Compact Cylinder

Lateral load Operating pressure: 1 MPa 1000 200 300 500 Stroke Eccentric distance 100 100 Load weight (kg) 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 63 Allowable lateral load (N) 50 40 63 1 32 25 20 50 40 10 32 0.1 25 10 100 200 300 500 1000 Maximum piston

10-cls-e

Seal kit includes a grease pack (125 to 160: 40 g, 180, 200: 50 g, 250: 60 g). Order with the following part number when only the grease pack is needed.

90

Flow Rate Characteristics Relief Characteristics IR1020-01-A Supply pressure: 0.7 MPa IR1020-01-A Back pressure: 0.7 MPa 0.7 0.7 0.6 0.6 Set pressure [MPa] Set pressure [MPa] 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 0 0 50 100 150 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Pressure Characteristics Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate:

Bag Filter

100 50 20 1 Low 1 Fluid indicator Water, Coolant (water-soluble), Cleaning fluid Equivalent to honey Coolant (oil-based) 100 200 300 400 500 FGF1 Paint 300 600 900 1200 1500 FGF3 35 58 85 90 95 100 Flow coefficient (%) 500 1000 1500 2000 2500 FGF5 These relationships between fluids and kinematic viscosity are for guideline purposes only.

Fluoropolymer Piping Equipment

Withstand Pressure and Heat Resistance Performance 4.0 3.5 3.0 Pressure (MPa) 2.5 2.0 1.5 1.0 0.5 0 20 40 60 80 100 120 140 160 180 200 Temperature (C) 1/8", 3/16", 1/4", 4, 6 tubing 3/8", 10 tubing 1/2", 12 tubing 3/4", 19, 1" tubing Piping Caution 1. Connect tubing with special tools 2.

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

Rated voltage CE-compliant For DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted type CE-compliant For AC (50/60Hz) 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] Electrical entry 24, 12, 6, 5, 3 VDC / 100, 110, 200, 220 VAC Grommet L plug connector M plug connector G: Lead wire length 300 mm L: With lead wire (Lead wire length 300 mm) M: With lead wire (Lead wire

Miniature Regulator

300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) ARP Pressure Characteristics (Representative Values) IR-A IR Conditions: Inlet pressure 0.7 MPa Outlet pressure 0.2 MPa Flow rate Q = 20 L/min (ANR) 0.30 IRV Outlet pressure (MPa) 0.25 Set point VEX 0.20 SRH SRP 0.15 SRF 0.10 0.2 0.3 0.4 0.5 0.6 0.7

Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump, 230/50/60/1 Flow Rate: 43 LPM , 43 LPM, Max Pressure: 2.9 PSIG / 80 in H20 / 200 mbar , 2.9 PSIG / 80 in H20 / 200 mbar, Max Vacuum: 5.9 in HgV / -200 mbar , 5.9 in HgV / -200 mbar, Voltage (60 Hz): 230, Voltage (50 Hz): 230, Frequency (Hz): 50 / 60, Phase: 1-phase, Item Dimensions: Length: 8.15

Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump, 230/50/60/1 Flow Rate: 43 LPM , 43 LPM, Max Pressure: 2.9 PSIG / 80 in H20 / 200 mbar , 2.9 PSIG / 80 in H20 / 200 mbar, Max Vacuum: 5.9 in HgV / -200 mbar , 5.9 in HgV / -200 mbar, Voltage (60 Hz): 230, Voltage (50 Hz): 230, Frequency (Hz): 50 / 60, Phase: 1-phase, Item Dimensions: Length: 8.15

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation)100 W/;40AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)4514528445Non-magnetizing lock1316.324 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation)100 W/;40AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)4514528445Non-magnetizing lock1316.324 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

EX260-SEC-A_eng

Designation Description 2 Fieldbus interface connector (BUS IN) EtherCAT connection (M12 4-pole socket, D-coded) 4 5 2 *1: Blinking pattern SV24 V +24 V for solenoid valve 1 Power supply connector Power supply with load voltage for valves and operating voltage for SI unit (M12 5-pole plug, A-coded) 3 2 SV0 V 0 V for solenoid valve 200 ms 200 ms 1 SI24 V +24 V for SI unit operation 3 4 Ground

EXxx-OMU0020CN

EX245-EA2-1/2 9.1. . 9-1 EX245-EA2-1 . 9-2 EX245-EA2-2 61 No.EX-OMU0020CN 9.2. . 9-1 EX245-EA2-1 (WLH) mm 28.612061.5 200 g . 9-2 EX245-EA2-2 (WLH) mm 1412061.5 200 g EX245-EA2-2 P 36, 0.80.05Nm) 62 No.EX-OMU0020CN 10. 10.1. (EX245-DX1EX245-DY1) 88 EX600-ZT1 . 10-1 (EX600-ZT1) 63 No.EX-OMU0020CN 10.2.

PFxx-OMP0001CN

kpa [kpa] [kpa] 200 kpa 400 kpa 400 kpa [L/min] [L/min] PFMB7202(2000L/min) 200 kpa [kpa] 400 kpa [L/min] -65No.PF-OMP0001CN-F IN 3F.S.8 cm IN OUT [cm] -66No.PF-OMP0001CN-F PFMB7501/7102/7202 2x A B D E F H K L N PFMB7501/7102 70 30 43.7 37.2 15 14 26 18 13.6 PFMB7202 90 35 49.2 42.7 17.5 24 31 28 16.8 S T U V W PFMB7501/7102 24 22 32 40 50 PFMB7202 30 30 42 48 58 -67No.PF-OMP0001CN-F

LV50-OMQ0002

. *1 Applicable fluidconductivity *1 5S/cm or more (micro Siemens/cm) Detecting method Electro static cupacity Ground*10 Negative ground Rated flow range 0.5 to 20 L/min 2.5 to 100 L/min 5 to 200 L/min Display range 0.424.0 L/min 2.0 to 120.0 L/min 4 to 240 L/min Set point range 0.424.0 L/min 2.0 to 120.0 L/min 4 to 240 L/min Zero-cut flow *2 0.4 L/min 2.0 L/min 4 L/min Min. setting unit