VH600 VR Option VH300 VH410 VH VH300/400 Bottom ported VH210 VHS VH200/300/400 Panel mounted All models applicable Different P port location (On handle side) Note that 1(P) port of VH600 is located on handle side as standard.
100 200 300 400 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH3100-02 SRH3110-02 SRH3100-02 0.5 0.20 0.20 0.4 Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 0 100 200 300 400 0 2 4 6 400 100 200 300 0 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min SRH4000-03 SRH4010-03 SRH4000-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet
25, 32, 40, 50, 63 Sine Rodless Cylinder Series 12-REA How to Order Clean series 12 Special treatment on sliding part Bore size (mm) 12 R E A 25 300 Cylinder stroke (mm) Type Port type Symbol Nil TN TF Rc NPT G Model Bore size (mm) Maximum manufacturable stroke (mm) Port size Lubrication Model Standard stroke (mm) Rc1/8 NPT1/8 G1/8 Rc1/4 NPT1/4 G1/4 12-REA25 12-REA32 25 32 40 200, 250, 300
Table 3.8-2 RTU mode message frame a)Start b)Slave Address c)Function d)Data e) Checksum (CRC) f)End T1-T2-T3-T4 XX XX XX XX XX XX T1-T2-T3-T4 a) Start In Modbus RTU mode, message frames are separated by a silent interval (non-communication time).
Table 3-6 RTU mode message frame a) Start b) Device Address c) Function d) Data e) Checksum (CRC) f) End T1-T2-T3-T4 XX XX XX XX XX XX T1-T2-T3-T4 a) Start In Modbus RTU mode, message frames are separated by a silent interval (non-communication time).
(Station 5) Type of actuation Light/Surge voltage suppressor 1 2 3 4 5 6 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center 3 position double check Nil E Yes Without light, with surge voltage suppressor Prefix the asterisk to the part nos. of the solenoid valve, etc.
K Screw for bracket Panel mounting bracket (Standard) Type E snap ring M Plate Operation on the panel front permits mounting. Holes for mounting bolts are not necessary. (Mountable panel thickness is 5 mm maximum.)
0 -0.05 0 -0.05 E AL TE 2-TC K F TA DL2 TF TG A S + Stroke H NA F ZZ + Stroke Section TA With non-locking type manual override (suffix N) With locking type manual override (suffix L) HN HR MO RF WL WL KA 0.1 C 8-J NA (mm) Stroke range Bore size (mm) A AL B1 C D DL2 E F GA GB H H1 HR HN (max.)
$6" " 6 " " " w 0C4,D 4 e B 6 !" r B " " $6y t " 5 ' % " $60C4,D 4 B u % " " B 17-3-98 3 Series VVXA21/22 Direct Air Operated 2 Port Valve/Manifold For Air, Gas, Vacuum and Oil The VX series will be revised shortly.
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
3 e r !2 !1 u t w y CHK CHN CHM CHM CHS CH2 o !
SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice.
Usable stroke by buckling strength Usablestroke by Mounting style buckling strength (cm) Pressure Symbol and sketch (MPa) Symbol of bracket Rod side Frang e F Head side flange 103 92 113 Foot: 79 70 86 L G 66 58 72 45 38 47 33 27 34 26 22 27 96 83 106 Center Clevis trunnion 71 61 76 CD T 59 50 62 135 119 147 101 89 111 84 74 91 Rod side Frang e F Head side flange 301
3 r e o y !5 !6 q r i o e y !5 !6 !0 y i o e u r !9q !7 !0 !1 i !2 t u !7 @0 !1 q !2 t !6 !5 !7 !2 t !0 !1 Component Parts Note Description U seal U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Gasket Spacer ASD230F only Material HNBR HNBR POM, Stainless steel (1) Description No. !1 !2 !3 !4 !5 !6 !7 !8 !
3 r e o y !5 !6 q r i o e y !5 !6 !0 y i o e u r !9q !7 !0 !1 i !2 t u !7 @0 !1 q !2 t !6 !5 !7 !2 t !0 !1 Component Parts Component Parts Note Description U packing U packing Cassette Packing O ring O ring O ring O ring O ring Gasket Spacer ASD230F only Material NBR NBR Description No. !1 !2 !3 !4 !5 !6 !7 !8 !
C( E) ( ) 1-1 3-2 ( ) 1-1 P. I. D3-3 5 P. I.
A 1.18 (30) 1.61 (41) B 1.34 (34) 1.57 (40) C D E F G 136314 2.76 (70) 2.97 (75.5) .21 (5.4) .26 (6.5) .61 (15.4) .31 (8) 2.17 (55) 2.09 (53) .09 (2.3) .09 (2.3) NARM2500 43.5 136414 NARM3000 30 15 Precautions 0 35.3 70.6 106 Be sure to read before handling.