Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: 02 (Rc1/4), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)

Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: 02 (Rc1/4), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)

Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: 02 (Rc1/4), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: 02 (Rc1/4), Output Specification: L3 (Out 1: IO-Link or NPN/PNP, Out 2: Analog 1-5V), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)

Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: 02 (Rc1/4), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

B C d H MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M NTJ-015A NT-015A NT-02 NT-03 NT-04 8 9.2 6 15.5 5 9.2 M5 x 0.8 4 10 20.5 10 8 8 9.2 8 16.5 6 11.5 M6 x 1.0 5 16 22.5 16 10 8 9.2 10 18.5 6 15 M8 x 1.25 5 20 24.5 20 13 10 11.5 12 22.5 11 19.6 M10 x 1.25 6 25 33.5 25 17 14 16 16 28.5 12 25.4 M14 x 1.5 8 30, 40 40.5 30, 40 22 Applicable bore size (mm) Part no.

Precision Cylinder Series MTS

20 15 75 100 125 150 175 200 New New MTS8 Rubber bumper MTS12 Female threads (standard) MTS16 MTS20 Air cushion Male threads (optional) MTS25 MTS32 MTS40 Features 2 Series MTS 8, 12, 16, 20, 25, 32, 40 Precision Cylinder How to Order Port direction Bore size Nil P Standard piping type Axial piping type 8 8mm MTS 8 A90L 20 8 MTS 20 A90L 100 12 to 40 Bore size Number of auto switches Nil S

Positioning Driver Series LC6C

Specifications How to Order LC6C 220 A D LX2 24VDC 10% Max. 3.0A 28 points Compatible actuator Power supply Number of setting positions Power supply Setting with dedicated teaching box (LC51T102) Position setting method D 24VDC Motor type Absolute and incremental moves Speed: 6 to 200mm/s (0.2 to 8in/s) [with feed screw lead of 12mm (0.5in)] 220 2-phase motor (2A/phase) Position control

Pneumatic Positioner IP300/IP3100

TYPICAL INSTALLATION S ngle Actnq Aciuoio' Splined Shaft Fitting Assembly (long) (c) 210050-31 Connecting feedback shaft to main spindle of actuator.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

Mounting position U U side SY5000 SY3000 D D side Symbol Port size 4 One-touch fitting C4 Symbol Port size 4 One-touch fitting C4 6 One-touch fitting C6 Mixed M 6 One-touch fitting C6 Valve stations 8 One-touch fitting C8 Mixed M Stations Symbol Note Single wiring specifications (up to 16 solenoids are possible) Indicate mixed specifications separately on a manifold specification sheet. 02

IR30-OM00013

2 ( A ) m 2 5- I R 3 0 0 1 SUP OUT 2 3%F.S. 3 R B(P36203018) G 2 3 RcF N IR3000G43-2-01 G43-P2-N01-X30 IR3010G43-4-01 G43-P4-N01-X30 IR3020G43-10-01 G43-P10-N01-X30 02:1/4 03:3/8 04:1/2 Rc FG NNPT 00.010.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R302BG No.

PSxx-OMR0001CN

4No.PS-OMR0001CN-J 1 / (5 m ) CE 50 N 30m DC(-)() () IP67IP65 -5No.PS-OMR0001CN-J 1 41 LCD VX2 (2 )AR20 () -6No.PS-OMR0001CN-J 2 (0.01 mm0.03 mm0.02 mm0.15 mm0.05 mm0.30 mm) ON()/OFF()() (A)() (B)() (C)(B)() -7No.PS-OMR0001CN-J 2 2 9 0.010.03mm 0.020.15mm 0.050.30mm DIN F G H 7 10 B Rc1/8 4 1 C 6 2 1 3 G1/8 F 3 G1/8 7 NPN1 PNP1 N P L 4 7 5 M SI N 1 2 3 4 5 6 1 2 S

PSxx-OMT0001CN

4No.PS-OMT0001CN-E 1 / (5 m ) CE 50 N 30m DC(-)() () IP67IP65 -5No.PS-OMT0001CN-E 1 42 LCD VX2 (2 )AR20 () -6No.PS-OMT0001CN-E 2 (0.01mm0.03mm0.02 mm0.15 mm0.05 mm0.30 mm) ON()/OFF()() (A)() (B)() (C)(B)() -7No.PS-OMT0001CN-E 2 2 DIN 9 F 0.010.03mm 0.020.15mm 0.050.30mm G H 7 10 B Rc1/8 4 1 6 2 1 3 G1/8 G1/8 3 7 NPN2 PNP2 A B 4 L 7 5 SI N 1 2 3 1 2 3 4 5 6 S

VF1000-OMP0001

DIN DIN DIN DIN DIN D 68mm Y 4.57mm T 68mm E 2.32.8mm E, T 1.25-3, 1.25-3S, 1.25Y-3N, 1.25Y-3S D,Y R Y Z EZTZDZLZMZ AC24V (+) D C S VF1000 VF1000 VF1000 VF1000 VF3000 VF3000 VF3000 VF3000 VF5000 VF5000 VF5000 VF5000 () P P(SUP) P A B A(CYL2) B(CYL1) A B EA EB R1(EXH2) R2(EXH1) R1 R2 (B)2 4(A) (B)2 4(A) (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) 3(R2) 1(P) 5(R1) JIS () Z (B)2 (A)4 1:P

VFR2000-OMM0001

(N.O.)3 3 B 1.VFR200 2.VFR210 P8 0.9Nm -10No.VFR2000-OMM0001 ) ARBF2000 P 1.0MPa 1) 0.05to0.83MPa 2) -5to60oC ()3) M5X0.8 (kg) 0.16 PA 5.5 (mm2) P1=0.7MPa,P2=0.5MPa S PB 5.1 DIN DIN DIN DIN / / / / AEA 12 (mm2) DIN 180 P2=0.5MPa S BEB 11 )0.9MPa ) )50oC )2 ) P A B -11 No.VFR2000-OMM0001 01C 01T COM A (A B B AB ) COM AB+ BVFR2100 A COM VFR2200 A COM B 3 400 5 A COM

Type of Actuation: 2 (2 Position Double), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: Internal Pilot, Specifications: Standard, Voltage: S (5VDC), Electrical Entry: MO (M Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: S (Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: 02 (Base Mounted w/Sub-plate

This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, MALE RUN TEE S/S, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, FX, KQ(X23) 6MM, 2.57938 lb, Applicable tubing O.D. (mm)Connection threadsModel M5 type R type6R 1/4KGY06-02

This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, MALE ELBOW S/S CLN RM, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, L5, KQ(X23) 12MM, 2.33767 lb, Applicable tubing O.D. (mm)Connection threadsModel M5 type R type12R 1/4KGL12-02

This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, MALE CONNECTOR S/S, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, FH, KQ(X23) 6MM, .04905 lb, Applicable tubing O.D. (mm)Connection threadsModel M5 type R type6R 1/4KGH06-02