VNB

VXA I (DIN terminal: D) VN Main port Rc A Model B C D E F G H I J K L M N P Q R S T U LVC VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 63 42 28 14 72.5 80.5 74.5 79.5 82.5 124 125.5 142.5 52 26 4.5 24.3 2.3 25 34 55 LVA 80 90 50 60 35 40 17.5 20 84 100 92 108 83.5 89.5 88.5 94.5 91.5 97.5 135.5 151.5 137 153 154 170 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 60.5 73 LVH Port size

LJ1H

25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140

ITV

50 75 1.0 0 2 6 4 8 1.0 100 0 25 50 75 10 Input signal (%F.S.)

EX600-DX_DY_DM_eng

24 23 22 21 20 19 18 17 16 15 14 25 24 23 22 21 20 19 18 17 16 15 14 Digital I/O unit Digital output unit EX600-DM E EX600-DM F EX600-DY E EX600-DY B EX600-DY F Configuration Configuration Configuration Configuration Configuration 3 4 1 2 5 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 2 1 3 5 4 7 6 9 8 11 10 13 12 2 1 3 5 4 7 6 9 8 11 10 13 12 7 6 5 7 6 5 Group Group

VXP21/22/23

Model Power source Frequency (Hz) 50 25 12 60 20 8 AC VXP21 DC 50 45 20 60 40 15 AC VXP22 DC 50 60 25 60 50 20 AC VXP23 DC Operating Fluid and Ambient Temperature High temperature water (3) Operating fluid temperature (C ) Ambient temperature (C ) Steam (3) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E) High temperature oil (3) (D) (S) 99 100 183

0.5

Red flashes if the CPU is abnormal. q w e r t y u Green lights up when emitters require cleaning.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEF How to Order LEJ 11 Vacuum type LEJS 11 40 S2 A 500 H LEL Clean series q w e r y u i o !0 !

LEH_C

(F.S.),LEHZ32,40:20(F.S.) 2) () 3) 5m 5m 10%(15m 20%) 4) 5) () 6) () 7) () 452000Hz 1 () 8) () 9) 11 - 2.1.2 6N LEHZ 10 K 4 2 1 R 1 2 10 10 D DIN D DIN 16 16 1DIN 2 0 2 0 I/O (m) L ) L ) 25 25 ) 10,16,20,25 32 32 1.5 1 1.5 1 40 40 3 3 3 3 5 5 5 K K 5 (mm) NPN NPN 10 LECP6 ( PNP PNP 4 4 10 LECP1 1 LECP1 ( 1 NPN NPN 6 6 16 16 1P 1P PNP PNP 20 10 20 10 25 14 25 14 AN

PFxx-OMO0004CN

-2No.PF-OMO0004CN-E / 1 1.5 *3) 1 1 [] -3No.PF-OMO0004CN-E () () () N2 () -4No.PF-OMO0004CN-E () * UL UL1310 2 UL1585 2 ,30[Vrms]42.4[V ] 2 UL , 100 N2 050 () JISB 8392-1 1.1.21.6.2 -5No.PF-OMO0004CN-E * FG (49 N () ,IN () () -6No.PF-OMO0004CN-E * 6 33 () 30 m DC(-)() -7No.PF-OMO0004CN-E * () () CE 050 -8No.PF-OMO0004CN-E * 10 /23% 3 * OUT * 23 -9No.PF-OMO0004CN-E PFMB

Ionizer

Static Neutralization Characteristics 1) Installation distance and discharge time (Discharge time from 1000 V to 100 V) High speed static neutralization cartridge Air purge: Yes Supply pressure: 0.02 MPa (1 L/min (ANR) per nozzle) Air purge: No 30 45 25 40 60 Hz 35 1 Hz Discharge time (s) Discharge time (s) 1 Hz 20 30 15 Hz 5 Hz 25 15 20 Sensing DC 10 15 Sensing DC 1 Hz/60 Hz 60 Hz 30 Hz

HRX-OM-S004

30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 8-5 Cooling capacity(HRS100-A-20/40/46-) 8.4.2 HRS150-A-20/40/46: Ambient temperature: 32 oC : Ambient temperature: 40oC : Ambient temperature: 45 oC 18 18 16 16 14 14 Cooling capacity [kW] Cooling capacity [kW] 12 12 10 10 8 8 6 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30

Flow Control Equipment

Meter-out Graph/Pressure to time Meter-in Graph/Pressure to time Movement of the cylinder by fixed throttle valve c ontrol valve d e Movement of the cylinder e p s y b er by meter control Pressure Stroke Pressure Stroke Pressure Stroke e cylind ement of th PH Delay in pressure transmission Mov PR (Atmospheric pressure) Delay in pressure transmission PR (Atmospheric pressure) During the operating

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

DB Bore size (mm) Bore size (mm) AA E BD 75st, 100st Larger than 100st 37 57 63.5 64 75st, 100st Larger than 100st 50st 25st 50st 25st 50st 75st, 100st 25.50st Larger than 50st 25.50st Larger than 50st 25st Larger than 100st 114 134 160 180 25.50st Larger than 50st 147 168 188 93 63 80 100 63 80 100 41 45.5 46 118 142 162 106.5 115 137 172 198 233 20 25 30 16 160.5 171 208 29.5 18.5 21 25

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure

rep-modular-e

2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

VXD21/22/23

Model Power source Frequency (Hz) 50 25 12 60 20 8 50 45 20 60 40 15 50 60 25 60 50 20 AC VXD21 DC AC VXD22 DC AC VXD23 DC Operating Fluid and Ambient Temperature Operating fluid temperature (C ) High temperature oil (3) Ambient temperature (C ) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E, N, P) High temperature water (3) (D, N) 99(4) 100(4) AC

LEF-OM002xx

Speed Speed Acceleration Deceleration Position In pos ON INP output ON OFF 25 - Step No. 1: Positioning operation a b c d e f g h i j k Step data No.

Air Cylinder NCM Series Stainless Steel Cylinders

0.50 0.95 0.45 3.91 106 (1%6) 0.312 %-24 0.50 0.624 0.25 1.12 o.12 2.75 0.88 %-1a o.62 '1.05 4.00 125 l1%l 0.437 hf20 0.75 o.749 0.34 1.32 o.25 3.41 1.06 %-16 0.88 1.37 0.74 15O l1%) o.437 o.75 0.749 o.38 1.56 o.25 3.3A 1.25 3a-16 0.8a 1.25 0.62 5.12 @ gtc' Series NCM Single Acting Spring Rehrrn/Spring Extend Air Cvlinder StainlesJ Steel Cylinder 250 PSr (17.5 25 PSt (1.75 40-140"F 2*20