100

Pressure range 100 to 100 kPa 30 inHg to 14 psi Scale range (Angular) 230 3-port solenoid valve SYJ500 series Accuracy 3% F.S.

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

MTS

A B Hs A B Hs Hv Hv Hv Hv 12/16/20 12/16/20 Hs Hs 25/32/40 25/32/40 Proper Auto Switch Mounting Position Solid state switch Bore size (mm) 2-color indication solid state switch Reed switch D-A9 D-A9V D-M9 D-M9V D-F9W D-F9WV A B C A B Hs Hv A B A B Hs Hv A B C A B Hs Hv C 15.5 15 20 20 15 19.5 19.5 19.5 19.5 46 46 46 46 18 13 15.5 35.5 42 31.5 42 31.5 12 17 17 22 22 17 21 21 21 21 47.5 47.5

240

or less 100 70 30 3 100 15 1 LEC 11.

5 Port Solenoid Valve SY Series

4/25/3 (A/BEA/EB) Grommet Cv b C (kdm3/ 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ L, M plug W M8 L, M plug W M8 1, 5, 3 4, 2 (A, B) 1, 5, 3 4, 2 (A, B) DIN terminal (sbar)) Cv b C (kdm3/ (sbar) ) Cv b C (dm3/ (P, EA, EB) (P, EA, EB) connector 51 53 68 74 connector 57 82 connector 101 104 120 125 connector 129 175 (sbar) ) (sbar) ) Single Single 2 position 125 167 2 position 0.23

Bag Filter

B to Nominal filtration accuracy of 5, 10, 25, 50, 100 m can be selected.

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

: 3.5MPa Series CHQB B 32 to 100 D-A9 D-F9 D-F9W A Approx.

Compact Type

9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.

SYJ300/500/700

It can be used in the vacuum (up to 100 kPa) or low pressure line with 0.15 MPa or less.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Foot Refer to page 5 for accessories Without auto switch With auto switch Without/with auto switch Long stroke Standard stroke (mm) Standard stroke (mm) Long stroke (mm) Bore (mm) LS B 20 20 29 29 A 32 32 41 44 LS 50.3 50.3 62.7 66.2 B 10 10 17.5 17.5 A 22 22 29.5 32.5 LS 40.3 40.3 51.2 54.7 B 5 5 7.5 7.5 A 17 17 19.5 22.5 12 16 20 25 35 to 100 35 to 100 75 to 200 75 to 300 5 to 30 5 to

Ionizer

Power supply 24 VDC B B B Ground with a ground resistance of 100 or less without connecting the DC1 () lead (Blue) of the power supply cable to the power supply 0 V. Red A A +24 V Black Blue Charged object Charged object 0 V Reduced-wiring Fieldbus System F.G. (mm) Ground with a ground resistance of 100 or less. A B When using the autobalance sensor (body-mounting type) 10 20 20 40 3.

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

3.5MPa Series CHQWB B 32 to 100 D-A9 D-F9 D-F9W A B Approx.

Series VQ Base Mounted Metal Seal/Rubber Seal

A B A B A Void A Void A B A B A B A A A B Double Double Double Double Double SY Sl unit Sl unit Single Single Single Single Single SYJ Stations Stations 1 2 3 4 5 1 2 3 4 5 Single/Double mixed wiring (Option) Double wiring (Standard) SX SC applicable to SYSBUS Wire System (OMRON) SD applicable to Satellite I/O Link System (Sharp) VK VZ ADDRESS NO. STATION NO.

Electric Actuators

282 LXPB5SB LXPB2SB LXPB5SA LXPB2BC LXPB5BC LXPB2BD LXPB5BD LXPB2SA LXPB5SB-B LXPB2SB-B LXPB5SA-B LXPB2BC-B LXPB5BC-B LXPB2BD-B LXPB5BD-B LXPB2SA-B 5 phase 240 to 200 2 phase 224 284 to 200 5 phase 238 to 100 2 phase to 30 218 5 phase 234 to 30 294 2 phase 220 to 80 5 phase 236 to 80 2 phase 222 to 100 304 5 phase 248 to 200 284 2 phase to 200 232 5 phase 246 to 100 2 phase 226

Slider Type/Ball Bushing Bearing

B 4 x Counterbore depth.

CE

phase J 24-M3 x 0.5 A B C D t A COM COM COM B DC12V GND F.G.

Intrinsically Safe Valve

4/25/3 (A/BEA/EB) Valve model (P, EA, EB) 4, 2 (A, B) 1, 5, 3 4position dual 3 port Cv b C [dm3/ (sbar)] Cv b C [dm3/ (sbar)] N.C.

VQ4000

pilot port) 44 62 9 9 91 44 62 Station number 50.5 59 2-Rc 1/8 (External pilot port) R4.5 R4.5 50.5 9 9 U side entry (LU) U side D side D side U side n 15 X X n X 12 12 12 12 8 B 2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A

Compact Cylinder

(Note: Reed auto switches for 100 VAC and 100 VDC are not within the specification.

ML2B

Side support B MY-SB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.