT), .21958 lb

0.01

Description Note Material Bracket set 1 SFD-BR100 With 2 countersunk head screws (M3) IDK e AMG AFF SFD200-C Component Parts No. Description Note Material AM Element 1 PC, Polyolefin, PU o !

VP300/500/700

Remove pilot valve mounting screws (M3, 2 pcs.), rotate the pilot valve at 180 and then re-tighten the valve with the screw.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Real-time switch output Unit switching Hysteresis mode ON YES Accumulated flow l Display Real-time flow rate l/min OFF P-1 P-2 Real-time flow rate GPM gal (US) "P" Window comparator mode H : Hysteresis GPM = gal (US)/min H H Note) Fixed SI unit (l/min, l, m3 or m3x10) will be set for the type without the unit switching function.

Pin Clamp Cylinder Series CKQ/CLKQ

Hexagon socket head cap screw Round head Phillips screw With spring washer, M3 x 0.5 x 14 L With spring washer, M3 x 0.5 x 16 L Switch mounting fitting Magnetic field resistant auto switch Mounting bracket kit number Items and number of each item Switch mounting bracket x 1 Switch mounting nut x 1 Round head Phillips screw x 1 Hexagon socket head cap screw x 2 Spring washer x 4 BQP1-

Uniaxial Electric Actuator Series LJ1

M1 W 10 50 100 L1 10 30 20 0 0 2 4 6 8 10 0 1 2 3 4 5 Work load (W) kg Work load (W) kg Work load (W) kg 300 30 150 L2 200 20 M2 100 L2 mm L2 mm L2 mm W 100 10 50 L2 M2 0 10 30 20 0 1 2 3 4 5 0 2 4 6 8 10 Work load (W) kg Work load (W)kg Work load (W) kg 30 300 150 a=500 a=500 a=500 Horizontal/Lateral a=1000 a=1000 a=1000 20 200 100 a=2000 a=2000 L3 mm L3 mm L3 mm a=2000 L3 100 10 50 W M3

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

ZQ-OM01401

1) 3 A L 3)Assy R 1) V PV PS 1 1) V V (2)PV (3)PD PS PV PD PS PV PD L B C R B C 8 - No.ZQ-OM01401-B 2. 2.1 () (PE) (2 ) (P) (V) (PS) (PV) V 9 - No.ZQ-OM01401-B (PE) (2 ) (P) (2 ) (4 ) (PV) PS 1 PD PD 2 EXH 2 10 - No.ZQ-OM01401-B 3. 3.1 3.1.1 () 1) (2x3.2) 2) (0.54~0.66Nm) 2 3.1.2 () 1) (ZQ1-BK1-A) (2x 3.2) (4x3.2) 2)0.54~0.66Nm 4 3.1.3 1) () PD M3

ZISE80.eng

Danger: Switch ON At normal output Switch OFF Maintenance Time [s] M3 x 5 L M3 x 5 L Operator How to reset the product after a power cut or forcible de-energizing The setting of the product will be retained as it was before a power cut or de-energizing.

EX260-SDN_eng

Designation Contact layout Power supply connector Power supply with load voltage for valves (M12 4-pole plug, A-coded) 3 1 Diagnostic information The technical document states detail diagnostic information can be found on the SMC website (URL http://www.smcworld.com) 2 1 4 Ground terminal Functional earth (M3 screw) 2 +24 V for solenoid valve 5 Output connector Output signal interface for