1

30 d (D) (C) (D) (C) H B H B Part no.

RSQ

D-J79W D-F79F, D-F7NTL D-F7BAL 32 to 50 D-A79W D-F7WV D-F7V D-F7BAVL D-A73C D-A80C D-J79C RS H A D-A7 D-A8 RZQ MI W S CEP1 U U U U CE1 A B CE2 32 to 50 ML2B D-A9V D-M9V D-F9WV D-F9BAL D-A9 D-M9 D-F9W C J G5-S U U B CV MVGQ CC A RB Proper Auto Switch Mounting Position Auto Switch Mounting Height (mm) J D-A7H D-A80H D-A73C D-A80C D-F7 D-J79 D-F7V D-J79C D-F7BAVL D-F7BAL D-F7W D-J79W

LFE-OMY0008

[%F.S.] 2.0 1.5 1.0 0.5 0.0 0 1 2 3 4 5 [s] [S] [MPa] [MPa] [MPa] [MPa] [ [ [ [ ] ] ] ] 2 69 No.LFE*-OMY0008 / / / / A B C 1 V 1.1 V 5 V 4 mA 4.4 mA 20 mA [L/min] LFE1 0.5 20 LFE2 2.5 100 LFE3 5 200 70 No.LFE*-OMY0008 2x )M12 () 1.6mm A B C D E F G H I J K L LFE13 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26 3/4 105 78 50 29 67

Modular Type Filter Regulator Series AW

Note 2) Symbol Nil B C D E G H Port size Body size Symbol Port size Float type auto drain (N.O.)

EXxx-OMZ0016

(mm SQ) ZS-28-C-1 24~26 0.14~0.2 1.0~1.2 Yellow ZS-28-C-2 1.2~1.6 Orange ZS-28-C-3 22~20 0.3~0.5 1.0~1.2 Green ZS-28-C-4 1.2~1.6 Blue ZS-28-C-5 1.6~2.0 Grey ZS-28-CA-1 0.6~0.9 Orange ZS-28-CA-2 0.9~1.0 Red 0.1~0.5 ZS-28-CA-3 1.0~1.15 Yellow ZS-28-CA-4 1.15~1.35 Blue ZS-28-CA-5 1.35~1.6 Green -98No.EX-OMZ0016-C (5) NFC reader/writer EXW1-NT1 This set includes an NFC reader/writer and a USB

Thermo-chiller

D-G

Pneumatic Transfer System Series MF

H H J I I G Note 1) G Note 1) J J I G Note 1) Y Y C Y C C E (A) E E (A) (A) B B 45 45 45 B X X X X C C C SMC G Note 1) G Note 1) I G Note 1) I J J F H F J (D) I (D) RG RT RS B 720 819 C 300 303 D 376 449 E R310 R445 F 60 87 G 93 129 B 780 851 C 301 300 D 369 418 E R390 R495 F 60 87 G 93 129 B 730 790 C 302 304 D 424 508 E R350 R440 G 93 129 H 302 327 A 791 916 A 823 906 A 835 934 15 32 15

HRX-OM-W032

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

KJ

L1 L2 M D I.D.

Refrigerated Air Dryer

B IDFB4E to 15E A Power cable outlet 0.7 [17 mm] Grommet with membrane Signal cable outlet 0.7 [17 mm] Terminal block (Wire diameter 0.4 [9 to 11mm]) Grommet with membrane Power cable outlet 0.7 [17 mm] IDFB4E to 11E_Terminal block C D A B Terminal block Dimensions Unit: inch [mm] A B C D Model B B 9.0 [230] 2.6 [67] 7.0 [179] 1.3 [32] IDFB4E, 6E, 8E, 11E A Power cable outlet 0.7 [17 mm]

VS 8-2/VS 8-4

VSR8-2-FDCG-D VSR8-4-FDCG-D VSR8-2-FDBG-D VSR8-4-FDBG-D VSR8-2-FDAG-D VSR8-4-FDAG-D 6 A 4 A 3 A 1 A 5 B 2 B Output COM. 1 2 3 4 5 6 7 8 9 10 IP65 enclosure compliant 4-position dual 3-port valves (Rubber seal only) kit (Terminal block box) L Model A side B side Symbol Connector wiring diagram (Mixed wiring) Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4

7.4

O-ring Port plug Body Ported Base Mounted Blanking plug (For One-touch fittings) KJP-02 A L Dimensions [mm] Applicable fitting size d Model A L D Weight [g] 2 KJP-02 8.2 17 3 0.1 3.2 KQ2P-23 16 31.5 5 1 4 KQ2P-04 16 32 6 1 23 KQ2P-04 D Silencer (For manifold EXH port) Body Ported Base Mounted Silencer is installed in the EXH port.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

C D D Note) Be sure to use a flat washer for the A type mounting. b) B type mounting (when using the cylinder tube threads) E t E t Compatible Mounting Bolt Dimensions A type mounting B type mounting Model Mounting bolt size D: Bolt length (mm) E (mm) C (mm) Mounting bolt size MQQTB10-D MQQTB16-D MQQTB20-D MQQTB25-D MQQTB30-D MQQTB40-D MQQLB10-D MQQLB16-D MQQLB20-D MQQLB25-D MQQLB30-D MQQLB40

Magnet: D (Built-in), Mounting: L (Foot), Bore Size: 40mm, Stroke: 200mm, Rod End Thread: Male Thread, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: C (Auto Switch Mounting Bracket)

Magnet: D (Built-in), Mounting: L (Foot), Bore Size: 50mm, Stroke: 200mm, Rod End Thread: Male Thread, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: C (Auto Switch Mounting Bracket)

Magnet: Built-in, Mounting: Foot, Bore Size: 40mm, Stroke: 200mm, Rod End Thread: Male Thread, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 3m, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: Auto Switch Mounting Bracket

Magnet: Built-in, Mounting: Foot, Bore Size: 50mm, Stroke: 200mm, Rod End Thread: Male Thread, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 3m, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: Auto Switch Mounting Bracket

Magnet: D (Built-in), Mounting: L (Foot), Bore Size: 25mm, Stroke: 200mm, Rod End Thread: Male Thread, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: C (Auto Switch Mounting Bracket)

Magnet: D (Built-in), Mounting: F (Front Flange), Bore Size: 32mm, Stroke: 200mm, Rod End Thread: Male Thread, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: C (Auto Switch Mounting Bracket)

Magnet: Built-in, Mounting: Foot, Bore Size: 25mm, Stroke: 200mm, Rod End Thread: Male Thread, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 3m, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: Auto Switch Mounting Bracket